Magnetic memory device and method of manufacturing magnetic memory device
View Patent ↗According to one embodiment, a method of manufacturing a magnetic memory device includes a stack structure formed of a plurality of layers including a magnetic layer, the method includes forming a lower structure film including at least one layer, etching the lower structure film to form a lower structure of the stack structure, forming an upper structure film including at least one layer on a region including the lower structure, and etching the upper structure film to form an upper structure of the stack structure on the lower structure.
1. A magnetic memory device comprising a stack structure formed of a plurality of layers including a magnetic layer, the device comprising:
a lower structure of the stack structure, the lower structure including at least one layer; and
an upper structure of the stack structure, the upper structure being formed on the lower structure and including at least one layer,
wherein:
the lower structure includes a portion located outside the upper structure when viewed from a direction parallel to a stack direction of the stack structure,
an upper corner portion of the lower structure has a concave shape, and
a center of the upper structure is shifted from a center of the lower structure when viewed from the direction parallel to the stack direction of the stack structure.
2. The device of claim 1 , wherein the stack structure includes a first magnetic layer having variable magnetization, a second magnetic layer having fixed magnetization, and a non-magnetic layer provided between the first magnetic layer and the second magnetic layer.
3. The device of claim 2 , wherein the stack structure further includes a third magnetic layer for cancelling a magnetic field applied from the second magnetic layer to the first magnetic layer.
4. A magnetic memory device comprising a stack structure formed of a plurality of layers, the device comprising:
a lower structure of the stack structure, the lower structure comprising at least one layer, the lower structure including a magnetic layer; and
an upper structure of the stack structure, the upper structure being formed on the lower structure and comprising at least one layer, wherein:
the lower structure includes a portion located outside the upper structure when viewed from a direction parallel to a stack direction of the stack structure,
an upper corner portion of the lower structure has a concave shape, and
a center of the upper structure is shifted from a center of the lower structure when viewed from the direction parallel to the stack direction of the stack structure.
5. The device of claim 4 , wherein the lower structure comprises a plurality of layers, including the magnetic layer.
6. The device of claim 4 , wherein the stack structure includes a first magnetic layer having variable magnetization, a second magnetic layer having fixed magnetization, and a non-magnetic layer provided between the first magnetic layer and the second magnetic layer.
7. The device of claim 6 , wherein the stack structure further includes a third magnetic layer for cancelling a magnetic field applied from the second magnetic layer to the first magnetic layer.
8. A magnetic memory device comprising a stack structure formed of a plurality of layers including a magnetic layer, the device comprising:
a lower structure of the stack structure, the lower structure including at least one layer; and
an upper structure of the stack structure, the upper structure being formed on the lower structure and including at least one layer,
wherein:
the lower structure includes a portion located outside the upper structure when viewed from a direction parallel to a stack direction of the stack structure,
the lower structure includes a first portion which includes an upper corner of the lower structure and a portion adjacent to the upper corner, and a second portion which includes a portion of the lower structure excluding the first portion,
a predetermined ion is contained in the first portion,
a concentration of the predetermined ion in the first portion is higher than that in the second portion, and
a center of the upper structure is shifted from a center of the lower structure when viewed from the direction parallel to the stack direction of the stack structure.
9. The device of claim 8 , wherein a portion of the lower structure in which the ion is implanted is magnetically deactivated.
10. The device of claim 8 , wherein the predetermined ion is selected from an inert gas ion, a silicon (Si) ion, a phosphorus (P) ion, a boron (B) ion, and a nitrogen (N) ion.
11. The device of claim 8 , wherein the stack structure includes a first magnetic layer having variable magnetization, a second magnetic layer having fixed magnetization, and a non-magnetic layer provided between the first magnetic layer and the second magnetic layer.
12. The device of claim 11 , wherein the stack structure further includes a third magnetic layer for cancelling a magnetic field applied from the second magnetic layer to the first magnetic layer.