Semiconductor device and method of manufacturing semiconductor device
According to a first aspect of the present invention, a method of manufacturing semiconductor device includes the step of preparing a silicon substrate. The silicon substrate includes an N-type silicon layer on one surface and at least one of a PN junction, an electrode film, and a protective film on another surface. The method includes the steps of forming a Si—Ti junction by forming a first electrode film made of titanium on the N-type silicon layer; forming a second electrode film made of Al—Si on the first electrode film; forming a third electrode film made of Ni on the second electrode film; and heating the silicon substrate after forming the third electrode film. A titanium silicide layer is not formed between the N-type silicon layer and the first electrode film.
1. A semiconductor device comprising:
a silicon substrate including an N-type silicon layer on one surface and at least one of a PN junction, an electrode film, and a protective film on another surface;
a first electrode film made of titanium formed directly on the N-type silicon layer, the first electrode film forming a Si—Ti junction, titanium silicide not formed between the first electrode film and the N-type silicon layer;
a second electrode film made of Al—Si formed on the first electrode film; and
a third electrode film made of Ni formed on the second electrode film.
2. The semiconductor device according to claim 1 , further comprising: a titanium electrode film between the second electrode film and the third electrode film.
3. A semiconductor device comprising:
an N-type silicon substrate including an anode layer made of P-type silicon on a first surface and a cathode layer made of N-type silicon on a second surface opposite the first surface;
a first electrode film made of titanium formed directly on the cathode layer, the first electrode film forming a Si—Ti junction, titanium silicide not formed between the first electrode film and the cathode layer;
a second electrode film made of Al—Si formed on the first electrode film; and
a third electrode film made of Ni formed on the second electrode film.
4. A semiconductor device comprising:
a silicon substrate including an N-type silicon layer on one surface and at least one of a PN junction, an electrode film, and a protective film on another surface;
a first electrode film made of titanium formed on the N-type silicon layer, the first electrode film forming a Si—Ti junction, titanium silicide not formed between the first electrode film and the N-type silicon layer;
a second electrode film made of Al—Si formed on the first electrode film; and
a third electrode film made of Ni formed on the second electrode film,
wherein the silicon substrate is a P-type silicon substrate, the N-type silicon layer is formed on one surface of the P-type silicon substrate, another N-type silicon layer is formed on another surface of the P-type silicon substrate.