IP Library Granted Patent US 9,845,548
Granted Patent B2
US 9,845,548 · App. 14/541,755 · Granted Dec 19, 2017

Advanced crucible support and thermal distribution management

Inventors: David F. Broyer (Kingston, NH); Hui Zhang (Nashua, NH); Ning Duanmu (Nashua, NH); Ian T. Witting (Goffstown, NH)
Assignee: GTAT Corporation
C30B11/002C30B11/003C30B15/14C30B29/20C30B35/00Y10T117/1068Y10T117/1092
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Quick Facts
Patent No.
US 9,845,548
App. No.
14/541,755
Granted
Dec 19, 2017
Kind
B2
Abstract

According to the disclosed embodiments, an advanced crucible support system is described that allows for greater heat flow to and from the bottom of a crucible, preferably while also preventing excessive heat from reaching a heat exchanger. In particular, a support base is described that includes one or more vents enabling improved heat flow throughout the system. Also, according to one or more additional embodiments, the functionality of the crucible support is adapted to be leveraged by a crucible manipulating device. For example, the support plate may have a plurality of slots for insertion of a “lifting arm”, such that the entire support plate assembly, as well as the crucible itself while on the support assembly, may be lifted and transported as a single unit.

Claims (18)

1. A crystal growth apparatus comprising:

a chamber and

a hot zone within the chamber, the hot zone comprising at least one heating system, at least on heat removal system, a crucible containing at least solid feedstock, and a crucible support system in contact with an exterior bottom surface of the crucible, the heat removal system comprising a heat exchanger positioned beneath the crucible, wherein the crucible support system is a ring having a constant contact around the exterior bottom surface of the crucible,

wherein the crucible support system comprises a plurality of vents configured to allow heat flow between the heating system and the exterior bottom surface of the crucible.

2. The crystal growth furnace of claim 1 , wherein the crucible support system comprises an aperture configured to allow passage of the heat removal system.

3. The crystal growth apparatus of claim 1 , wherein the crucible support system comprises a horizontal support plate having a plurality of downwardly facing crown features, the horizontal support plate being configured to receive and vertically support the crucible and the crown features spaced to form the vents.

4. The crystal growth apparatus of claim 3 , wherein the exterior bottom surface of the crucible comprises an angled outer region and wherein the horizontal support plate has an upper surface angled to match the angled outer region of the exterior bottom surface of the crucible.

5. The crystal growth apparatus of claim 3 further comprising at least one shim positioned between the horizontal support plate and the exterior bottom surface of the crucible.

6. The crystal growth apparatus of claim 3 , wherein the c crucible has a cylindrical shape and wherein the crucible support system is a circular support ringhaving the plurality of downwardly facing crown features.

7. The crystal growth apparatus of claim 1 , wherein the crucible support system comprises a horizontal support plate and a downwardly facing vertical wall having a plurality of shaped openings, the horizontal support plate being configured to receive and vertically support the crucible and the shaped openings forming the vents.

8. The crystal growth apparatus of claim 7 , wherein the exterior bottom surface of the crucible comprises an angled outer region and wherein the horizontal support plate has an upper surface angled to match the angled outer region of the exterior bottom surface of the crucible.

9. The crystal growth apparatus of claim 7 further comprising at least one shim positioned between the horizontal support plate and the exterior bottom surface of the crucible.

10. The crystal growth apparatus of claim 7 , wherein the crucible has a cylindrical shape and wherein the crucible support system is a circular crucible support ring having the plurality of shaped openings.

11. The crystal growth apparatus of claim 7 , wherein the shaped openings are circular oval, rectangular, or square.

12. The crystal growth apparatus of claim 1 , wherein the crucible further comprises at least one monocrystalline seed centrally positioned on an interior bottom surface of the crucible.

13. The crystal growth apparatus of claim 1 , wherein the heat exchanger is in thermal contact with the exterior bottom surface of the crucible.

14. The crystal growth apparatus of claim 1 , Wherein the feedstock comprises alumna.

15. The crystal gowth apparatus of claim 1 , wherein crystal growth apparatus is a sapphire crystal growth apparatus.

Assignments (8)
RELEASE OF SECURITY INTEREST Recorded Jun 14, 2022
From: DEUTSCHE BANK AG NEW YORK BRANCH, AS COLLATERAL AGENT
To: GTAT CORPORATION
Reel/Frame 060190/0717 →
SECURITY INTEREST Recorded Jan 21, 2022
From: GTAT CORPORATION; GTAT IP HOLDING LLC; BY: GTAT TERRA INC., ITS SOLE MEMBER
To: DEUTSCHE BANK AG NEW YORK BRANCH, AS COLLATERAL AGENT
Reel/Frame 058725/0379 →
TERMINATION OF SECURITY INTEREST IN PATENT RIGHTS Recorded Oct 29, 2021
From: CANTOR FITZGERALD SECURITIES (AS COLLATERAL AGENT)
To: GTAT CORPORATION
Reel/Frame 057972/0098 →
SECURITY INTEREST Recorded Oct 4, 2018
From: GTAT CORPORATION
To: CANTOR FITZGERALD SECURITIES, AS COLLATERAL AGENT
Reel/Frame 047073/0785 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 30, 2017
From: BROYER, DAVID F.; ZHANG, HUI; DUANMU, NING; WITTING, IAN T.
To: GT CRYSTAL SYSTEMS, LLC
Reel/Frame 044324/0269 →
MERGER AND CHANGE OF NAME Recorded Oct 30, 2017
From: GT CRYSTAL SYSTEMS, LLC; GTAT CORPORATION
To: GTAT CORPORATION
Reel/Frame 043983/0057 →
RELEASE OF SECURITY INTEREST Recorded May 16, 2017
From: UMB BANK, NATIONAL ASSOCIATION
To: GTAT CORPORATION
Reel/Frame 042479/0517 →
SECURITY INTEREST Recorded Mar 25, 2016
From: GTAT CORPORATION
To: UMB BANK, NATIONAL ASSOCIATION
Reel/Frame 038260/0341 →
Continuity (3)
Continuation In Part 14488501 · Sep 17, 2014
Provisional Application 61884503 · Sep 30, 2013
Related Publication 20150176150A1 · Jun 25, 2015