Method of manufacturing EL display device
View Patent ↗A method of manufacturing an EL display device having a panel part includes a step of forming film of an element constituting the panel part, by using a vapor deposition equipment. The vapor deposition equipment is equipped with crucible configured to accommodate vapor deposition material, metal case configured to dispose the crucible therein, and heater configured to heat vapor deposition material in the crucible. Case includes container and lid. Container is configured to accommodate crucible with a gap between the container and crucible. Lid is configured to be removably attached to an opening of container, and includes a jetting port through which vapors of vapor deposition material jet out.
1. A method of manufacturing an EL display device having a panel part, the panel part comprising:
a light emitting part in which a plurality of pixels are arrayed, and
a thin-film transistor array device to control light emission of the light emitting part,
the method comprising forming an element constituting the panel part by using a vapor deposition equipment,
wherein the vapor deposition equipment includes:
a crucible configured to accommodate a vapor deposition material,
a metal case configured to dispose the crucible therein, and
a heating unit configured to heat the vapor deposition material in the crucible;
the metal case includes:
a container configured to accommodate the crucible with a gap between the container and the crucible, and
a lid configured to be removably attached to an opening of the container, and having a jetting port for vapors of the vapor deposition material to jet out; and
the crucible is supported by a supporter with a gap between the crucible and a bottom part of the container of the metal case such that the gap extends from the crucible to the bottom part of the container of the metal case, wherein the supporter is arranged inside the gap and the heating unit is arranged outside the gap.
2. The method of manufacturing the EL display device according to claim 1 , wherein the vapor deposition equipment includes a vapor-deposition source case to hold the metal case and the heating unit.
3. The method of manufacturing the EL display device according to claim 1 , wherein the heating unit is disposed to sandwich the metal case at side surfaces of the metal case.
4. The method of manufacturing the EL display device according to claim 1 , wherein the vapor deposition equipment includes a vapor-deposition source case to hold the metal case and the heating unit via a holder.
5. A vapor deposition equipment used for forming an element constituting a panel part of an EL display device, the panel part comprising:
a light emitting part in which a plurality of pixels are arrayed,
a thin-film transistor array device to control light emission of the light emitting part,
wherein the vapor deposition equipment includes:
a crucible configured to accommodate a vapor deposition material,
a metal case configured to dispose the crucible therein, and
a heating unit configured to heat the vapor deposition material in the crucible;
the metal case includes:
a container configured to accommodate the crucible with a gap between the container and the crucible, and
a lid configured to be removably attached to an opening of the container, and having a jetting port for vapors of the vapor deposition material to jet out; and
the crucible is supported by a supporter with a gap between the crucible and a bottom part of the container of the metal case such that the gap extends from the crucible to the bottom part of the container of the metal case, wherein the supporter is arranged inside the gap and the heating unit is arranged outside the gap.
6. The method of manufacturing the EL display device according to claim 1 , wherein a width of the supporter decreases as the supporter extends away from the crucible.
7. The vapor deposition equipment according to claim 5 , wherein a width of the supporter decreases as the supporter extends away from the crucible.
8. The method of manufacturing the EL display device according to claim 1 , wherein the heating unit is arranged outside of the metal case.
9. The vapor deposition equipment according to claim 5 , wherein the heating unit is arranged outside of the metal case.
10. The method of manufacturing the EL display device according to claim 1 , wherein the crucible and metal case are arranged and configured such that the vapors exit the crucible and enter a space within the metal case before being jet out through the jetting port.
11. The vapor deposition equipment according to claim 5 , wherein the crucible and metal case are arranged and configured such that the vapors exit the crucible and enter a space within the metal case before being jet out through the jetting port.