Semiconductor memory device and method for manufacturing same
According to one embodiment, a semiconductor memory device includes a substrate; an insulating layer provided on the substrate; a conductive layer provided on the insulating layer; a stacked body provided on the conductive layer and including a plurality of electrode layers and a plurality of insulating layers respectively provided among the plurality of electrode layers; a columnar section piercing through the stacked body to reach the conductive layer and extending in a first direction in which the stacked body is stacked; and a source layer. The columnar section includes a channel body and a charge storage film provided between the channel body and the respective electrode layers. The conductive layer includes a first film having electric conductivity and in contact with the lower end portion of the channel body; and an air gap provided to be covered by the first film.
1. A semiconductor memory device comprising:
a substrate;
an insulating layer provided on the substrate;
a conductive layer provided in the insulating layer;
a stacked body provided on the insulating layer and including a plurality of electrode layers separately stacked each other;
a semiconductor body provided in the stacked body and extending in a first direction in which the stacked body is stacked;
a charge storage film provided between the semiconductor body and the plurality of electrode layers; and
a source layer provided in the stacked body and the conductive layer, the source layer being in a plate shape extending in the first direction and a second direction that crosses the first direction,
the semiconductor body including a lower end portion provided in the conductive layer, the lower end portion electrically connected to the source layer via the conductive layer,
the conductive layer including a first film having electric conductivity and in contact with the lower end portion of the semiconductor body,
wherein the conductive layer includes a second film having electric conductivity and provided on an inner side of the first film, the first film includes polysilicon, and the second film includes tungsten.
2. The device according to claim 1 , wherein the source layer includes:
a third film made of a material same as a material of the first film; and
a fourth film provided on an inner side of the third film and made of a material same as a material of the second film.
3. The device according to claim 2 , wherein
the first film and the third film include semiconductors, and
the second film and the fourth film include metal.
4. The device according to claim 1 , wherein the insulating layer includes a column being in contact with a side surface of the conductive layer.
5. The device according to claim 1 , wherein the conductive layer includes air gap.
6. A semiconductor memory device comprising:
an insulating layer;
a conductive layer provided in the insulating layer;
a stacked body provided on the insulating layer and including a plurality of electrode layers separately stacked each other;
a first semiconductor body provided in the stacked body and extending in a first direction in which the stacked body is stacked;
a memory portion provided between the first semiconductor body and one of the plurality of electrode layers; and
a source layer extending in the first direction and in contact with the conductive layer,
the first semiconductor body including a first end portion provided in the conductive layer, the first semiconductor body electrically connected to the source layer via the conductive layer,
the conductive layer including a first film and a second film,
the first film being provided on the second film, the first film having electric conductivity, including silicon, and in contact with the first end portion of the first semiconductor body, and
the second film having electric conductivity and including metal,
wherein the first film includes polysilicon as the silicon and the second film includes tungsten as the metal.
7. The device according to claim 6 , wherein the source layer is in contact with the first film.
8. The device according to claim 6 , wherein the source layer is in contact with the second film.
9. The device according to claim 6 , wherein the source layer includes:
a third film made of a material same as a material of the first film and in contact with the first film; and
a fourth film provided on an inner side of the third film, made of a material same as a material of the second film, and in contact with the second film.
10. The device according to claim 6 , further comprising:
a second semiconductor body provided in the stacked body and extending in the first direction, the second semiconductor body including a second end portion provided in the conductive layer, the second semiconductor body separated from the first semiconductor body in a second direction crossing to the first direction, and
a third semiconductor body provided in the stacked body and extending in the first direction, the third semiconductor body including a third end portion provided in the conductive layer, the third semiconductor body separated from the first semiconductor body in a third direction crossing to the first direction and the second direction, wherein
the second semiconductor body and the third semiconductor body are electrically connected to the source layer via the conductive layer.