Semiconductor device and method of manufacturing semiconductor device
View Patent ↗A semiconductor device includes a first insulating film formed above a semiconductor substrate, a fuse formed above the first insulating film, a second insulating film formed above the first insulating film and the fuse and including an opening reaching the fuse, and a third insulating film formed above the second insulating film and in the opening.
1. A method of manufacturing a semiconductor device comprising:
forming a first insulating film above a semiconductor substrate;
forming a fuse above the first insulating film;
forming a fourth insulating film on the first insulating film and the fuse, whole of the side surface of the fuse being covered by a part of the fourth insulating film;
forming a second insulating film above the fuse and the first insulating film;
forming an opening through the second insulating film and above the fuse, the opening exposing the part of the fourth insulating film; and
forming a third insulating film above the second insulating film and in the opening, whole of the part of the fourth insulating film being covered by the third insulating film.
2. The method of manufacturing a semiconductor device according to claim 1 , wherein
a melting point of the third insulating film is lower than a melting point of the second insulating film.
3. The method of manufacturing a semiconductor device according to claim 1 , wherein
a stress the second insulating film applies to the semiconductor substrate is larger than a stress the first insulating film and the third insulating film apply to the semiconductor substrate.
4. The method of manufacturing a semiconductor device according to claim 1 , wherein
the second insulating film is an etching stopper film, and
the third insulating film is an inter-layer insulating film.
5. The method of manufacturing a semiconductor device according to claim 1 , wherein
the second insulating film is formed of an insulating material mainly formed of silicon nitride, and
the third insulating film is formed of an insulating material mainly formed of silicon oxide.
6. A method of manufacturing a semiconductor device comprising:
forming a first insulating film above a semiconductor substrate;
forming a fuse above the first insulating film;
forming a fifth insulating film on the first insulating film and the fuse, whole of the side surface of the fuse being covered by a part of the fifth insulating film;
forming a second insulating film in contact with the first insulating film above the semiconductor substrate and above the fuse;
forming a third insulating film above the second insulating film;
forming an opening through the second insulating film and the third insulating film and above the fuse, the opening exposing the part of the fifth insulating film; and
forming in the opening a fourth insulating film formed of an insulating material whose melting point is lower than a melting point of the third insulating film.
7. The method of manufacturing a semiconductor device according to claim 6 , wherein
the fourth insulating film is formed of silicon oxide containing impurity, or SOG.
8. The method of manufacturing a semiconductor device according to claim 6 , wherein
in forming the opening, the second insulating film and the third insulating film is etched, and thereafter the first insulating film is isotropically etched to form the opening, the opening further exposing an underside of the fuse.
9. The method of manufacturing a semiconductor device according to claim 8 , wherein
in forming the fourth insulating film, the fourth insulating film is not formed below the underside of the fuse to form a gap below the underside of the fuse.
10. The method of manufacturing a semiconductor device according to claim 6 , wherein
a stress the second insulating film applies to the semiconductor substrate is larger than a stress the first insulating film and the third insulating film apply to the semiconductor substrate.
11. The method of manufacturing a semiconductor device according to claim 6 , wherein
the second insulating film is an etching stopper film, and
the third insulating film is an inter-layer insulating film.
12. The method of manufacturing a semiconductor device according to claim 6 , wherein
the second insulating film is formed of an insulating material mainly formed of silicon nitride, and
the third insulating film is formed of an insulating material mainly formed of silicon oxide.