Resin-encapsulated semiconductor device and method of manufacturing the same
View Patent ↗A resin-encapsulated semiconductor device is manufactured by mounting semiconductor elements on respective die pad portions of a frame. Electrodes on the surface of the semiconductor elements are wire bonded to lead portions of the frame. The die pad portions, semiconductor elements and lead portions are encapsulated with resin, leaving a bottom surface part of the lead portions exposed. The lead portions are partially cut by a rotary blade from an upper side of the resin to form concave parts in the lead portions, which are wet-etched to form exposed lead upper end parts. A plated layer is formed on the lead upper end parts and the lead bottom surface parts. The remaining parts of the lead portions with the plated layer are cut to separate the resin-encapsulated semiconductor device into individual pieces.
1. A method of manufacturing a resin-encapsulated semiconductor device, comprising:
preparing one of a frame and an electroformed substrate, including a plurality of units each including a die pad portion and a plurality of lead portions disposed opposite to the die pad portion;
mounting a semiconductor element on each of the die pad portions of the one of the frame and the electroformed substrate, and connecting the plurality of lead portions and electrodes on a surface of the semiconductor element to each other via a metal thin wire;
encapsulating the die pad portions, the semiconductor elements, and the plurality of lead portions with an encapsulating resin so that a bottom surface part of each of the plurality of lead portions is exposed;
performing lead pre-cutting by cutting a cutting region of each of the plurality of lead portions by a rotary blade from an upper surface side of the encapsulating resin, the cutting region corresponding to a boundary between the plurality of units of the one of the frame and the electroformed substrate after the resin-encapsulation, thereby forming a concave part at the cutting region while leaving a part of the each of the plurality of lead portions uncut;
subjecting a surface of the concave part to wet etching to form a lead upper end part until a region located under the encapsulating resin;
immersing the one of the frame and the electroformed substrate after the wet etching into a plating bath to form a plated layer on the lead bottom surface part and the lead upper end part; and
performing lead full-cutting by cutting, at the cutting region, the remaining part of the each of the plurality of lead portions having the plated layer formed thereon by using one of a rotary blade and a cutting punch, thereby separating the resin-encapsulated semiconductor device into individual pieces.
2. A method of manufacturing a resin-encapsulated semiconductor device according to claim 1 , wherein the encapsulating the die pad portions, the semiconductor elements, and the plurality of lead portions with an encapsulating resin includes exposing a bottom surface part of the die pad portion.