Temperature control of components on an optical device
View Patent ↗A method of forming an optical device includes using a photomask to form a first mask on a device precursor. The method also includes using the photomask to form a second mask on the device precursor. The second mask is formed after the first mask. In some instances, the optical device includes a waveguide positioned on a base. The waveguide is configured to guide a light signal through a ridge. A heater is positioned on the ridge such that the ridge is between the heater and the base.
1. A method of forming an optical device, comprising:
using a photomask to form a first mask on a device such that the first mask contacts a material included in the device,
the first mask having edges between a top side and a bottom side,
the bottom side of the mask being between the top side of the mask and the device precursor;
etching the device so as to remove the material from under the first mask such that an opening through the material extends from under one edge of the first mask to under an opposing edge of the first mask with the first mask being located between the opposing edges;
using the photomask to form a second mask on the device after etching the device, the second mask contacting the material and being formed after the first mask; and
removing the second mask from the device.
2. The method of claim 1 , further comprising:
removing the first mask before forming the second mask.
3. The method of claim 1 , wherein the first mask is a photoresist and the second mask is a photoresist.
4. The method of claim 1 , wherein the first mask and the second mask have the same pattern.
5. The method of claim 4 , wherein the first mask and the second mask have the same lateral dimensions.
6. The method of claim 5 , wherein the first mask and the second mask are formed at the same location on the device.
7. The method of claim 1 , further comprising:
removing the first mask after etching the device and before forming the second mask.
8. The method of claim 1 , wherein the first mask and the second mask are formed at the same location on the device, and further comprising:
performing a second etch of the device after forming the second mask on the device and before removing the second mask from the device.
9. The method of claim 1 , wherein removing the second mask from the device precursor exposes the material contacted by the second mask.
10. A method of forming an optical device, comprising:
generating a device having a layer of a material on a device precursor;
forming a first mask on the layer of material such that the layer of material is between the device precursor and the first mask,
the first mask having edges between a top side and a bottom side, the bottom side of the first mask being between the top side of the first mask and the device; and
etching the device such that the layer of material is removed from under the first mask such that an opening through the material extends from under one edge of the first mask to under an opposing edge of the first mask,
the first mask being located between the opposing edges,
the opening separating a first portion of the material from a second portion of the material,
the first portion of the material being between the first mask and the device precursor, and
the second portion of the material being between the first mask and the device precursor, and
a continuous portion of the first mask extending from a first location over the first portion of the material to a second location over the second portion of the material.
11. The method of claim 10 , wherein the first mask has a dimension that extends between the opposing edges of the first mask and the material is removed from under the full length of the dimension.
12. The method of claim 10 , wherein the dimension is a linear dimension.
13. The method of claim 12 , wherein the dimension is a width of the first mask.
14. The method of claim 10 , wherein the device precursor includes a second layer of material on a base and the layer of material is formed on the device precursor such that the second layer of material is between the base and the layer of material, and further comprising:
defining a heater in the second layer of material.
15. The method of claim 10 , wherein the opening is between the first portion of the material and the second portion of the material.
16. The method of claim 10 , wherein the first portion of the material is a first island of the material on the device precursor and the second portion of the material is a second island on the device precursor and the entire second island is separated from the first island.
17. The method of claim 10 , wherein the opening is between the continuous portion of the first mask and the device precursor.