CARRIER SYSTEMS FOR INTRODUCING MATERIALS INTO MATERIAL PROCESSING SYSTEMS

1 . A carrier system for holding precursor material, comprising:

a carrier including a plurality of sections, each section of the plurality including a receptacle; and

a plurality of cups for holding precursor material, wherein each cup of the plurality of cups is configured to be positioned within a receptacle of a section of the plurality of sections of the carrier.

2 . The carrier system of claim 1 , wherein each cup includes a cylindrical shape for be being positioned within a cylindrical receptacle of the carrier.

3 . The carrier system of claim 1 , the carrier including an exterior including a peripheral surface and a curved bottom surface extending from the peripheral surface.

4 . The carrier system of claim 1 , the carrier including a first longitudinal half including a first portion of each receptacle and a second longitudinal half including a second portion of each receptacle.

5 . The carrier system of claim 4 , the carrier further including a plurality of mechanical attachment features positioned between sections of the plurality of section and for attaching the first longitudinal half and second longitudinal half together and adjusting a tension between the first longitudinal half and second longitudinal half.

6 . The carrier system of claim 1 , the carrier further including a plurality of mechanical attachment features for adjusting a tension between a first longitudinal half and a second longitudinal half of an associated section of the plurality of sections.

7 . The carrier system of claim 6 , each attachment feature of the plurality of attachment features comprising one of a spring-loaded pin and a spring-loaded screw.

8 . The carrier system of claim 6 , wherein the plurality of attachment features are coupled to the carrier in alternating directions.

9 . The carrier system of claim 1 , the carrier comprising a black color.

10 . The carrier system of claim 1 , the carrier comprising at least one of aluminum, copper, gold, and silver.

11 . The carrier system of claim 1 , wherein each cup of the plurality of cups includes a heat transfer device including a plurality of columns, each column of the plurality of columns having at least one of a hexagon shape, a square shape, a triangle shape, and a diamond shape.

12 . The carrier system of claim 1 , wherein each cup of the plurality of cups includes a substantially planar bottom surface.

13 . A cup for holding precursor material, comprising:

an exterior including a peripheral surface;

a bottom surface extending from the peripheral surface;

a heat transfer device positioned within an interior portion of the cup and including a plurality of columns.

14 . The cup of claim 13 , wherein each column of the plurality of columns has one of a hexagon shape, a square shape, a triangle shape, and a diamond shape.

15 . The cup of claim 13 , wherein each column of the plurality of columns has a diameter of substantially 0.25 inch.

16 . The cup of claim 13 , the bottom surface comprising a substantially planar surface.

17 . A carrier for introducing precursor material into a material processing system, comprising:

a plurality of sections, each section of the plurality of sections including a receptacle configured for receiving a cup including precursor material; and

a plurality of attachment features for adjusting a tension between two longitudinal halves of the carriage.

18 . The carrier of claim 17 , each section of the plurality of sections comprising a cylindrical shape and including a peripheral surface and a curved, bottom surface extending from the peripheral surface.

19 . The carrier of claim 17 , each receptacle having a substantially planar, bottom surface for receiving a cup having a substantially planar, bottom surface.

20 . The carrier of claim 17 , each attachment feature the plurality of attachment features comprising a spring-loaded attachment feature.

21 . A method, comprising:

positioning a plurality of cups including precursor material within a plurality of receptacles of a carrier;

positioning the carrier including the plurality of cups within a vaporization chamber of a deposition system; and

heating precursor material within the cups.

22 . The method of claim 21 , further comprising adjusting a tension between two longitudinal halves of the carrier via one or more attachment features coupled to the carrier.

23 . The method of claim 21 , wherein adjusting comprises one of decreasing the tension prior to positioning a cup of the plurality of cups within the carrier and increasing the tension after positioning a cup of the plurality of cups within the carrier.

24 . The method of claim 21 , wherein positioning a plurality of cups comprises positioning a plurality of cups including a plurality of heat transfer devices, each heat transfer device positioned within a cup and including a Hexcel.

25 . The method of claim 21 , wherein positioning a plurality of cups comprises positioning each cup of the plurality of cups having a substantially planar exterior bottom surface within a receptacle of the carrier having a planar bottom surface.

26 . A material processing system, comprising:

a vaporization chamber including a carrier system for vaporizing precursor material, the carrier system comprising:

a carrier including a plurality of sections, each section of the plurality including a receptacle; and

a plurality of cups for holding precursor material, wherein each cup of the plurality of cups is configured to be positioned within a receptacle of a section of the plurality of sections of the carrier;

a pyrolysis tube coupled to the vaporization chamber and configured to heat vaporized precursor material to produce reactive species; and

a deposition chamber coupled to the pyrolysis tube and configured to deposit the reactive species onto one or more surfaces within the deposition chamber.