Making micro-channel electrode structure
View Patent ↗A method of making a micro-channel electrode structure includes providing a curable layer and imprinting the curable layer to form an electrode micro-channel and a fluid micro-channel in a common step. The electrode micro-channel intersects the fluid micro-channel to form a micro-channel intersection. The curable layer is cured to form an imprinted cured layer. Both the electrode and the fluid micro-channels are filled with a developable material that is exposed with an electrode pattern including the electrode micro-channel and extending from the electrode micro-channel into the micro-channel intersection without occluding the fluid micro-channel. The exposed developable material is developed to remove the developable material from the electrode pattern and the electrode micro-channel and the micro-channel intersection corresponding to the electrode pattern are at least partly filled with a conductive material. At least a portion of the remaining developable material is removed from the fluid micro-channel.
1. A method of making a micro-channel electrode structure, comprising:
a) providing a curable layer;
b) imprinting the curable layer to form an electrode micro-channel and a fluid micro-channel in a common step, the electrode micro-channel intersecting the fluid micro-channel to form a micro-channel intersection, and curing the curable layer to form an imprinted cured layer;
c) at least partially filling both the electrode micro-channel and the fluid micro-channel with a developable material;
d) exposing the developable material with an electrode pattern, the electrode pattern including the electrode micro-channel and extending from the electrode micro-channel into the micro-channel intersection without occluding the fluid micro-channel;
e) developing the exposed developable material to remove the developable material from the electrode pattern;
f) at least partially filling the electrode micro-channel and the micro-channel intersection corresponding to the electrode pattern with a conductive material; and
g) removing at least a portion of the remaining developable material from the fluid micro-channel.
2. The method of claim 1 further including providing the curable layer on a support.
3. The method of claim 1 further including laminating a cover layer over the layer.
4. The method of claim 1 further including providing a cover layer over the layer and providing another curable layer on the cover layer and repeating the steps b) through g) for the other curable layer.
5. The method of claim 1 further including imprinting the curable layer to form multiple electrode micro-channels and fluid micro-channels, each electrode micro-channel intersecting a separate one of the multiple fluid micro-channels to form multiple micro-channel intersections.
6. The method of claim 5 the steps c) through g) are done in a common step for each electrode and fluid micro-channel.
7. The method of claim 5 further including cutting the curable layer into at least first and second portions and laminating the second portion to the first portion to form a stack.
8. The method of claim 1 further including at least partially filling the electrode micro-channel and the micro-channel intersection corresponding to the electrode pattern with a precursor material and then converting the precursor material to the conductive material.
9. The method of claim 1 further including locating a protective material over the conductive material in the electrode micro-channel before removing the developable material from the fluid micro-channel.
10. The method of claim 9 wherein locating the protective material over the conductive material in the electrode micro-channel further includes coating the layer with a curable protective material, exposing the curable protective material with the electrode pattern to cure the curable material corresponding to the electrode pattern.
11. The method of claim 10 further including removing the uncured curable material after the curable material is cured in the electrode pattern.
12. The method of claim 1 , wherein at least partially filling the electrode micro-channel and the micro-channel intersection corresponding to the electrode pattern with a conductive material further includes coating the layer with a liquid ink, removing the liquid ink from the layer but not from the electrode micro-channel or micro-channel intersection portion corresponding to the electrode pattern, and curing the liquid ink to form the conductive material.
13. The method of claim 1 wherein the curable layer includes cross-linkable material and wherein imprinting and curing the curable layer further includes stamping the curable material with a stamp having a reverse electrode and fluid micro-channel pattern and cross-linking the curable material to form the imprinted cured layer.
14. The method of claim 13 wherein curing the curable layer exposing the curable layer to heat, electromagnetic radiation or both.
15. The method of claim 1 wherein the curable material is a resin.
16. The method of claim 1 wherein the developable material is a photoresist.
17. The method of claim 1 wherein developing the developable material includes washing the layer.
18. The method of claim 1 wherein removing at least a portion of the remaining developable material from the fluid micro-channel includes exposing at least part of the remaining developable material and developing the exposed developable material.