X-ray tube and method of manufacturing the same

1. A stationary anode X-ray tube for X-ray analysis comprising:

an envelope comprising an opening;

an X-ray transmission assembly mounted on the envelope and vacuum-tightly blocking the opening;

a cathode accommodated in the envelope and configured to emit electrons; and

an anode target accommodated in the envelope and configured to emit X-rays,

wherein the X-ray transmission assembly comprises,

a window frame opposing the opening and vacuum-tightly mounted to the envelope,

an X-ray transmission window formed of a beryllium thin plate, accommodated in the window frame, and configured to maintain, along with the window frame, a vacuum-tight state inside the envelope and transmit X-rays,

an X-ray-resistive resin film located in the atmosphere side from the window frame, opposing the X-ray transmission window with a gap between the X-ray-resistive resin film and window frame, and configured to form a space inside along with the window frame and the X-ray transmission window,

a sealing member configured to air-tightly block the gap between the window frame and the X-ray-resistive resin film to maintain an airtight state of the space, and

a dry gas which is filled in the space and does not contain moisture.

2. The stationary anode X-ray tube of claim 1 , wherein the sealing member comprises a rubber sealing member provided between the window frame and the X-ray-resistive resin film, and a pressurization member configured to maintain a state that the X-ray-resistive resin film is pressurized onto the window frame via the rubber sealing member.

3. The stationary anode X-ray tube of claim 1 , wherein the dry gas is an inert gas containing at least one of nitrogen, neon, argon, krypton and xenon.

4. The stationary anode X-ray tube of claim 1 , wherein the sealing member comprises at least one of an adhesive joint portion which utilizes fusion of the X-ray-resistive resin film.

5. The stationary anode X-ray tube of claim 1 , wherein

the X-ray-resistive resin film is formed of polyetheretherketone (PEEK) or polyimide (PI).

6. A stationary anode X-ray tube for X-ray analysis comprising:

an envelope comprising an opening;

an X-ray transmission assembly mounted on the envelope and vacuum-tightly blocking the opening;

a cathode accommodated in the envelope and configured to emit electrons; and

an anode target accommodated in the envelope and configured to emit X-rays,

wherein the X-ray transmission assembly comprises,

a window frame opposing the opening and vacuum-tightly mounted to the envelope,

an X-ray transmission window formed of a beryllium thin plate, accommodated in the window frame, and configured to maintain, along with the window frame, a vacuum-tight state inside the envelope and transmit X-rays,

an X-ray-resistive resin film located in the atmosphere side from the X-ray transmission window, opposing the X-ray transmission window with a gap between the X-ray-resistive resin film and the X-ray transmission window,

a frame member opposing the opening, provided with the X-ray-resistive resin film air-tightly attached on the frame member, and configured to form a space inside along with the window frame, the X-ray transmission window and the X-ray-resistive resin film,

a sealing member configured to air-tightly block the gap between the window frame and the frame member to maintain an airtight state of the space, and

a dry gas which is filled in the space and does not contain moisture.

7. The stationary anode X-ray tube of claim 6 , wherein the sealing member comprises a rubber sealing member provided between the window frame and the frame member, and a pressurization member configured to maintain a state that the frame member is pressurized onto the window frame via the rubber sealing member.

8. The stationary anode X-ray tube of claim 6 , wherein the dry gas is an inert gas containing at least one of nitrogen, neon, argon, krypton and xenon.

9. The stationary anode X-ray tube of claim 6 , wherein the sealing member comprises at least one of an adhesive joint portion which utilizes fusion of the X-ray-resistive resin film.

10. The stationary anode X-ray tube of claim 6 , wherein

the X-ray-resistive resin film is formed of polyetheretherketone (PEEK) or polyimide (PI).

11. A method of manufacturing a stationary anode X-ray tube for X-ray analysis, comprising:

preparing an envelope comprising an opening, a window frame, an X-ray transmission window formed of a beryllium thin plate, to transmit X-rays, a cathode to emit electrons, an anode target to emit X-rays, and an X-ray-resistive resin film;

accommodating the X-ray transmission window in the window frame;

mounting the window frame onto the envelope while the window frame in which the X-ray transmission window is accommodated opposing the opening, thereby vacuum-tightly blocking the opening;

accommodating the cathode and the anode target in the envelope;

evacuating internal space of the envelope in which the cathode and the anode target are accommodated and to which the window frame accommodating the X-ray transmission window therein is mounted, and vacuum-tightly sealing the envelope;

setting the X-ray-resistive resin film to locate an outer side of the envelope and to oppose the X-ray transmission window with a gap between the X-ray-resistive resin film and the X-ray transmission window in a dry gas atmosphere that does not contain moisture, thereby forming a space filled with a dry gas and defined by the window frame, the X-ray transmission window and the X-ray-resistive resin film; and

air-tightly blocking the gap between the window frame and the X-ray-resistive resin film with a sealing member to maintain an airtight state of the space, thereby forming an X-ray transmission assembly comprising the window frame, the X-ray transmission window, the X-ray-resistive resin film, the sealing member and the dry gas.

12. The method of claim 11 , wherein, maintaining the airtight state of the space with the sealing member comprises:

providing a rubber sealing member of the sealing member between the window frame and the X-ray-resistive resin film, and

maintaining the X-ray-resistive resin film using a pressurization member of the sealing member in a state that the X-ray-resistive resin film is pressurized on the window frame via the rubber sealing member.

13. The method of claim 11 , wherein the dry gas is an inert gas containing at least one of nitrogen, neon, argon, krypton and xenon.

14. The method of claim 11 , wherein the sealing member comprises at least one of an adhesive joint portion which utilizes fusion of the X-ray-resistive resin film.

15. The method of claim 11 , wherein

the X-ray-resistive resin film is formed of polyetheretherketone (PEEK) or polyimide (PI).

16. A method of manufacturing a stationary anode X-ray tube for X-ray analysis, comprising:

preparing an envelope comprising an opening, a window frame, an X-ray transmission window formed of a beryllium thin plate, to transmit X-rays, a cathode to emit electrons, an anode target to emit X-rays, a frame member and an X-ray-resistive resin film;

accommodating the X-ray transmission window in the window frame;

mounting the window frame onto the envelope while the window frame in which the X-ray transmission window is accommodated opposing the opening, thereby vacuum-tightly blocking the opening;

accommodating the cathode and the anode target in the envelope;

evacuating internal space of the envelope in which the cathode and the anode target are accommodated and to which the window frame accommodating the X-ray transmission window therein is mounted, and vacuum-tightly sealing the envelope;

air-tightly attaching the X-ray-resistive resin film to the frame member;

setting the X-ray-resistive resin film to oppose the X-ray transmission window with a gap between the X-ray-resistive resin film and the X-ray transmission window while the frame member opposing the opening in an outer side of the envelope in a dry gas atmosphere that does not contain moisture, thereby forming a space filled with a dry gas and defined by the window frame, the X-ray transmission window, the X-ray-resistive resin film and the frame member; and

air-tightly blocking the gap between the window frame and the frame member with a sealing member to maintain an airtight state of the space, thereby forming an X-ray transmission assembly comprising the window frame, the X-ray transmission window, the frame member, the X-ray-resistive resin film, the sealing member and the dry gas.

17. The method of claim 16 , wherein, maintaining the airtight state of the space with the sealing member comprises:

providing a rubber sealing member of the sealing member between the window frame and the frame member, and

maintaining the frame member using a pressurization member of the sealing member in a state that the frame member is pressurized on the window frame via the rubber sealing member.

18. The method of claim 16 , wherein the dry gas is an inert gas containing at least one of nitrogen, neon, argon, krypton and xenon.

19. The method of claim 16 , wherein the sealing member comprises at least one of an adhesive joint portion which utilizes fusion of the X-ray-resistive resin film.

20. The method of claim 16 , wherein

the X-ray-resistive resin film is formed of polyetheretherketone (PEEK) or polyimide (PI).