Organic EL display device and method of manufacturing the same

1. A method of manufacturing an organic EL display device including a display part arranged with a plurality of pixels including an organic EL light emitting layer, and a terminal part arranged with a plurality of terminals each connected to the organic EL light emitting layer respectively, the method comprising:

forming a TFT drive circuit layer controlling the organic EL light emitting layer and forming the plurality of terminals connected to the TFT drive circuit layer on a first substrate; forming the organic EL light emitting layer connected to the TFT drive circuit layer over the TFT drive circuit layer;

forming a sealing film over the organic EL light emitting layer;

adhering a second substrate covering the display part in a position corresponding to the first substrate;

forming a touch panel sensor substrate and an electrode layer over the second substrate; and

exposing the plurality of terminals by etching a part of the sealing film while the electrode layer is on an uppermost layer.

2. The method of manufacturing an organic EL display device according to claim 1 , wherein an electrode included in the electrode layer is formed using ITO.

3. The method of manufacturing an organic EL display device according to claim 1 , wherein forming the electrode layer includes forming lead wiring connecting an electrode included in the electrode layer and an external circuit, and the lead wiring uses a material with a higher conductivity than a material used for the electrode.

4. The method of manufacturing an organic EL display device according to claim 3 , further comprising:

forming a film with thermal conductivity electrically connecting the lead wiring with a rear surface of the first substrate.

5. The method of manufacturing an organic EL display device according to claim 1 , wherein a plurality of concave parts are formed by the etching process in a surface of the sensor substrate.

6. The method of manufacturing an organic EL display device according to claim 1 , wherein the etching process etches the sealing film using the sensor substrate or the electrode layer as a mask.

7. The method of manufacturing an organic EL display device according to claim 2 , wherein a fluorine based gas is used in the etching process.

8. The method of manufacturing an organic EL display device according to claim 7 , wherein silicon nitride is used as the sealing film.