Wire bonding apparatus
Provided is a wire bonding apparatus for electrically connecting an electrode and an aluminum alloy wire to each other by wire bonding. The apparatus includes a wire feeding device which feeds the wire. The wire has a diameter not less than 500 μm and not greater than 600 μm. The apparatus includes a heating device heats the wire to a temperature that is not lower than 50° C. and not higher than 100° C. The apparatus further includes a pressure device which presses the wire against the electrode. The apparatus further includes an ultrasonic wave generating device which generates an ultrasonic vibration that is applied to the wire that is pressed by the pressure device.
1. A wire bonding apparatus for electrically connecting an electrode and an aluminum alloy wire, which has a diameter not less than 500 μm and not greater than 600 μm, to each other by wire bonding, the apparatus comprising:
a wire feeding device which includes a reel on which the aluminum alloy wire having the diameter not less than 500 μm is wound, and feeds the wire from the reel;
a first wire heater having a through-hole formed therein, the first wire heater having a heater built in an inner wall of the through-hole, a diameter of the through-hole being not less than 500 μm, so as to allow the wire to pass therethrough, the first wire heater heating the wire, as the wire passes through the through-hole of the first wire heater, to a temperature of 50° C. to 100° C., the first wire heater including a temperature sensor measuring the temperature of the wire, provided at an end of the first wire heater and adjacent to where the wire is to bond to the electrode;
a control device controlling an output of the first wire heater to control the temperature of the wire;
a pressure device which presses the heated wire that passes through the first wire heater, against the electrode; and
an ultrasonic wave generating device which generates an ultrasonic vibration and applies the ultrasonic vibration to the heated wire that is pressed by the pressure device.
2. The wire bonding apparatus according to claim 1 , wherein the pressure device includes a horn which transmits the ultrasonic vibration generated by the ultrasonic wave generating device to the wire.
3. The wire bonding apparatus according to claim 2 , wherein the pressure device includes a bonding chip which is removably fixed to an end portion of the horn.
4. The wire bonding apparatus according to claim 1 , further comprising a second wire heater including a flat plate heater which maintains the temperature of the wire at 50° C. to 100° C., while the pressure device presses the heated wire on the flat plate heater.
5. The wire bonding apparatus according to claim 1 , further comprising a second wire heater including a flat plate heater separate from the first wire heater, the flat plate heater maintaining the temperature of the wire at 50° C. to 100° C., while the pressure device presses the heated wire on the flat heater.
6. The wire bonding apparatus according to claim 1 , wherein the pressure device includes a horn which transmits the ultrasonic vibration generated by the ultrasonic wave generating device to the wire.
7. The wire bonding apparatus according to claim 6 , wherein the pressure device includes a bonding chip which is removably fixed to an end portion of the horn.
8. A wire bonding method for electrically connecting an electrode and an aluminum alloy wire to each other by wire bonding with heat treatment, pressure treatment and ultrasonic treatment via a wire bonding apparatus, the wire bonding apparatus including
a wire feeding device which includes a reel on which the aluminum alloy wire is wound, and which feeds the wire from the reel,
a first wire heater having a through-hole formed therein, the first wire heater having a heater built in an inner wall of the through-hole, a diameter of the through-hole being not less than 500 μm, so as to allow the wire to pass therethrough, the first wire heater heating the wire, as the wire passes through the through-hole of the first wire heater, to a temperature of 50° C. to 100° C., the first wire heater including a temperature sensor measuring the temperature of the wire, provided at an end of the first wire heater and adjacent to where the wire is to bond to the electrode,
a control device controlling an output of the first wire heater to control the temperature of the wire,
a pressure device which presses the heated wire that passes through the first wire heater, against the electrode, and
an ultrasonic wave generating device which generates an ultrasonic vibration and
applies the ultrasonic vibration to the heated wire that is pressed by the pressure device, the method comprising:
heating the wire by the first wire heater to a temperature not lower than 50° C. and not higher than 100° C.;
disposing the wire by placing the wire on the electrode and pressing the wire against the electrode by the pressure device; and
applying an ultrasonic vibration to the wire concurrently with the disposing the wire by the ultrasonic wave generating device, while the temperature of the wire is not lower than 50° C. and not higher than 100° C.,
wherein the wire has a diameter not less than 500 μm and not greater than 600 μm.
9. The wire bonding apparatus according to claim 1 , wherein the pressure device includes a pressure application device and a mechanism for adjusting a load with which the pressure application device presses the wire.
10. The wire bonding apparatus according to claim 1 , wherein the control device controls the temperature of the wire to be in a range of 50° C. to 75° C.
11. The wire bonding apparatus according to claim 1 , wherein
the pressure device includes
a horn which transmits ultrasonic vibration generated by the ultrasonic wave generating device, and
a bonding chip which is removably fixed to an end of the horn, and presses the wire on the electrode and transmits the ultrasonic vibration through the horn to the wire at the same time.