Flow sensor, method for manufacturing flow sensor and flow sensor module
View Patent ↗A flow sensor structure seals the surface of an electric control circuit and part of a semiconductor device via a manufacturing method that prevents occurrence of flash or chip crack when clamping the semiconductor device via a mold. The flow sensor structure includes a semiconductor device having an air flow sensing unit and a diaphragm, and a board or lead frame having an electric control circuit for controlling the semiconductor device, wherein a surface of the electric control circuit and part of a surface of the semiconductor device is covered with resin while having the air flow sensing unit portion exposed. The flow sensor structure may include surfaces of a resin mold, a board or a pre-mold component surrounding the semiconductor device that are continuously not in contact with three walls of the semiconductor device orthogonal to a side on which the air flow sensing unit portion is disposed.
1. A flow sensor comprising:
a semiconductor device having an air flow sensing unit;
a lead frame connected to the semiconductor device via a wire; and
a resin component connected, via an adhesive, to a part of a surface of the semiconductor device on an opposite side with respect to a surface on which the air flow sensing unit is disposed;
wherein a part of the surface of the semiconductor device excluding the air flow sensing unit, a part of the lead frame, the wire, and a part of the resin component are directly covered with a resin; and
wherein the lead frame is disposed around all four peripheral sides of the semiconductor device.
2. The flow sensor according to claim 1 ,
wherein the semiconductor device is directly connected to the lead frame outside the resin component via the wire.
3. The flow sensor according to claim 1 ,
wherein the resin component has wall units disposed in a direction orthogonal to the side on which the semiconductor device is disposed.
4. The flow sensor according to claim 1 ,
wherein a connection point between the wire and the semiconductor device is located higher than a connection point between the wire and the lead frame.
5. The flow sensor according to claim 1 ,
wherein the lead frame is connected to ground.
6. The flow sensor according to claim 1 ,
wherein the resin component is disposed under the semiconductor device.
7. The flow sensor according to claim 1 ,
wherein the lead frame is not disposed under the semiconductor device.
8. A flow sensor comprising:
a semiconductor device having a diaphragm formed thereto, and having an air flow sensing unit formed to a position opposing the diaphragm at a surface on an opposite side from a surface on which the diaphragm is formed;
a resin component which is attached by an adhesive to a part of the surface of the semiconductor device on which the diaphragm is formed;
a lead frame connected to the semiconductor device via a wire;
wherein a part of the surface of the semiconductor device excluding the air flow sensing unit, a part of the lead frame, the wire, and a part of the resin component are directly covered with a resin; and
wherein the lead frame is disposed around all four peripheral sides of the semiconductor device.
9. The flow sensor according to claim 8 ,
wherein the semiconductor device is directly connected to the lead frame outside the resin component via the wire.
10. The flow sensor according to claim 8 ,
wherein the resin component has wall units disposed in a direction orthogonal to the side on which the semiconductor device is disposed.
11. The flow sensor according to claim 8 ,
wherein a connection point between the wire and the semiconductor device is located higher than a connection point between the wire and the lead frame.
12. The flow sensor according to claim 8 ,
wherein the lead frame is connected to ground.
13. The flow sensor according to claim 5 ,
wherein the resin component is disposed under the semiconductor device.
14. The flow sensor according to claim 5 ,
wherein the lead frame is not disposed under the semiconductor device.