Solar cell and method of manufacturing the same
View Patent ↗A solar cell is discussed. The solar cell according to an embodiment includes a semiconductor substrate, a first conductive type region and a second conductive type region disposed on the same side of the semiconductor substrate, wherein at least one of the first and second conductive type regions includes a main region and a boundary region disposed at a peripheral portion of the main region, and the boundary region has at least one of a varying doping concentration and a varying doping depth.
1. A solar cell comprising:
a semiconductor substrate;
a tunneling layer on a surface of the semiconductor substrate; and
a first conductive type region and a second conductive type region disposed on the tunneling layer at the same side of the semiconductor substrate,
wherein at least one of the first and second conductive type regions comprises a main region and a boundary region disposed at a peripheral portion of the main region,
the boundary region has at least one of a varying doping concentration and a varying doping depth,
the first conductive type region comprises a first main region and a first boundary region disposed at a peripheral portion of the first main region, the first boundary region having at least one of a first varying doping concentration and a first varying doping depth,
the second conductive type region comprises a second main region and a second boundary region disposed at a peripheral portion of the second main region, the second boundary region having at least one of a second varying doping concentration and a second varying doping depth, and
each of the first main region and the first boundary region includes a first conductive type dopant and each of the second main region and the second boundary region includes a second conductive type dopant different from the first conductive type dopant.
2. The solar cell according to claim 1 ,
wherein the first boundary region has a different width than the second boundary region.
3. The solar cell according to claim 2 , wherein the semiconductor substrate comprises a base region, the first conductive type region has a conductive type opposite that of the base region, the second conductive type region has the same conductive type as that of the base region, and the first boundary region has a larger width than the second boundary region.
4. The solar cell according to claim 2 , wherein the first conductive type region is of a p-type, the second conductive type region is of an n-type, and the first boundary region has a larger width than the second boundary region.
5. The solar cell according to claim 3 , wherein the width of the first boundary region is twice or more of a width of the second boundary region.
6. The solar cell according to claim 5 , wherein the width of the first boundary region is twice to four times the width of the second boundary region.
7. The solar cell according to claim 3 , wherein the first conductive type region comprises boron (B) and is of a p-type, and the second conductive type region comprises phosphorus (P) and is of an n-type.
8. The solar cell according to claim 1 , wherein at least one of the doping concentration and the doping depth of the boundary region gradually decreases in going away from the main region.
9. The solar cell according to claim 1 , further comprising a barrier region or a base region disposed between the first and second conductive type regions.
10. The solar cell according to claim 1 , wherein the first conductive type region, the second conductive type region and the boundary region are coplanar.
11. The solar cell according to claim 1 , wherein a distance between the first and second conductive type regions is 1 μm to 100 μm.
12. A method of manufacturing a solar cell, the method comprising:
forming a tunneling layer on a surface of a semiconductor substrate; and
forming first and second conductive type regions on the tunneling layer at the same side of the semiconductor substrate,
wherein at least one of the first and second conductive type regions comprises a main region and a boundary region disposed at a peripheral portion of the main region,
the boundary region has at least one of a varying doping concentration and a varying doping depth,
the first conductive type region comprises a first main region and a first boundary region disposed at a peripheral portion of the first main region, the first boundary region having at least one of a first varying doping concentration and a first varying doping depth,
the second conductive type region comprises a second main region and a second boundary region disposed at a peripheral portion of the second main region, the second boundary region having at least one of a second varying doping concentration and a second varying doping depth, and
each of the first main region and the first boundary region includes a first conductive type dopant and main region and the second boundary region includes a second conductive type dopant different from the first conductive type dopant.
13. The method according to claim 12 ,
wherein the first boundary region has a different width than the second boundary region.
14. The method according to claim 13 , wherein the first and second main regions are formed by ion implantation, and the first and second boundary regions are formed through diffusion by activated heat treatment of the first and second boundary regions.
15. The method according to claim 14 , wherein the activated heat treatment of the first main region and the activated heat treatment of the second main region are performed together using the same manufacturing process.
16. The method according to claim 14 , wherein the first and second main regions are respectively formed through ion implantation of first and second conductive type impurities using a mask member or a barrier member as a mask.
17. The method according to claim 13 , wherein the forming of the first and second conductive type regions comprises:
forming a semiconductor layer at a surface of the semiconductor substrate;
forming the first main region by doping the semiconductor layer with a first conductive type impurity using a mask having a first opening exposing a region corresponding to the first main region;
forming the second main region by doping the semiconductor layer with a second conductive type impurity using a mask having a second opening exposing a region corresponding to the second main region; and
forming the first and second boundary regions in an undoped region disposed between the first and second main regions by heat-treating the first and second main regions.
18. The method according to claim 17 , wherein a barrier region is disposed between the first and second conductive type regions, and
wherein the barrier region has a smaller area than the undoped region.
19. The method according to claim 17 , further comprising, between the forming of the semiconductor layer and the forming of the first main region, forming a barrier member on the semiconductor layer, the barrier member corresponding to a boundary portion between the first and second conductive type regions.
20. The method according to claim 17 , further comprising, between the forming of the semiconductor layer and the forming of the first main region, forming an amorphous region in the semiconductor layer by ion-implanting a preamorphized element into a boundary portion between the first and second conductive type regions of the semiconductor layer.