Insulated implantable electrical curcuit
The invention is directed to a method of making an implantable insulated electrical circuit that utilizes polyparaxylylene, preferably as Parylene, a known polymer that has excellent living tissue implant characteristics, to provide for chronic implantation of conductive electrical devices, such as stimulators and sensors. The device is thin, flexible, electrically insulated, and stable after long exposure to living tissue. Layers of Parylene may be combined with layers of a polymer, such as polyimide, to yield greater design flexibility in the circuit. Multiple electrical conduction layers may be stacked in the circuit to increase packing density.
1. A method of making an insulated flexible electrical circuit suitable for implantation in living tissue comprising:
providing a substrate;
depositing by vapor deposition a first polyparaxylylene layer, 0.5 to 50 microns thick;
depositing an electrically conductive layer on the first polyparaxylylene layer;
patterning the electrically conductive layer to form traces;
depositing by vapor deposition a second polyparaxylylene layer, 0.5 to 50 microns thick, on the first polyparaxylylene layer and on the trace;
forming at least one openings in the second polyparaxylylene layer that exposes the electrical conductor trace suitable for electrical communication with living tissue; and
removing the first polyparaxylylene layer, the traces and the second polyparaxylylene layer from the substrate forming a free standing structure.
2. The method according to claim 1 , further comprising depositing at least one polymer layer between the first polyparaxylylene layer and the second polyparaxylylene layer.
3. The method according to claim 2 , wherein the polymer layer comprises polyimide.
4. The method according to claim 1 , further comprising depositing at least one polymer layer on the first polyparaxylylene layer or the second polyparaxylylene layer that is not located between the first polyparaxylylene layer and the second polyparaxylylene layer.
5. The method according to claim 4 , wherein the polymer layer comprises polyimide.
6. The method according to claim 1 , further comprising depositing a polymer layer between the first polyparaxylylene layer and the electrically conductive layer.
7. The method according to claim 6 , wherein the polymer layer comprises of polyimide.
8. The method according to claim 1 , wherein the traces are configured to stimulate nerves.
9. The method according to claim 1 , wherein the traces are configured to sense signals from nerves.
10. The method according to claim 1 , wherein the second polyparaxylylene layer further defines at least one electrode site configured to detect or transmit signals to living tissue.
11. The method according to claim 1 , wherein the traces comprise a biocompatible material.
12. The method according to claim 11 , wherein the biocompatible material is selected from the group consisting of titanium, platinum, gold, and iridium.
13. The method according to claim 1 , wherein the traces are at least partially coated with a biocompatible material.
14. The method according to claim 13 , wherein the biocompatible material comprises titanium nitride.
15. The method according to claim 1 , wherein a coating is deposited on the electrical conductor at the at least one aperture and is comprised of biocompatible titanium nitride.
16. The method according to claim 1 , further comprising depositing a coating on the trace at the at least one aperture.
17. The method according to claim 16 , wherein the coating is selected from the biocompatible metal group consisting of titanium, platinum, gold, iridium, or their alloys.
18. The method according to claim 16 , wherein the coating comprises titanium nitride, titanium, platinum, gold, iridium, or their alloys.