Granted Patent B1

US 9,147,404 · App. 14/675,326 · Granted Sep 29, 2015

Abstract

Claims (40)

1. A method for providing a magnetic read apparatus having an air-bearing surface (ABS) and comprising:

providing a read sensor stack for a read sensor of the read device;

defining a read sensor from the read sensor stack in a stripe height direction, the stripe height direction being perpendicular to the ABS;

providing at least one magnetic bias structure;

depositing an insulating layer on the read sensor, the insulating layer having a full film removal rate of not more than fifty Angstroms per minute, the insulating layer having a top surface;

planarizing the insulating layer, at least a portion of the top surface of the insulating layer being exposed at the start of the planarizing; and

defining at least the read sensor in a track width direction.

2. The method of claim 1 wherein the at least one magnetic bias structure includes a rear magnetic bias structure and wherein the step of defining at least the read sensor in the track width direction further includes:

defining the read sensor and the rear magnetic bias structure in the track width direction, a portion of the rear magnetic bias structure being between the insulating layer and the read sensor, the read sensor being between the rear magnetic bias structure and the ABS.

3. The method of claim 2 wherein the step of providing the at least one magnetic bias structure further includes:

providing a side bias structure after the step of defining the at least the read sensor in the track width direction.

4. The method of claim 3 wherein the read sensor includes a dual free layer read sensor.

5. The method of claim 2 wherein the rear magnetic bias structure includes a soft magnetic bias structure.

6. The method of claim 2 wherein the rear magnetic bias structure includes a hard magnetic bias structure.

7. The method of claim 2 wherein the step of providing the at least one magnetic bias structure further includes:

providing an insulator between the read sensor and the rear magnetic bias structure.

8. The method of claim 1 wherein the step of planarizing the insulating layer further includes:

performing a chemical mechanical planarization (CMP) step on the insulating layer, the top surface of the insulating layer being exposed at the start of the CMP.

9. The method of claim 1 wherein the insulating layer consists of at least one of silicon nitride, silicon dioxide and tantalum pentoxide.

10. The method of claim 1 wherein the full film removal rate of the insulating layer is at least three Angstroms per minute and not more than twenty Angstroms per minute.

11. A method for providing a read device having an air-bearing surface (ABS) and comprising:

providing a read sensor stack for a read sensor of the read device;

defining a read sensor from the read sensor stack in a stripe height direction, the stripe height direction being perpendicular to the ABS;

depositing an insulator on at least the read sensor after the step of defining the read sensor in the stripe height direction;

providing a rear magnetic bias structure, the read sensor being between the rear magnetic bias structure and the ABS, a portion of the insulator being between the rear magnetic bias structure and the read sensor;

depositing an insulating layer on the rear magnetic bias structure, the insulating layer having a full film removal rate of at least three Angstroms per minute and not more than twenty Angstroms per minute, the insulating layer consisting of at least one of silicon dioxide, silicon nitride and tantalum pentoxide, the insulating layer having a top surface;

performing a chemical mechanical planarization (CMP) step on the insulating layer, the top surface of the insulating layer being exposed at the start of the CMP step;

defining the read sensor and the rear magnetic bias structure in a track width direction after the CMP step;

providing an additional insulating layer after the step of defining the read sensor and the rear magnetic bias structure; and

providing a side bias structure after the step of defining the at least the read sensor in the track width direction, a portion of the additional insulating layer being between the side bias structure and the read sensor.

12. The method of claim 11 wherein the read sensor is a dual free layer read sensor.

13. The method of claim 11 wherein the rear magnetic bias structure includes a soft magnetic bias structure.

14. The method of claim 11 wherein the rear magnetic bias structure includes a hard magnetic bias structure.

15. A magnetic read apparatus having an air-bearing surface (ABS) comprising:

a read sensor including a first free layer, a spacer layer, and a second free layer, the spacer layer being nonmagnetic and residing between the first free layer and the second free layer, the read sensor having at least one side surface and a rear surface opposite to the ABS;

a side bias structure adjacent to the at least one side surface, the side bias structure being configured to magnetically bias the first free layer and the second free layer to be antiferromagnetically aligned;

a rear magnetic bias structure configured to bias the first free layer and the second free layer in a scissor mode, the read sensor being between the ABS and the rear magnetic bias structure; and

an insulating layer, at least a portion of the insulating layer being on the rear magnetic bias structure, the insulating layer having a full film removal rate of not more than fifty Angstroms per minute.

16. The magnetic read apparatus of claim 15 wherein the insulating layer consists of at least one of silicon nitride, silicon dioxide and tantalum pentoxide.

17. The magnetic read apparatus of claim 15 wherein the full film removal rate of the insulating layer is as low as three Angstroms per minute and not more than twenty Angstroms per minute.

Assignments (8)