Nanostructured LED array with collimating reflectors
View Patent ↗The present invention relates to nanostructured light emitting diodes, LEDs. The nanostructure LED device according to the invention comprises an array of a plurality of individual nanostructured LEDs. Each of the nanostructured LEDs has an active region wherein light is produced. The nanostructured device further comprise a plurality of reflectors, each associated to one individual nanostructured LED (or a group of nanostructured LEDs. The individual reflectors has a concave surface facing the active region of the respective individual nanostructured LED or active regions of group of nanostructured LEDs.
1. A method of fabricating a nanostructured LED device comprising a plurality of individual nanostructured LEDs, comprising the steps of:
(a) defining growth positions on a substrate by lithography;
(b) growing semiconductor nanowires of a first conductivity type from the substrate on the defined growth positions, growing well active regions over the semiconductor nanowires, and growing semiconductor volume elements of a second conductivity type over the well active regions to form the individual nanostructured LEDs on the defined growth positions, each individual nanostructured LED having a p-i-n junction;
(c) depositing an electrically conductive, transparent indium tin oxide layer over the individual nanostructured LEDs; and
(d) depositing a continuous reflector layer having a plurality of concave portions on the electrically conductive, transparent indium tin oxide layer at least over a top of the individual nanostructured LEDs, wherein each of the concave portions of the continuous reflector layer is associated with an individual nanostructured LED of the plurality of individual nanostructured LEDs.
2. The method of fabricating a nanostructured LED according to claim 1 , further comprising a step, to be taken after the step of forming the individual nanostructured LEDs and prior to the step of depositing the continuous reflector layer, of forming upper parts of the nanostructured LEDs to define a shape of an inner surface of the reflectors covering the nanostructured LEDs.
3. The method of fabricating a nanostructured LED according to claim 2 , wherein the step of forming the upper parts of the nanostructured LEDs comprises removing a material from the upper parts of the nanostructured LEDs prior to the step of depositing the continuous reflector layer to provide the nanostructured LEDs with a predetermined shape.
4. The method of claim 1 , wherein the individual nanostructure LEDs have a pyramidal structure.
5. The method of claim 1 , wherein the plurality of individual nanostructured LEDs comprise waveguides adapted to direct at least a portion of emitted light towards the individual reflectors of each individual nanostructured LED.
6. The method of claim 1 , wherein the plurality of individual nanostructured LEDs form an array that forms a photonic crystal arranged to inhibit a wavelength of the light emitted from active regions of the array in a direction close to a plane of the array.
7. The method of claim 1 , wherein the nanostructured LED device is bottom emitting.
8. The method of claim 1 , wherein depositing the electrically conductive, transparent indium tin oxide layer over the individual nanostructured LEDs covers entire surfaces of the LEDs.