IP Library Granted Patent US 9,263,071
Granted Patent B1
US 9,263,071 · App. 14/674,509 · Granted Feb 16, 2016

Flat NFT for heat assisted magnetic recording

Inventors: Jiangrong Cao (Fremont, CA); Michael V. Morelli (San Jose, CA); Brad V. Johnson (Santa Clara, CA); Peng Zhang (Pleasanton, CA)
Assignee: Western Digital (Fremont), LLC
G11B5/4866G11B5/127G11B2005/0021
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Quick Facts
Patent No.
US 9,263,071
App. No.
14/674,509
Granted
Feb 16, 2016
Kind
B1
Abstract

The present disclosure generally relates to an EAMR head having a plasmonic bulk metal plate adjacent thereto. The waveguide core has a trapezoidal shaped cross-section, when viewed from the ABS, and the plasmonic bulk metal plate is disposed adjacent the short side of the trapezoid. The plasmonic bulk metal plate reduces the temperature of the NFT.

Claims (36)

1. A magnetic recording head, comprising:

a head body;

an energy source coupled to the head body;

a waveguide core disposed within the head body, wherein the waveguide core has a trapezoidal cross section when viewed from the air bearing surface, wherein the trapezoid has a first side having a first width and a second side having a second width that is less than the first width;

cladding material disposed at least partially around the waveguide core; and

a plasmonic metal element disposed adjacent the cladding material and the second side of the waveguide core.

2. The magnetic recording head of claim 1 , wherein the waveguide core comprises Ge, Si, amorphous Si, GaAs, GZO (Gallium Zinc Oxide), GaP, ITO, TiO 2 , TeO 2 , GaN, ZrO 2 , AlN, Ta 2 O 5 , Al 2 O 3 and AlSb.

3. The magnetic recording head of claim 1 , wherein the plasmonic metal element comprises Au, Ag, Cu or alloys thereof.

4. The magnetic recording head of claim 1 , wherein the first side has a width of between about 90 nm and about 1 micron.

5. The magnetic recording head of claim 1 , wherein the second side has a width of greater than 0 nm and up to about 200 nm.

6. The magnetic recording head of claim 1 , wherein the plasmonic metal element has a width that is greater than the width of the second side.

7. The magnetic recording head of claim 1 , wherein the cladding material comprises AlAs, Al 2 O 3 , borosilicate glass, fluoride glass and SiO 2 .

8. A hard disk drive, comprising:

a magnetic media; and

a magnetic recording head disposed opposite the magnetic media, wherein the magnetic recording head comprises:

a head body;

an energy source coupled to the head body;

a waveguide core disposed within the head body, wherein the waveguide core has a trapezoidal cross section when viewed from the air bearing surface, wherein the trapezoid has a first side having a first width and a second side having a second width that is less than the first width;

cladding material disposed at least partially around the waveguide core; and

a plasmonic metal element disposed adjacent the cladding material and the second side of the waveguide core.

9. The hard disk drive of claim 8 , wherein the waveguide core comprises Ge, Si, amorphous Si, GaAs, GZO (Gallium Zinc Oxide), GaP, ITO, TiO 2 , TeO 2 , GaN, ZrO 2 , AlN, Ta 2 O 5 , Al 2 O 3 and AlSb.

10. The hard disk drive of claim 8 , wherein the plasmonic metal element comprises Au, Ag, Cu or alloys thereof.

11. The hard disk drive of claim 8 , wherein the first side has a width of between about 90 nm and about 1 micron.

12. The hard disk drive of claim 8 , wherein the second side has a width of greater than 0 nm and up to about 200 nm.

13. The hard disk drive of claim 8 , wherein the plasmonic metal element has a width that is greater than the width of the second side.

14. The hard disk drive of claim 8 , wherein the cladding material comprises AlAs, Al 2 O 3 , borosilicate glass, fluoride glass and SiO 2 .

15. A method of making a magnetic recording head, comprising:

depositing cladding material on a substrate;

depositing waveguide core material on the cladding material;

etching the waveguide core material to form a waveguide core, wherein the waveguide core has a trapezoidal cross section when viewed from an air bearing surface, wherein the trapezoid has a first side having a first width and a second side having a second width that is less than the first width; and

depositing a plasmonic metal element adjacent the cladding material and the second side of the waveguide core.

16. The method of claim 15 , wherein the waveguide core comprises Ge, Si, amorphous Si, GaAs, GZO (Gallium Zinc Oxide), GaP, ITO, TiO 2 , TeO 2 , GaN, ZrO 2 , AlN, Ta 2 O 5 , Al 2 O 3 and AlSb.

17. The method of claim 15 , wherein the plasmonic metal element comprises Au, Ag, Cu or alloys thereof.

18. The method of claim 15 , wherein the first side has a width of between about 90 nm and about 1 micron.

19. The method of claim 15 , wherein the second side has a width of greater than 0 nm and up to about 520 nm.

20. The method of claim 15 , wherein the plasmonic metal element has a width that is greater than the width of the second side.

Assignments (9)
PATENT COLLATERAL AGREEMENT - DDTL LOAN AGREEMENT Recorded Aug 21, 2023
From: WESTERN DIGITAL TECHNOLOGIES, INC.
To: JPMORGAN CHASE BANK, N.A.
Reel/Frame 067045/0156 →
PATENT COLLATERAL AGREEMENT - A&R LOAN AGREEMENT Recorded Aug 21, 2023
From: WESTERN DIGITAL TECHNOLOGIES, INC.
To: JPMORGAN CHASE BANK, N.A.
Reel/Frame 064715/0001 →
RELEASE OF SECURITY INTEREST AT REEL 038710 FRAME 0845 Recorded Feb 8, 2022
From: JPMORGAN CHASE BANK, N.A.
To: WESTERN DIGITAL (FREMONT), LLC; WESTERN DIGITAL TECHNOLOGIES, INC.
Reel/Frame 058965/0445 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 19, 2019
From: WESTERN DIGITAL (FREMONT), LLC
To: WESTERN DIGITAL TECHNOLOGIES, INC.
Reel/Frame 050450/0582 →
RELEASE OF SECURITY INTEREST Recorded Mar 5, 2018
From: U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT
To: WESTERN DIGITAL (FREMONT), LLC
Reel/Frame 045501/0158 →
SECURITY AGREEMENT Recorded May 16, 2016
From: WESTERN DIGITAL (FREMONT), LLC
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 038744/0755 →
SECURITY AGREEMENT Recorded May 16, 2016
From: WESTERN DIGITAL (FREMONT), LLC
To: U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT
Reel/Frame 038744/0675 →
SECURITY AGREEMENT Recorded May 16, 2016
From: WESTERN DIGITAL (FREMONT), LLC
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 038710/0845 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 24, 2015
From: CAO, JIANGRONG; MORELLI, MICHAEL V.; JOHNSON, BRAD V.; ZHANG, PENG
To: WESTERN DIGITAL (FREMONT), LLC
Reel/Frame 037134/0504 →