Semiconductor device and method of manufacturing the same
View Patent ↗A semiconductor device includes a substrate, a magnetic shield plate, a semiconductor element, a sealing layer, and a magnetic shield film. The magnetic shield plate includes a plate portion disposed along the substrate, inclined portions extending in obliquely upward directions from opposite edges of the plate portion, and arcuate portions disposed at tip ends of the inclined portions. The semiconductor element is mounted on the plate portion. The sealing layer seals the semiconductor element and the plate portion and the inclined portions of the magnetic shield plate. At least a part of each of the arcuate portions is exposed on a surface of the sealing layer. The magnetic shield film covers an upper surface of the sealing layer and is in contact with each of the arcuate portions.
1. A semiconductor device comprising:
a substrate;
a magnetic shield plate that includes a plate portion disposed along the substrate, inclined portions extending in obliquely upward directions from opposite edges of the plate portion, and arcuate portions disposed at tip ends of the inclined portions;
a semiconductor element mounted on the plate portion;
a sealing layer sealing the semiconductor element and the plate portion and the inclined portions of the magnetic shield plate, at least a part of each of the arcuate portions being exposed on a surface of the sealing layer; and
a magnetic shield film covering an upper surface of the sealing layer and in contact with each of the arcuate portions.
2. The device according to claim 1 , wherein a single inclined portion is formed with respect to each of the opposite edges of the plate portion.
3. The device according to claim 1 , wherein a plurality of inclined portions is formed with respect to each of the opposite edges of the plate portion.
4. The device according to claim 3 , wherein the plurality of inclined portions extends in parallel to each other from each of the edges of the plate portion.
5. The device according to claim 3 , wherein
the plurality of inclined portions includes two portions extending in parallel to each other from each of the edges of the plate portions and a connecting portion extending along the edge of the plate portion and connected between the two portions.
6. The device according to claim 1 , wherein the semiconductor element includes a magnetoresistive random access memory element.
7. The device according to claim 1 , wherein the magnetic shield plate and the magnetic shield film include a soft magnetic material.
8. The device according to claim 7 , wherein the soft magnetic material is iron, nickel or cobalt.
9. The device according to claim 1 , wherein side surfaces of the sealing layer is also covered with the magnetic shield film.
10. The device according to claim 1 , wherein a degree between the plate portion and the inclined portion is equal to or greater than 120° and equal to or smaller than 150°.
11. A method for manufacturing a semiconductor device, comprising:
mounting a magnetic shield plate on a substrate, the magnetic shield plate including a plate portion disposed along the substrate, inclined portions extending in obliquely upward directions from opposite edges of the plate portion, and arcuate portions disposed at tip ends of the inclined portions;
mounting a semiconductor element on the plate portion;
sealing the semiconductor element and the plate portion and the inclined portions of the magnetic shield plate with a sealing layer, such that at least a part of each of the arcuate portions being exposed on a surface of the sealing layer; and
covering an upper surface of the sealing layer with a magnetic shield film, such that the magnetic shield film is in contact with each of the arcuate portions.
12. The method according to claim 11 , wherein a single inclined portion is formed with respect to each of the opposite edges of the plate portion.
13. The method according to claim 11 , wherein a plurality of inclined portions is formed with respect to each of the opposite edges of the plate portion.
14. The method according to claim 13 , wherein the plurality of inclined portions extends in parallel to each other from each of the edges of the plate portion.
15. The method according to claim 13 , wherein
the plurality of inclined portions includes two portions extending in parallel to each other from each of the edges of the plate portions and a connecting portion extending along the edge of the plate portion and connected between the two portions.
16. The method according to claim 11 , wherein the semiconductor element includes a magnetoresistive random access memory element.
17. The method according to claim 11 , wherein the magnetic shield plate and the magnetic shield film include a soft magnetic material.
18. The method according to claim 17 , wherein the soft magnetic material is iron, nickel or cobalt.
19. The method according to claim 11 , further comprising:
covering side surfaces of the sealing layer with the magnetic shield film.
20. The method according to claim 11 , wherein a degree between the plate portion and the inclined portion is equal to or greater than 120° and equal to or smaller than 150°.