Graphene for semiconductor co-doping boron and nitrogen at the same time and preparation method thereof
View Patent ↗Disclosed are boron/nitrogen co-doped graphene for semiconductor applications and a method for producing the same. The boron/nitrogen co-doping allows the use of the doped graphene in a wider variety of applications, including semiconductors. In contrast, graphene structures produced by conventional methods have good physical, chemical, and electrical stability but cannot be used in semiconductor applications due to the absence of band gaps therein. In addition, the boron/nitrogen co-doping makes the doped graphene highly dispersible in organic solvents.
1. A method of producing doped graphene for semiconductor applications, comprising
1) adding a carbon halide precursor and an alkali metal or alkaline earth metal to a closed container,
2) adding a boron precursor and a nitrogen precursor to the closed container, and
3) raising the internal temperature of the closed container to 50° C. to 400° C. and maintaining the temperature within the closed container, wherein the carbon halide precursor is selected from the group consisting of CF 4 , C 2 F 4 , CF 6 , CCl 4 , C 2 Cl 4 , CCl 6 , C 6 Cl 6 , CBr 4 , C 2 Br 4 , C 6 Br 6 , CI 4 , C 2 I 4 , C 6 I 6 , and mixtures thereof, the boron precursor is selected from the group consisting of BF, BF 3 , BCl 3 , BBr 3 , BI 3 , and mixtures thereof, wherein the nitrogen precursor is selected from the group consisting of N 2 , NH 3 , NF 3 , NCl, NBr 3 , NI 3 , NHCl 2 , NH 2 Cl, NF 5 , N 2 F 4 , N 2 Cl 4 , and mixtures thereof, wherein 0.01% to 5.00% of the boron precursor and 0.01% to 5.00% of nitrogen precursor are co-doped into graphene.
2. The method according to claim 1 , wherein, in step 1), the carbon precursor and the alkali metal or alkaline earth metal are added in amounts of 0.01 to 20% by volume.
3. The method according to claim 1 , wherein, in step 3), the internal temperature of the closed container is maintained for 0.5 to 12 hours.
4. The method according to claim 1 , wherein, in step 1), the carbon precursor and the alkali metal or alkaline earth metal are added in a total amount of 10 to 30% by volume, based on the volume of the closed container.