IP Library Granted Patent US 10,461,207
Granted Patent B2
US 10,461,207 · App. 14/602,340 · Granted Oct 29, 2019

Photovoltaic devices and method of manufacturing

Inventors: Dan Damjanovic (Perrysburg, OH); Markus Gloeckler (Perrysburg, OH); Feng Liao (Perrysburg, OH); Andrei Los (Perrysburg, OH); Dan Mao (Perrysburg, OH); Benjamin Milliron (Toledo, OH); Gopal Mor (Perrysburg, OH); Rick Powell (Ann Arbor, MI); Kenneth Ring (Waterville, OH); Aaron Roggelin (Millbury, OH); Jigish Trivedi (Perrysburg, OH); Zhibo Zhao (Novi, MI)
Assignee: First Solar, Inc.
H01L31/073H01L31/0296H01L31/02966H01L31/022441H01L31/022466H01L31/1828H01L31/1832H01L31/1864H01L31/1884H01L31/208
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Quick Facts
Patent No.
US 10,461,207
App. No.
14/602,340
Granted
Oct 29, 2019
Kind
B2
Abstract

A photovoltaic device includes a substrate structure and at least one Se-containing layer, such as a CdSeTe layer. A process for manufacturing the photovoltaic device includes forming the CdSeTe layer over a substrate by at least one of sputtering, evaporation deposition, CVD, chemical bath deposition process, and vapor transport deposition process. The process can also include controlling a thickness range of the Se-containing layer.

Claims (44)

1. A photovoltaic device comprising:

a substrate;

a transparent conductive oxide (TCO) layer formed on the substrate;

a back contact;

a CdSeTe absorber layer formed between the TCO layer and the back contact, wherein:

the CdSeTe absorber layer contacts the back contact,

the CdSeTe absorber layer is composed of cadmium, selenium, and tellurium in varying amounts,

a ratio of Te atoms to a sum of Se atoms and the Te atoms throughout the CdSeTe absorber layer compound is between about 99 to 100 and about 60 to 100; and

a buffer layer formed between the TCO layer and the CdSeTe absorber layer,

and wherein the buffer layer comprises magnesium,

and wherein a peak concentration of Se is located at an interface between the buffer layer and the CdSeTe absorber layer.

2. The photovoltaic device of claim 1 , further comprising a window layer formed between the TCO layer and the CdSeTe absorber layer.

3. The photovoltaic device of claim 2 , wherein the window layer is one of CdS and CdSSe.

4. The photovoltaic device of claim 1 , wherein the back contact is formed from one of ZnTe, CdZnTe, ZnTe:Cu, and a bi-layer including a layer of ZnTe and a layer of CdZnTe.

5. The photovoltaic device of claim 3 , further comprising a back metal electrode formed on the back contact.

6. The photovoltaic device of claim 5 , wherein the back metal electrode includes a layer of MoN x .

7. The photovoltaic device of claim 6 , wherein the back metal electrode further includes a layer of aluminum formed between a layer of chromium and the layer of MoN x .

8. The photovoltaic device of claim 5 , further comprising an interfacial layer formed from copper formed between the back metal electrode and the back contact.

9. The photovoltaic device of claim 1 , wherein the CdSeTe absorber layer is formed from CdSe x Te 1−x where x is from about 0.01 to about 0.4.

10. The photovoltaic device of claim 9 , wherein x is from about 0.01to about 0.25.

11. The photovoltaic device of claim 1 , wherein the CdSeTe absorber layer has a concentration gradient of Se formed therein.

12. The photovoltaic device of claim 11 , wherein a concentration of Se adjacent the TCO layer is higher than a concentration of Se adjacent the back contact.

13. The photovoltaic device of claim 1 , wherein the TCO layer is formed from SnO x .

14. The photovoltaic device of claim 1 , the buffer layer comprises zinc magnesium oxide.

15. The photovoltaic device of claim 1 , wherein the TCO layer comprises indium tin oxide.

16. The photovoltaic device of claim 1 , wherein the TCO layer comprises cadmium stannate.

17. The photovoltaic device of claim 1 , wherein the photovoltaic device does not include a window layer.

18. A photovoltaic device comprising:

a substrate;

a transparent conductive oxide (TCO) layer formed on the substrate;

a back contact comprising ZnTe, a CdZnTe alloy, or ZnTe and the CdZnTe alloy; and

a CdSeTe absorber layer formed between the TCO layer and the back contact,

wherein a concentration of Se of the CdSeTe absorber layer adjacent the TCO layer is higher than a concentration of Se of the CdSeTe absorber layer adjacent the back contact,

and wherein a ratio of Se atoms to a sum of the Se atoms and Te atoms throughout the CdSeTe absorber layer is between about 5 to 100 and about 10 to 100.

19. The photovoltaic device of claim 18 , comprising a MoN x back metal electrode formed on the back contact.

20. The photovoltaic device of claim 18 , wherein the CdSeTe absorber layer is intermixed from a CdSe layer and a CdTe layer with a layer of CdSeTe disposed therebetween.

21. The photovoltaic device of claim 18 , wherein the TCO layer is formed from a layer of SnO x adjacent the substrate, a layer of SiO 2 formed on the layer of SnO x , a layer of SnO 2 :F formed on the layer of SiO 2 , and a layer of SnO 2 formed between the layer of SnO 2 :F and the CdSeTe absorber layer.

22. The photovoltaic device of claim 18 , comprising a buffer layer formed between the TCO layer and the CdSeTe absorber layer, and wherein the buffer layer comprises zinc magnesium oxide.

23. The photovoltaic device of claim 18 , further comprising a back metal electrode formed on the back contact.

24. The photovoltaic device of claim 23 , wherein the back metal electrode includes a layer of aluminum formed between a layer of chromium and a layer of MoN x .

25. The photovoltaic device of claim 18 , wherein the TCO layer comprises indium tin oxide.

26. The photovoltaic device of claim 18 , wherein the TCO layer comprises cadmium stannate.

27. The photovoltaic device of claim 18 , wherein the back contact s formed from a bi-layer including a layer of ZnTe and a layer of CdZnTe.

28. The photovoltaic device of claim 18 , wherein the photovoltaic device does not include a window layer.

Assignments (5)
RELEASE OF SECURITY INTEREST Recorded Feb 13, 2026
From: JPMORGAN CHASE BANK, N.A.
To: FIRST SOLAR, INC.
Reel/Frame 074858/0364 →
SECURITY INTEREST Recorded Jul 10, 2023
From: FIRST SOLAR, INC.
To: JPMORGAN CHASE BANK, N.A., AS ADMINISTRATIVE AGENT
Reel/Frame 064237/0462 →
TERMINATION AND RELEASE OF SECURITY INTEREST IN PATENT RIGHTS Recorded Nov 15, 2021
From: JPMORGAN CHASE BANK, N.A.
To: FIRST SOLAR, INC.
Reel/Frame 058132/0566 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 17, 2019
From: DAMJANOVIC, DAN; GLOECKLER, MARKUS; LIAO, FENG; LOS, ANDREI; MAO, DAN; MILLIRON, BENJAMIN; MOR, GOPAL; POWELL, RICK; RING, KENNETH; ROGGELIN, AARON; TRIVEDI, JIGISH; ZHAO, ZHIBO
To: FIRST SOLAR, INC.
Reel/Frame 050402/0127 →
PATENT SECURITY AGREEMENT Recorded Jul 12, 2017
From: FIRST SOLAR, INC.
To: JPMORGAN CHASE BANK, N.A., AS ADMINISTRATIVE AGENT
Reel/Frame 043177/0581 →
Cited By (4)
US 12,238,943 US 12,369,426 US 12,520,599 US 12,563,857