Semiconductor device and method of fabricating the same
View Patent ↗A method for fabricating a semiconductor device includes defining a curved active region by forming a plurality of trenches over a semiconductor substrate, forming an insulating layer to fill the plurality of trenches, and forming a pair of gate lines crossing the curved active region, so that it is possible to prevent leaning of an active region by forming a curved active region.
1. A semiconductor device comprising:
a curved active region defined by a plurality of trenches formed over a semiconductor substrate;
an insulating layer filling the plurality of trenches; and
a pair of gate lines crossing the curved active region,
wherein the curved active region includes a first region which protrudes toward a first direction and a second region which is in contact with the first region and protrudes toward a second direction crossing the first direction, and
wherein one of the pair of gate lines crosses the first region, the other of the pair of gate lines crosses the second region, and the pair of gate lines extend along a third direction crossing the first and second directions.
2. The semiconductor device of claim 1 , wherein the pair of gate lines are parallel.
3. The semiconductor device of claim 1 , wherein each of the gate lines includes a buried gate line.
4. The semiconductor device of claim 1 , further comprising:
a bit line extending to intersect the pair of gate lines in contact with the curved active region.