Semiconductor memory device and method of manufacturing the same
The semiconductor memory device includes a stacked structure including conductive patterns and interlayer insulating patterns which are alternately stacked, a through-hole configured to pass through the stacked structure; a channel pattern formed inside the through-hole, a first capping conductive pattern formed on the channel pattern, a second capping conductive pattern formed on a sidewall of the first capping conductive pattern and surrounding the first capping conductive pattern, and a contact plug formed on the first capping conductive pattern and the second capping conductive pattern.
1. A semiconductor memory device comprising:
a stacked structure including conductive patterns and interlayer insulating patterns which are alternately stacked;
a through-hole configured to pass through the stacked structure, wherein the through-hole has a width;
a channel pattern formed inside the through-hole;
a first capping conductive pattern formed on the channel pattern, wherein the first capping conductive pattern has the same width; and
a conductive material formed surrounding the first capping conductive pattern and on the first capping conductive pattern, wherein a portion of the conductive material formed surrounding the first capping conductive pattern is a second capping conductive pattern and another portion of the conductive material formed on the first capping conductive pattern is a contact plug, wherein an inner diameter of the conductive material has the same width, and an outer diameter of the conductive material is greater than the inner diameter.
2. The semiconductor memory device of claim 1 , wherein the second capping conductive pattern is formed of the same material as the contact plug and formed at the same time as the contact plug.
3. The semiconductor memory device of claim 1 , further comprising:
a multilayered dielectric pattern configured to surround the channel pattern along an inner surface of the through-hole.
4. The semiconductor memory device of claim 1 , wherein a sum of critical dimensions of the first and second capping conductive patterns is greater than a critical dimension of the through-hole.
5. The semiconductor memory device of claim 1 , wherein the contact plug is electrically coupled to a bit line.
6. The semiconductor memory device of claim 1 , wherein the channel pattern is formed in a straight type.
7. The semiconductor memory device of claim 6 , further comprising:
a semiconductor substrate including a source area electrically coupled under the channel pattern formed in the straight type and disposed under the stacked structure.
8. The semiconductor memory device of claim 1 , wherein the channel pattern further comprises:
at least two straight channel parts configured to pass through the stacked structure;
a pipe channel part configured to electrically couple the straight channel parts under the stacked structure; and
a pipe gate configured to surround the pipe channel part.
9. The semiconductor memory device of claim 8 , wherein the first and second capping conductive patterns are formed on channel parts electrically coupled to a bit line of the at least two straight channel parts, and
a mask pattern is formed on channel parts electrically coupled to a source line of the at least two straight channel parts, and surrounds the first capping conductive pattern.