Membrane-based nano-electromechanical systems device and methods to make and use same
Nano-electromechanical systems (NEMS) devices that utilize thin electrically conductive membranes, which can be, for example, graphene membranes. The membrane-based NEMS devices can be used as sensors, electrical relays, adjustable angle mirror devices, variable impedance devices, and devices performing other functions.
1. A variable angle mirror comprising:
(a) a substrate having a cavity;
(b) a thin electrically conductive membrane bounding at least part of the cavity;
(c) a first source trace electrically connected to the thin electrically conductive membrane;
(d) a first gate trace located within the cavity; and
(e) a reflective member mechanically connected to the thin electrically conductive membrane.
2. The variable angle mirror of claim 1 , wherein the thin electrically conductive membrane comprises one layer of graphene.
3. The variable angle mirror of claim 1 , wherein the thin electrically conductive membrane comprises multiple layers of graphene.
4. The variable angle mirror of claim 1 , wherein the thin electrically conductive membrane covers the cavity.
5. A variable impedance device comprising:
(a) a substrate having a cavity;
(b) a thin electrically conductive membrane bounding at least part of the cavity;
(c) a first source trace electrically connected to the thin electrically conductive membrane;
(d) a first sensor trace located within the cavity;
(e) a first gate trace operatively connected to the substrate; and
(f) a second sensor trace located within the cavity.
6. The variable impedance device of claim 5 , wherein the thin electrically conductive membrane comprises one layer of graphene.
7. The variable impedance device of claim 5 , wherein the thin electrically conductive membrane comprises multiple layers of graphene.
8. The variable impedance device of claim 5 , wherein the thin electrically conductive membrane covers the cavity.
9. The variable impedance device of claim 5 , wherein the first gate trace is located within the cavity.
10. The variable impedance device of claim 5 further comprising a second source trace electrically connected to the thin electrically conductive membrane.
11. The variable impedance device of claim 5 , wherein the first gate trace is located within the cavity.
12. An electrical relay comprising:
(a) a substrate having a cavity;
(b) a thin electrically conductive membrane bounding at least part of the cavity;
(c) a first source trace electrically connected to the thin electrically conductive membrane;
(d) a first drain trace located within the cavity;
(e) a second drain trace located within the cavity;
(f) a first gate trace operatively connected to the substrate; and
(g) a second gate trace located within the cavity.
13. The electrical relay of claim 12 , wherein the thin electrically conductive membrane comprises of one layer of graphene.
14. The electrical relay of claim 12 , wherein the thin electrically conductive membrane comprises multiple layers of graphene.
15. The electrical relay of claim 12 , wherein the thin electrically conductive membrane covers the cavity.
16. The electrical relay of claim 12 , wherein the first gate trace is located within the cavity.
17. An electrical relay comprising:
(a) a substrate having a cavity;
(b) a thin electrically conductive membrane bounding at least part of the cavity;
(c) a first source trace electrically connected to the thin electrically conductive membrane;
(d) a first drain trace located within the cavity;
(e) a second drain trace located within the cavity;
(f) a first gate trace operatively connected to the substrate; and
(g) a third drain trace located within the cavity.
18. An electrical relay comprising:
(a) a substrate having a cavity;
(b) a thin electrically conductive membrane bounding at least part of the cavity;
(c) a first source trace electrically connected to the thin electrically conductive membrane;
(d) a first drain trace located within the cavity;
(e) a second drain trace located within the cavity;
(f) a first gate trace operatively connected to the substrate; and
(g) a metal disk mechanically connected to the thin electrically conductive membrane.
19. The electrical relay of claim 18 , wherein the metal disk comprises gold.