Enhanced MEMS vibrating device
View Patent ↗A MEMS vibrating device includes a substrate, at least one anchor on a surface of the substrate, and a vibrating body suspended over the substrate by the at least one anchor. The vibrating body includes a first piezoelectric thin-film layer, a second piezoelectric thin-film layer over the first piezoelectric thin-film layer, and an inter-digital transducer embedded between the first piezoelectric thin-film layer and the second piezoelectric thin-film layer. Embedding the inter-digital transducer between the first piezoelectric thin-film layer and the second piezoelectric thin-film layer may result in enhanced vibrational characteristics of the MEMS vibrating device, thereby increasing the performance thereof.
1. A micro-electrical-mechanical system (MEMS) device comprising:
a substrate;
at least one anchor on a surface of the substrate; and
a vibrating body suspended over the substrate by the at least one anchor and comprising:
a first piezoelectric thin-film layer;
a second piezoelectric thin-film layer over the first piezoelectric thin-film layer; and
an inter-digital transducer embedded between the first piezoelectric thin-film layer and the second piezoelectric thin-film layer and comprising a first electrode and a second electrode each having a number of interlocking conductive sections;
wherein a polarization of the first piezoelectric thin-film layer is parallel to a polarization of the second piezoelectric thin-film layer.
2. The MEMS device of claim 1 wherein the polarization of the first piezoelectric thin-film layer and the polarization of the second piezoelectric thin-film layer are parallel to the surface of the substrate.
3. The MEMS device of claim 1 wherein the polarization of the first piezoelectric thin-film layer and the polarization of the second piezoelectric thin-film layer are perpendicular to the surface of the substrate.
4. The MEMS device of claim 1 wherein the polarization of the first piezoelectric thin-film layer and the polarization of the second piezoelectric thin-film layer are oblique to the surface of the substrate.
5. The MEMS device of claim 1 further comprising a functional layer over a surface of the first piezoelectric thin-film layer facing the substrate.
6. The MEMS device of claim 5 further comprising an additional functional layer over a surface of the second piezoelectric thin-film layer opposite the first piezoelectric thin-film layer.
7. The MEMS device of claim 1 further comprising a functional layer over a surface of the second piezoelectric thin-film layer opposite the first piezoelectric thin-film layer.
8. A micro-electrical-mechanical system (MEMS) device comprising:
a substrate;
at least one anchor on a surface of the substrate; and
a vibrating body suspended over the substrate by the at least one anchor and comprising:
a first piezoelectric thin-film layer;
a second piezoelectric thin-film layer over the first piezoelectric thin-film layer; and
an inter-digital transducer embedded between the first piezoelectric thin-film layer and the second piezoelectric thin-film layer and comprising a first electrode and a second electrode each having a number of interlocking conductive sections;
wherein a polarization of the first piezoelectric thin-film layer is opposite to a polarization of the second piezoelectric thin-film layer.
9. The MEMS device of claim 8 wherein the polarization of the first piezoelectric thin-film layer and the polarization of the second piezoelectric thin-film layer are parallel to the surface of the substrate.
10. The MEMS device of claim 8 wherein the polarization of the first piezoelectric thin-film layer and the polarization of the second piezoelectric thin-film layer are perpendicular to the surface of the substrate.
11. The MEMS device of claim 8 wherein the polarization of the first piezoelectric thin-film layer and the polarization of the second piezoelectric thin-film layer are oblique to the surface of the substrate.
12. The MEMS device of claim 8 further comprising a functional layer over a surface of the first piezoelectric thin-film layer facing the substrate.
13. The MEMS device of claim 12 further comprising an additional functional layer over a surface of the second piezoelectric thin-film layer opposite the first piezoelectric thin-film layer.
14. The MEMS device of claim 8 further comprising a functional layer over a surface of the second piezoelectric thin-film layer opposite the first piezoelectric thin-film layer.
15. A micro-electrical-mechanical system (MEMS) device comprising:
a substrate;
at least one anchor on a surface of the substrate; and
a vibrating body suspended over the substrate by the at least one anchor and comprising:
a first piezoelectric thin-film layer;
a second piezoelectric thin-film layer over the first piezoelectric thin-film layer; and
an inter-digital transducer embedded between the first piezoelectric thin-film layer and the second piezoelectric thin-film layer and comprising a first electrode and a second electrode each having a number of interlocking conductive sections;
wherein a polarization of the first piezoelectric thin-film layer is oblique with respect to a polarization of the second piezoelectric thin-film layer.
16. The MEMS device of claim 15 wherein the polarization of the first piezoelectric thin-film layer and the polarization of the second piezoelectric thin-film layer are oblique to the surface of the substrate.
17. The MEMS device of claim 15 further comprising a functional layer over a surface of the first piezoelectric thin-film layer facing the substrate.
18. The MEMS device of claim 17 further comprising an additional functional layer over a surface of the second piezoelectric thin-film layer opposite the first piezoelectric thin-film layer.
19. The MEMS device of claim 15 further comprising a functional layer over a surface of the second piezoelectric thin-film layer opposite the first piezoelectric thin-film layer.
20. A micro-electrical-mechanical system (MEMS) device comprising:
a substrate;
at least one anchor on a surface of the substrate; and
a vibrating body suspended over the substrate by the at least one anchor and comprising:
a first piezoelectric thin-film layer;
a second piezoelectric thin-film layer over the first piezoelectric thin-film layer;
an inter-digital transducer embedded between the first piezoelectric thin-film layer and the second piezoelectric thin-film layer and comprising a first electrode and a second electrode each having a number of interlocking conductive sections;
a third electrode over a surface of the first piezoelectric thin-film layer facing the substrate; and
a fourth electrode over a surface of the second piezoelectric thin-film layer opposite the first piezoelectric thin-film layer.
21. The MEMS device of claim 20 wherein a polarization of the first piezoelectric thin-film layer is parallel to a polarization of the second piezoelectric thin-film layer.
22. The MEMS device of claim 21 wherein the polarization of the first piezoelectric thin-film layer and the polarization of the second piezoelectric thin-film layer are parallel to the surface of the substrate.
23. The MEMS device of claim 21 wherein the polarization of the first piezoelectric thin-film layer and the polarization of the second piezoelectric thin-film layer are perpendicular to the surface of the substrate.
24. The MEMS device of claim 21 wherein the polarization of the first piezoelectric thin-film layer and the polarization of the second piezoelectric thin-film layer are oblique to the surface of the substrate.
25. The MEMS device of claim 20 wherein a polarization of the first piezoelectric thin-film layer is opposite to a polarization of the second piezoelectric thin-film layer.
26. The MEMS device of claim 25 wherein the polarization of the first piezoelectric thin-film layer and the polarization of the second piezoelectric thin-film layer are parallel to the surface of the substrate.
27. The MEMS device of claim 25 wherein the polarization of the first piezoelectric thin-film layer and the polarization of the second piezoelectric thin-film layer are perpendicular to the surface of the substrate.
28. The MEMS device of claim 25 wherein the polarization of the first piezoelectric thin-film layer and the polarization of the second piezoelectric thin-film layer are oblique to the surface of the substrate.
29. The MEMS device of claim 20 wherein a polarization of the first piezoelectric thin-film layer is oblique with respect to a polarization of the second piezoelectric thin-film layer.
30. The MEMS device of claim 29 wherein the polarization of the first piezoelectric thin-film layer and the polarization of the second piezoelectric thin-film layer are oblique to the surface of the substrate.
31. The MEMS device of claim 20 further comprising a functional layer over a surface of the first conductive layer opposite the first piezoelectric thin-film layer.
32. The MEMS device of claim 31 further comprising an additional functional layer over a surface of the second conductive layer opposite the second piezoelectric thin-film layer.
33. The MEMS device of claim 20 further comprising a functional layer over a surface of the second conductive layer opposite the second piezoelectric thin-film layer.
34. A micro-electrical-mechanical system (MEMS) device comprising:
a substrate;
at least one anchor on a surface of the substrate; and
a vibrating body suspended over the substrate by the at least one anchor and comprising:
a first piezoelectric thin-film layer;
a second piezoelectric thin-film layer over the first piezoelectric thin-film layer;
an interposer layer between the first piezoelectric thin-film layer and the second piezoelectric thin-film layer; and
an inter-digital transducer embedded in the interposer layer and comprising a first electrode and a second electrode each having a number of interlocking conductive sections.