Solar cell emitter region fabrication with differentiated P-type and N-type architectures and incorporating a multi-purpose passivation and contact layer
Methods of fabricating solar cell emitter regions with differentiated P-type and N-type architectures and incorporating a multi-purpose passivation and contact layer, and resulting solar cells, are described. In an example, a solar cell includes a substrate having a light-receiving surface and a back surface. A P-type emitter region is disposed on the back surface of the substrate. An N-type emitter region is disposed in a trench formed in the back surface of the substrate. An N-type passivation layer is disposed on the N-type emitter region. A first conductive contact structure is electrically connected to the P-type emitter region. A second conductive contact structure is electrically connected to the N-type emitter region and is in direct contact with the N-type passivation layer.
1. A solar cell, comprising:
a substrate having a light-receiving surface and a back surface;
a P-type emitter region disposed on the back surface of the substrate;
an N-type emitter region disposed in a trench formed in the back surface of the substrate;
an N-type passivation layer disposed on the N-type emitter region;
a first conductive contact structure electrically connected to the P-type emitter region; and
a second conductive contact structure electrically connected to the N-type emitter region and in direct contact with the N-type passivation layer.
2. The solar cell of claim 1 , wherein the N-type passivation layer is an N-type amorphous silicon layer.
3. The solar cell of claim 2 , wherein a total composition of the N-type amorphous silicon layer has a total hydrogen concentration approximately in the range of 5-20% of total film composition.
4. The solar cell of claim 2 , wherein a total composition of the N-type amorphous silicon layer has a total phosphorous dopant concentration approximately in the range of 1E19-5E20 atoms/cm 3 .
5. The solar cell of claim 1 , wherein the N-type passivation layer has a thickness approximately in the range of 5-50 nanometers.
6. A back contact solar cell, comprising:
a substrate having a light-receiving surface and a back surface;
a P-type polycrystalline silicon emitter region disposed on a first thin dielectric layer disposed on the back surface of the substrate;
an N-type polycrystalline silicon emitter region disposed on a second thin dielectric layer disposed in a trench formed in the back surface of the substrate;
a third thin dielectric layer disposed laterally directly between the N-type and P-type polycrystalline silicon emitter regions;
an N-type silicon layer disposed on the N-type polycrystalline silicon emitter region;
a first conductive contact structure electrically connected to the P-type polycrystalline silicon emitter region; and
a second conductive contact structure electrically connected to the N-type polycrystalline silicon emitter region and in direct contact with the N-type silicon layer.
7. The back contact solar cell of claim 6 , wherein the N-type silicon layer is further disposed over, but not in contact with, the P-type polycrystalline silicon emitter region.
8. The back contact solar cell of claim 6 , wherein the N-type silicon layer is an N-type amorphous silicon layer.
9. The back contact solar cell of claim 8 , wherein a total composition of the N-type amorphous silicon layer has a total hydrogen concentration approximately in the range of 5-20% of total film composition.
10. The back contact solar cell of claim 8 , wherein a total composition of the N-type amorphous silicon layer has a total phosphorous dopant concentration approximately in the range of 1E19-5E20 atoms/cm 3 .
11. The back contact solar cell of claim 6 , wherein the N-type silicon layer has a thickness approximately in the range of 5-50 nanometers.
12. The back contact solar cell of claim 11 , wherein the N-type polycrystalline silicon emitter region has a thickness of approximately 30 nanometers, and the N-type silicon layer has a thickness of approximately 20 nanometers.
13. The back contact solar cell of claim 6 , further comprising:
an insulator layer disposed on the P-type polycrystalline silicon emitter region, wherein the first conductive contact structure is disposed through the insulator layer, and wherein a portion of the N-type polycrystalline silicon emitter region and a portion of the N-type silicon layer overlap the insulator layer.
14. The back contact solar cell of claim 6 , wherein the trench has a texturized surface.
15. The back contact solar cell of claim 6 , further comprising:
a fourth thin dielectric layer disposed on the light-receiving surface of the substrate;
a polycrystalline silicon layer disposed on the fourth thin dielectric layer; and
an anti-reflective coating (ARC) layer disposed on the polycrystalline silicon layer.
16. The back contact solar cell of claim 6 , wherein the substrate is an N-type monocrystalline silicon substrate, and wherein all of the first, second and third thin dielectric layers comprise silicon dioxide.
17. A method of fabricating alternating N-type and P-type emitter regions of a solar cell, the method comprising:
forming a P-type silicon layer on a first thin dielectric layer formed on a back surface of a substrate;
forming an insulating layer on the P-type silicon layer;
patterning the insulating layer and the P-type silicon layer to form P-type silicon regions having an insulating cap thereon;
forming a second thin dielectric layer on exposed sides of the P-type silicon regions;
forming an N-type silicon layer on a third thin dielectric layer formed on the back surface of the substrate, and on the second thin dielectric layer and the insulating cap of the P-type silicon regions;
forming an N-type amorphous silicon layer on the N-type silicon layer;
patterning the N-type amorphous silicon layer and the N-type silicon layer to form isolated N-type emitter regions and to form contact openings in regions of the N-type amorphous silicon layer and the N-type silicon layer above the insulating cap of the P-type silicon regions;
patterning the insulating cap through the contact openings to expose portions of the P-type silicon regions;
forming conductive contacts to the P-type silicon regions and to the N-type emitter regions, the conductive contacts to the P-type silicon regions formed in the contact openings, and the conductive contacts to the N-type emitter regions formed in direct contact with the N-type amorphous silicon layer of the N-type emitter regions.
18. The method of claim 17 , wherein forming the N-type amorphous silicon layer comprises depositing N-type amorphous silicon by plasma-enhanced chemical vapor deposition (PECVD) at a temperature below approximately 400 degrees Celsius.
19. The method of claim 18 , wherein forming the N-type amorphous silicon layer comprises forming an N-type amorphous silicon layer having a total hydrogen concentration approximately in the range of 5-20% of total film composition, and having a total phosphorous dopant concentration approximately in the range of 1E19-5E20 atoms/cm3, and to a thickness approximately in the range of 5-50 nanometers.
20. A solar cell fabricated according to the method of claim 17 .