Gap fill treatment for via process
A gap fill treatment for via process is provided. A substrate with a plurality of openings has formed therein is provided. The substrate includes a dense pattern region and an isolated pattern region. A positive resist layer is formed to fill in the openings on the substrate, wherein the thickness of the positive resist layer on the surface of the isolated pattern region is greater than that on the surface of the dense pattern region. The positive resist layer on the surface of the substrate is exposed only. The exposed positive resist layer is developed to form a gap-filling material layer, wherein the gap-filling material layer has the same thickness in the dense pattern region and in the isolated pattern region. A reagent is coated on the surface to form a reaction layer. The reaction layer is removed so that a cap layer remained on the gap-filling material layer.
1. A gap fill treatment for via process, comprising:
providing a substrate to which a plurality of openings has been formed, wherein the substrate comprises an dense pattern region and an isolated pattern region, and a pattern density of the openings in the dense pattern region is higher than a pattern density of the openings in the isolated pattern region;
forming a positive resist layer on the substrate with which the openings are filled in, wherein a thickness of the positive resist layer on the surface of the isolated pattern region is greater than a thickness of the positive resist layer on the surface of the dense pattern region;
exposing only the positive resist layer on the surface of the substrate;
developing the exposed positive resist layer, and forming a gap-filling material layer inside the plurality of openings, wherein a thickness of the gap-filling material layer is the same on both the dense pattern region and the isolated pattern region;
applying a reagent on the surface of the gap-filling material layer and the substrate so as to form a reaction layer, wherein a cap layer is formed between the gap-filling material layer and the reaction layer; and
removing the reaction layer by using a solvent so that the cap layer remains on the gap-filling material layer.
2. The gap fill treatment for via process of claim 1 , wherein the plurality of openings is formed by photolithography and etching.
3. The gap fill treatment for via process of claim 1 , wherein the plurality of openings comprises via openings, contact windows, trenches and dual damascenes or any combination thereof.
4. The gap fill treatment for via process of claim 1 , wherein the step of forming the positive resist layer includes performing a spin coating.
5. The gap fill treatment for via process of claim 1 , wherein a positive resist which is used for the positive resist layer comprises phenol formaldehyde derivative, methacrylate, acrylate, polyhydroxystyrene or any combination thereof.
6. The gap fill treatment for via process of claim 1 , wherein a wavelength of light used for the exposure is 248 nm.
7. The gap fill treatment for via process of claim 1 , wherein the developing is performed by using a developer.
8. The gap fill treatment for via process of claim 7 , wherein the developer comprises tetramethylammonium hydroxide.
9. The gap fill treatment for via process of claim 1 , wherein the reagent comprises a water-soluble resin and a crosslinking agent.
10. The gap fill treatment for via process of claim 1 , wherein the solvent is deionized water.
11. The gap fill treatment for via process of claim 1 , further comprising forming a bottom anti-reflective layer or a photoresist layer on the substrate and the cap layer, after the step of removing the reaction layer.
12. The gap fill treatment for via process of claim 11 , wherein a material of the bottom anti-reflective layer comprises an inorganic material selected form a group consisting of titanium, titanium dioxide, titanium nitride, chromium oxide, carbon and α-silicon, or an organic material comprising a photoabsorber and a polymer or any combination thereof.
13. The gap fill treatment for via process of claim 11 , further comprising forming a planar layer on the bottom anti-reflective layer or the photoresist layer.