IP Library Granted Patent US 9,634,237
Granted Patent B2
US 9,634,237 · App. 14/581,361 · Granted Apr 25, 2017

Ultrathin perpendicular pinned layer structure for magnetic tunneling junction devices

Inventors: Kangho Lee (San Diego, CA); Jimmy Kan (San Diego, CA); Xiaochun Zhu (San Diego, CA); Matthias Georg Gottwald (Leuven, BE); Chando Park (San Diego, CA); Seung Hyuk Kang (San Diego, CA)
Assignee: QUALCOMM INCORPORATED
H01L43/02H01F10/3272H01F10/3286H01L43/08H01L43/10H01L43/12
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Quick Facts
Patent No.
US 9,634,237
App. No.
14/581,361
Granted
Apr 25, 2017
Kind
B2
Abstract

A material stack of a synthetic anti-ferromagnetic (SAF) reference layer of a perpendicular magnetic tunnel junction (MTJ) may include an SAF coupling layer. The material stack may also include and an amorphous spacer layer on the SAF coupling layer. The amorphous spacer layer may include an alloy or multilayer of tantalum and cobalt or tantalum and iron or cobalt and iron and tantalum. The amorphous spacer layer may also include a treated surface of the SAF coupling layer.

Claims (13)

1. A material stack of a synthetic anti-ferromagnetic (SAF) reference layer of a perpendicular magnetic tunnel junction (MTJ), the material stack comprising:

an SAF coupling layer;

a coupling enhancement layer comprising a single layer directly on the SAF coupling layer;

an amorphous spacer layer directly on the coupling enhancement layer, in which the amorphous spacer layer comprises an alloy or multilayer comprising tantalum and cobalt or tantalum and iron or cobalt and iron and tantalum; and

no repetitions of a perpendicular magnetic anisotropy (PMA) multilayer within an anti-parallel pinned layer directly on the SAF coupling layer.

2. The material stack of claim 1 , in which the amorphous spacer layer is configured to maintain or increase tunneling magneto resistance (TMR) provided by the material stack having a reduced thickness during an annealing process.

3. The material stack of claim 1 , in which the coupling enhancement layer comprises a single PMA layer between the SAF coupling layer and the amorphous spacer layer.

4. A material stack of a synthetic anti-ferromagnetic (SAF) reference layer of a perpendicular magnetic tunnel junction (MTJ), the material stack comprising:

an SAF coupling layer;

an amorphous spacer layer on the SAF coupling layer, the amorphous spacer layer comprising an alloy or multilayer comprising tantalum and cobalt or tantalum and iron or cobalt and iron and tantalum;

a plurality of repetitions of perpendicular magnetic anisotropy (PMA) multilayers within a first anti-parallel pinned layer (AP 1 ) directly coupled to the SAF coupling layer; and

no repetitions of the PMA multilayers within a second anti-parallel pinned layer (AP 2 ) on the SAF coupling layer.

5. The material stack of claim 1 , integrated into a mobile phone, a set top box, a music player, a video player, an entertainment unit, a navigation device, a computer, a hand-held personal communication system (PCS) unit, a portable data unit, and/or a fixed location data unit.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 27, 2015
From: LEE, KANGHO; KAN, JIMMY; ZHU, XIAOCHUN; GOTTWALD, MATTHIAS GEORG; PARK, CHANDO; KANG, SEUNG HYUK
To: QUALCOMM INCORPORATED
Reel/Frame 035058/0110 →
Continuity (1)
Related Publication 20160181508A1 · Jun 23, 2016