Multilayer X-ray source target with high thermal conductivity
View Patent ↗In various embodiments, a multi-layer X-ray source target is provided having two or more layers of target material at different depths and different thicknesses. In one such embodiment the X-ray generating layers increase in thickness in relationship to their depth relative to the electron beam facing surface of the source target, such that X-ray generating layer further from this surface are thick than X-ray generating layers closer to the electron beam facing surface.
1. An X-ray source, comprising:
an emitter configured to emit an electron beam; and
a target having an emitter-facing surface and configured to generate X-rays when impacted by the electron beam, the target comprising:
two or more X-ray generating layers at different depths relative to the emitter-facing surface, each X-ray generating layer having a different thickness; and
at least one intervening thermally-conductive layer between each pair of X-ray generating layers;
wherein the X-ray generating layers further from the emitter-facing surface are thicker than X-ray generating layers nearer the emitter-facing surface.
2. The X-ray source of claim 1 , wherein the two or more X-ray generating layers comprise one or more regions of an X-ray generating material that produces X-rays when impacted by the electron beam.
3. The X-ray source of claim 1 , wherein two or more of the X-ray generating layers comprise different X-ray generating materials.
4. The X-ray source of claim 1 , comprising at least two intervening thermally-conductive layers differing in one or both of composition or thickness.
5. The X-ray source of claim 1 , wherein the emitter-facing surface comprises a thermally-conductive material.
6. The X-ray source of claim 1 , further comprising a thermally-conductive substrate opposite the emitter-facing surface.
7. The X-ray source of claim 1 , wherein one or more X-ray generating layers comprise a tungsten region and the at least one thermally-conductive layer comprises diamond.
8. The X-ray source of claim 1 , wherein one or more X-ray generating layers comprise an X-ray generating material region having a cross-sectional extent less than the cross-sectional extent of the respective X-ray generating layer.
9. A method for fabricating an X-ray source target, comprising:
forming a first X-ray generating layer, wherein the first X-ray generating layer has a first thickness;
on the first X-ray generating layer, forming one or more sets of:
an intervening thermally-conductive layer; and
an additional X-ray generating layer, wherein each X-ray generating layer has a different thickness than other X-ray generating layers; wherein each additional X-ray generating layer formed over the first X-ray generating layer is less thick than those X-ray generating layers formed prior.
10. The method of claim 9 , wherein the first X-ray generating layer is formed on a thermally-conductive substrate.
11. The method of claim 9 , wherein forming the first X-ray generating layer comprises forming the first X-ray generating layer on a thermally-conductive substrate.
12. The method of claim 9 , wherein the step of forming one or more sets of an intervening layer and an additional X-ray generating layer comprises forming more than one set of said layers, and wherein the thermally conductive layer of one set has a different thickness than the thermally conductive layer of another set.
13. The method of claim 12 , wherein forming one or both of the first X-ray generating layer or the additional X-ray generating layers comprises forming a continuous X-ray generating material region across the full cross-sectional extent of the respective X-ray generating layer.
14. The method of claim 12 , wherein forming one or both of the first X-ray generating layer or the additional X-ray generating layers comprises forming an X-ray generating material region across less than the full cross-sectional extent of the respective X-ray generating layer and forming one or more thermally-conductive regions across the remainder of the respective X-ray generating layer.