Semiconductor device
View Patent ↗A semiconductor device includes a semiconductor substrate, an interlayer insulating film on the semiconductor substrate and having a first hole extending therethrough, and a contact portion in the first hole of the interlayer insulating film. The contact portion includes a first silicon film along an inner surface of the first hole of the interlayer insulating film.
1. A semiconductor device comprising:
a semiconductor substrate;
an interlayer insulating film on the semiconductor substrate and having a first hole extending therethrough;
a contact portion in the first hole of the interlayer insulating film;
a first wiring portion that is connected with the contact portion in a second hole formed in an upper portion of the interlayer insulating film,
wherein the contact portion includes a first silicon film along an inner surface of the first hole of the interlayer insulating film, and wherein the first wiring portion in the second hole includes a second silicon film.
2. The semiconductor device according to claim 1 , wherein the wiring portion includes:
a main contact film comprising tungsten (W) at a core portion in the second hole, and
a barrier metal film between a metal silicide film and the main contact film.
3. The semiconductor device according to claim 1 , further comprising:
a metal silicide film between the interlayer insulating film and the first silicon film.
4. The semiconductor device according to claim 3 , further comprising:
a metal film between the interlayer insulating film and the metal silicide film.
5. The semiconductor device according to claim 4 , wherein the metal film comprises titanium (Ti) or nickel (Ni).
6. The semiconductor device according to claim 3 , wherein the metal silicide film is formed of titanium silicide (TiSi).
7. The semiconductor device according to claim 3 ,
wherein a third hole is formed in the semiconductor substrate,
wherein the metal silicide film is formed to come into contact with an inner surface of the third hole formed in the semiconductor substrate, and
wherein a thickness of a bottom portion of a contact surface between the metal silicide film and the third hole of the semiconductor substrate is a first thickness and a thickness of a side portion of a contact surface between the metal silicide film and the third hole of the semiconductor substrate is a second thickness, the first thickness is larger than the second thickness.
8. The semiconductor device according to claim 1 , wherein the first silicon film is formed only above a main surface of the semiconductor substrate.
9. The semiconductor device according to claim 1 , wherein the contact portion includes:
a main contact film, formed of tungsten (W), that is formed at a core portion in the first hole, and
a barrier metal film that is formed between the main contact film and the first silicon film.
10. The semiconductor device according to claim 1 , wherein the contact portion includes:
a main contact film, formed of tungsten (W), that is formed at a core portion in the first hole, and
a barrier metal film that is formed between a metal silicide film and the main contact film.
11. The semiconductor device according to claim 1 ,
wherein the contact portion includes a main contact film comprising tungsten (W) at a core portion in the first hole, and
wherein the metal film is between a lower surface of the main contact film and an upper surface of the interlayer insulating film.
12. The semiconductor device according to claim 1 ,
wherein the wiring portion includes a main contact film comprising tungsten (W) at a core portion in the second hole, and
wherein the metal film is between a lower surface of the main contact film and an upper surface of the interlayer insulating film.
13. The semiconductor device according to claim 1 , further comprising:
a second wiring portion in a fourth hole at an upper portion of the interlayer insulating film,
wherein the second wiring portion includes a third silicon film.
14. The semiconductor device according to claim 13 ,
wherein the second wiring portion includes a main wiring film comprising tungsten (W) at a core portion in the fourth hole, and
wherein the metal film is between a lower surface of the main wiring film and an upper surface of the interlayer insulating film.
15. A semiconductor device comprising:
a semiconductor substrate;
an interlayer insulating film on the semiconductor substrate and having a first hole extending therethrough and into the semiconductor substrate;
a contact portion in the first hole of the interlayer insulating film, and
a first wiring portion that is connected with the contact portion in a second hole formed in an upper portion of the interlayer insulating film,
wherein the contact portion includes a first silicon film along an inner surface of the first hole of the interlayer insulating film, and wherein the first wiring portion in the second hole includes a second silicon film.
16. The semiconductor device according to claim 15 , wherein the wiring portion includes:
a main contact film comprising tungsten (W) at a core portion in the second hole, and
a barrier metal film between a metal silicide film and the main contact film.
17. The semiconductor device according to claim 15 , further comprising:
a metal silicide film between the interlayer insulating film and the first silicon film.
18. The semiconductor device according to claim 17 , further comprising:
a metal film between the interlayer insulating film and the metal silicide film.