METHOD OF FORMING A MICROLENS OVER AN OPTICAL ACTIVE DEVICE BY INJECTION PROCESS

1 . A method of making an optical device, comprising:

forming an active device within a substrate; and

injecting microlens material to form a microlens over the active device such that the active device is capable of receiving or transmitting an optical signal by way of the microlens.

2 . The method of claim 1 , wherein injecting microlens material comprises operating an inkjet printer to inject the microlens material.

3 . The method of claim 1 , wherein the active device comprises a photo diode.

4 . The method of claim 1 , wherein the active device comprises a vertical cavity surface emitting laser (VCSEL).

5 . The method of claim 1 , further comprising forming a surfactant layer between the microlens and the active device.

6 . The method of claim 5 , wherein the surfactant layer is formed over an aperture structure of the active device.

7 . The method of claim 5 , wherein the surfactant layer comprises a surfactant monolayer.

8 . The method of claim 5 , wherein the surfactant layer comprises perfluorooctyltrichlorosilane.

9 . The method of claim 1 , wherein the microlens material comprises a hybrid polymer.

10 . The method of claim 1 , wherein the microlens material comprises a sol-gel material.

11 . The method of claim 1 , wherein the microlens material comprises an epoxy resin.

12 . The method of claim 1 , further comprising adding a solvent to the microlens material to achieve a defined viscosity for the microlens material.

13 . The method of claim 1 , further comprising determining a volume of microlens material to inject to form the microlens.

14 . The method of claim 1 , wherein forming the microlens comprises curing the injected microlens material.

15 . The method of claim 14 , wherein curing the injected microlens material comprises:

subjecting the injected microlens material to a first baking treatment;

subjecting the injected microlens material to an ultraviolet (UV) flood light exposure after the first baking treatment; and

subjecting the injected microlens material to a second backing treatment after the UV flood light exposure.

16 . The method of claim 15 , wherein the first baking treatment comprises subjecting the injected microlens material to a temperature of 80 degrees Celsius for substantially 30 minutes.

17 . The method of claim 15 , wherein the second baking treatment comprises subjecting the injected microlens material to a temperature of 150 degrees Celsius for substantially 25 minutes.

18 . A method of making an optical device, comprising:

forming an active device within a substrate;

forming a layer of surfactant over the active device;

injecting microlens material over the surfactant layer above the active device; and

curing the injected microlens material to form a microlens over the surfactant layer above the active device such that the active device is capable of receiving or transmitting an optical signal by way of the microlens.

19 . The method of claim 18 , wherein:

the surfactant layer comprises perfluorooctyltrichlorosilane; and

the microlens material comprises a hybrid polymer.

20 . The method of claim 18 , wherein injecting microlens material comprises operating an inkjet printer to inject the microlens material.

21 . The method of claim 18 , wherein the surfactant layer is formed over an aperture structure of the active device.

22 . An optical device, comprising:

an active device formed within a substrate;

a layer of surfactant disposed over the active device; and

a microlens disposed over the surfactant layer and the active device such that the active device is capable of receiving or transmitting an optical signal by way of the microlens.

23 . The optical device of claim 22 , wherein the surfactant layer is formed over an aperture structure of the active device.