Substrate collecting device
The present invention provides a substrate collecting device that includes a first stage on which a sheet is placed with a plurality of substrates facing downward, an sampler which carries out a predetermined operation on some of the substrates, which are disposed at predetermined positions, from above the first stage thereby to cause the substrates to come off from the sheet and fall, an optical system and a collector disposed below the first stage, and a second stage, which integrally moves the optical system and the collector in a horizontal direction. The second stage is capable of positioning the optical system and the collector at two positions at which the optical system or the collector is disposed substantially vertically below a predetermined position.
1. A substrate collecting device, comprising:
a first stage configured to move in a horizontal direction, the stage capable of holding a sheet, the sheet comprising a first surface and a plurality of substrates on a second surface;
an optical system that observes one or more of the plurality of substrates on the stage;
a container that collects one or more of the plurality of substrates that is removed from the sheet;
a second stage, wherein the second stage is configured to move the optical system and the container in the horizontal direction, wherein the second stage is configured to have a first position and a second position, the first position is such that the optical system is substantially vertically away from the second surface of the sheet and the second position is such that the container is substantially vertically away from the second surface of the sheet; and
a sampler that is configured to cause at least one of the plurality of the substrates to be removed from the sheet, wherein the sampler comprises a pushing end that is configured to push the first surface of the sheet opposite at least one of the plurality of the substrates, and wherein the sampler is configured to move in a substantially vertical direction, wherein the second stage is disposed a vertical distance from the sampler that is larger than a vertical distance between the first stage and the sampler, wherein the first stage is vertically between the second stage and the sampler, and wherein the second stage is configured to hold the optical system and the container.
2. The substrate collecting device according to claim 1 ,
wherein the optical system comprises:
a reflector that reflects, at the first position, an image of at least one of the plurality of substrates on the first stage; and
a imaging sensor that acquires the image reflected by the reflector.
3. The substrate collecting device according to claim 1 ,
wherein each of the plurality of the substrates are attached to the sheet, and each of the plurality of the substrates are configured to be detached from the second surface of the sheet by being pushed from the first surface of the sheet.
4. The substrate collecting device according to claim 1 ,
wherein each of the plurality of substrates are attached to the sheet by an adhesive agent, wherein the adhesive force of the adhesive agent is decreased by irradiation of ultraviolet rays, and
wherein the sampler has an emitter that irradiates the ultraviolet rays to the adhesive agent of at least one of the plurality of the substrates.
5. The substrate collecting device according to claim 1 , wherein each of the plurality of substrates is rectangular.
6. The substrate collecting device according to claim 1 , wherein the container is formed in the second stage.
7. The substrate collecting device according to claim 6 , wherein the container is a groove.
8. The substrate collecting device according to claim 1 , wherein the container is formed of an adhesive on the second stage.
9. The substrate collecting device according to claim 1 , wherein the second stage is configured to have three or more positions.
10. The substrate collecting device according to claim 1 , wherein the second stage is configured to rotate to move the optical system and the container in the horizontal direction.