Nitride nanowires and method of producing such
View Patent ↗The present invention relates to the growing of nitride semiconductors, applicable for a multitude of semiconductor devices such as diodes, LEDs and transistors. According to the method of the invention nitride semiconductor nanowires are grown utilizing a CVD based selective area growth technique. A nitrogen source and a metal-organic source are present during the nanowire growth step and at least the nitrogen source flow rate is continuous during the nanowire growth step. The V/III-ratio utilized in the inventive method is significantly lower than the V/III-ratios commonly associated with the growth of nitride based semiconductor.
1. A method of forming a light emitting diode (LED), comprising:
growing III-nitride based semiconductor nanowires by chemical vapor deposition (CVD) in a nanowire growth step, wherein a nitrogen source flow and a metal-organic source flow are present; and
forming at least one III-nitride pyramidal shell layer on the III-nitride based semiconductor nanowires by CVD in a shell growth step, wherein an entirety of outer sidewalls of the at least one III-nitride pyramidal shell layer is delimited by six (1101) planes, wherein the nitrogen source flow and the metal-organic source flow are present, wherein:
a molar V/III-ratio comprises a ratio of the nitrogen source flow rate and the metal-organic source flow rate;
the molar V/III-ratio during the shell growth step is higher than the molar VIII-ratio during the nanowire growth step; and
the at least one III-nitride pyramidal shell layer is located in an active region of the LED.
2. The method of claim 1 , further comprising forming a III-nitride pyramidal layer over the at least one III-nitride pyramidal shell layer.
3. The method of claim 1 , wherein the III-nitride based semiconductor nanowires are grown from a substrate through openings in a growth mask layer located over the substrate.
4. The method of claim 1 , wherein the nitrogen source flow and the metal-organic source flow are continuous during the nanowire growth step.
5. The method of claim 1 , wherein growing III-nitride based semiconductor nanowires by CVD in a nanowire growth step comprises growing GaN nanowires at a temperature of 900 to 1200° C.