IP Library Granted Patent US 9,666,322
Granted Patent B2
US 9,666,322 · App. 14/565,474 · Granted May 30, 2017

X-ray source assembly

Inventors: Isaac Mazor (Haifa, IL); Asher Peled (Kfar-Vradim, IL); Alex Brandt (Tiberias, IL); Matthew Wormington (Littleton, CO)
Assignee: BRUKER JV ISRAEL LTD
G21K1/06H01J35/14H05G1/52
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Quick Facts
Patent No.
US 9,666,322
App. No.
14/565,474
Granted
May 30, 2017
Kind
B2
Abstract

An apparatus includes an X-ray tube, X-ray optics, one or more coils and control circuitry. The X-ray tube is configured to direct an electron beam onto an anode so as to emit an X-ray beam. The X-ray optics which configured to receive the X-ray beam emitted from the X-ray tube and to direct the X-ray beam onto a target. The coils are configured to steer the electron beam in the X-ray tube using electrical currents flowing through the coils. The control circuitry is configured to compensate for misalignment between the X-ray tube and the X-ray optics by analyzing the X-ray beam output by the X-ray optics, and setting the electrical currents based on the analyzed X-ray beam.

Claims (26)

1. Apparatus, comprising:

an X-ray tube, which comprises an X-ray window and is configured to direct an electron beam onto an anode so as to emit an X-ray beam through the X-ray window;

X-ray optics, which are mounted externally to the X-ray tube with a mechanical misalignment relative to the X-ray tube, and which are configured to receive the X-ray beam emitted from the X-ray tube through the X-ray window, and to direct the X-ray beam onto a target;

one or more coils, which are configured to steer the electron beam in the X-ray tube using electrical currents flowing through the coils; and

control circuitry, which is configured to:

determine, based on the X-ray beam output by the X-ray optics, respective values of the electrical currents that, when flowing in the coils, steer the electron beam to a region of the anode that causes the X-ray beam to compensate for the mechanical misalignment between the X-ray tube and the X-ray optics; and

set the electrical currents to the determined values.

2. The apparatus according to claim 1 , wherein the control circuitry is configured to set the electrical currents to be constant.

3. The apparatus according to claim 1 , wherein the control circuitry is configured to set the electrical currents adaptively based on the X-ray beam.

4. The apparatus according to claim 1 , wherein the target comprises a detector comprised in the control circuitry, and wherein the control circuitry further comprises a processor configured to analyze an output of the detector and to set the electrical currents depending on the output.

5. The apparatus according to claim 1 , wherein the control circuitry is configured to estimate a deviation of an actual characteristic of the emitted X-ray beam from a specified characteristic, and to set the electrical currents depending on the deviation.

6. The apparatus according to claim 5 , wherein the actual and specified characteristics comprise at least one type of characteristic selected from a group of types consisting of a beam intensity, a beam spot size, and an intensity distribution across a beam spot.

7. The apparatus according to claim 1 , wherein, in addition to compensating for the misalignment, the control circuitry is configured to optimize a characteristic of the X-ray beam by setting the electrical currents.

8. The apparatus according to claim 1 , wherein the X-ray tube comprises an integrated magnetic shield, which is configured to protect the electron beam from magnetic fields external to the X-ray tube.

9. A method, comprising:

in an X-ray tube, which comprises an X-ray window, directing an electron beam onto an anode so as to emit an X-ray beam through the X-ray window;

receiving the X-ray beam emitted from the X-ray tube through the X-ray window, and directing the X-ray beam by X-ray optics, which are mounted externally to the X-ray tube with a mechanical misalignment relative to the X-ray tube, onto a target;

steering the electron beam in the X-ray tube using electrical currents flowing through coils surrounding the X-ray tube; and

determining, based on the X-ray beam output from the X-ray optics, respective values of the electrical currents that, when flowing in the coils, steer the electron beam to a region of the anode that causes the X-ray beam to compensate for the mechanical misalignment between the X-ray tube and the X-ray optics, and setting the electrical currents to the determined values.

10. The method according to claim 9 , wherein setting the electrical currents comprises setting the electrical currents to be constant.

11. The method according to claim 9 , wherein setting the electrical currents comprises setting the electrical currents adaptively based on the X-ray beam.

12. The method according to claim 9 , wherein compensating for the misalignment comprises detecting the X-ray beam output by the X-ray optics using a detector, analyzing an output of the detector, and setting the electrical currents depending on the output.

13. The method according to claim 9 , wherein determining the respective values comprises estimating a deviation of an actual characteristic of the emitted X-ray beam from a specified characteristic, and setting the electrical currents depending on the deviation.

14. The method according to claim 13 , wherein the actual and specified characteristics comprise at least one type of characteristic selected from a group of types consisting of a beam intensity, a beam spot size, and an intensity distribution across a beam spot.

15. The method according to claim 9 , and comprising, in addition to compensating for the misalignment, optimizing a characteristic of the X-ray beam by setting the electrical currents.

16. The method according to claim 9 , and comprising protecting the electron beam from magnetic fields external to the X-ray tube by applying an integrated magnetic shield.

Assignments (4)
CHANGE OF NAME Recorded May 20, 2021
From: BRUKER SCIENTIFIC LTD.
To: BRUKER TECHNOLOGIES LTD.
Reel/Frame 056297/0059 →
CHANGE OF NAME Recorded May 20, 2021
From: BRUKER JV ISRAEL LTD.
To: BRUKER SCIENTIFIC LTD.
Reel/Frame 056297/0129 →
CHANGE OF NAME Recorded Feb 15, 2016
From: JORDAN VALLEY SEMICONDUCTORS LTD.
To: BRUKER JV ISRAEL LTD.
Reel/Frame 037820/0200 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 10, 2014
From: MAZOR, ISAAC; PELED, ASHER; BRANDT, ALEX; WORMINGTON, MATTHEW
To: JORDAN VALLEY SEMICONDUCTORS LTD.
Reel/Frame 034446/0672 →
Continuity (2)
Provisional Application 61943419 · Feb 23, 2014
Related Publication 20150243469A1 · Aug 27, 2015