Electro-optical device, method for manufacturing electro-optical device, and electronic device
Provided is a display apparatus in which a plurality of pixels are arranged. The pixels have a reflection layer, an optical distance adjusting layer, a pixel electrode, an insulating film, a light-emitting functional layer, and an opposing electrode that are sequentially layered in a Z direction. The insulating film has an opening that overlaps part of the pixel electrode. The reflection layer is disposed across the plurality of pixels, and has a high reflectance portion (where a first underlayer film and a reflection film are layered) and a low reflectance portion (where a second underlayer film and the reflection film are layered). The high reflectance portion (where the first underlayer film and the reflection film are layered) is disposed so as to overlap at least part of the opening when viewed from above.
1. An electro-optical device, comprising:
a reflection layer having a high reflectance portion and a low reflectance portion whose reflectance is lower than that of the high reflectance portion, the reflection layer having an underlayer film and a reflection film that are sequentially layered in a first direction; and
a plurality of pixels, each having sequentially layered in the first direction:
a part of the reflection layer;
an optical distance adjusting layer;
a pixel electrode;
an insulating film having an opening that overlaps a part of the pixel electrode;
a light-emitting functional layer; and
an opposing electrode,
wherein the reflection film is disposed across the plurality of pixels, the high reflectance portion is disposed so as to overlap at least part of the opening when viewed from above, the underlayer film in the high reflectance portion is made of titanium, the underlayer film in the low reflectance portion is made of titanium nitride or titanium oxide, and the reflection film is made of aluminum or alloy containing aluminum as a main component.
2. The electro-optical device according to claim 1 ,
wherein the underlayer film is made of titanium, and
a face, on a reflection film side, of the underlayer film in the low reflectance portion is covered by titanium nitride or titanium oxide.
3. An electronic device, comprising the electro-optical device according to claim 2 .
4. The electro-optical device according to claim 1 ,
wherein the underlayer film is made of titanium, and
nitrogen or oxygen is introduced to a face, on a reflection film side, of the underlayer film in the low reflectance portion.
5. An electronic device, comprising the electro-optical device according to claim 4 .
6. An electronic device, comprising the electro-optical device according to claim 1 .