Physical quantity sensor with multiple masses and displacement conversion mechanism
View Patent ↗A functional element includes a driving portion, a first mass portion which is vibrated along the first direction, a first connection portion which is connected to the first mass portion and can perform a first movement in which the first connection portion contracts and extends along the first direction, a second connection portion which is connected to the first connection portion, extends in a second direction intersecting the first direction, and can perform a second movement in which the second connection portion rotates with the second direction as the axis, and a second mass portion which is connected to the second connection portion.
1. A functional element comprising:
a driving portion;
a first mass portion which is movable in a first direction and is driven by the driving portion;
a first connection portion which is connected to the first mass portion at a first end and is extendable and contractible in the first direction along the length of the first connection portion;
a second connection portion which is connected to a second end of the first connection portion and is formed in a second direction intersecting the first direction, the length of the second connection portion extending in the second direction; and
a second mass portion which is connected to an end of the second connection portion,
wherein the second mass portion can rotate with an axial center of the second connection portion as a rotational axis.
2. The functional element according to claim 1 ,
wherein the first connection portion is asymmetrically connected to the second connection portion with respect to the axial center of the second connection portion.
3. The functional element according to claim 1 ,
wherein the second mass portion includes a detection portion which detects a Coriolis force by at least one of a rotational movement having an axial center in the first direction and a rotational movement having an axial center in the second direction.
4. The functional element according to claim 1 ,
wherein the first mass portion includes a detection portion which detects a Coriolis force by a rotational movement having an axial center in a direction orthogonal to the first direction.
5. The functional element according to claim 1 ,
wherein the first connection portion is connected to a third mass portion opposite to the first mass portion.
6. The functional element according to claim 5 ,
wherein the third mass portion includes a detection portion which detects a Coriolis force by a rotational movement having an axial center in a direction orthogonal to the first direction.
7. An electronic device on which the functional element according to claim 1 is mounted.
8. An electronic device on which the functional element according to claim 2 is mounted.
9. An electronic device on which the functional element according to claim 3 is mounted.
10. An electronic device on which the functional element according to claim 4 is mounted.
11. An electronic device on which the functional element according to claim 5 is mounted.
12. An electronic device on which the functional element according to claim 6 is mounted.
13. A moving object on which the functional element according to claim 1 is mounted.
14. A moving object on which the functional element according to claim 2 is mounted.
15. A moving object on which the functional element according to claim 3 is mounted.
16. A moving object on which the functional element according to claim 4 is mounted.
17. A moving object on which the functional element according to claim 5 is mounted.
18. A moving object on which the functional element according to claim 6 is mounted.