Integrated circuit coupling system with waveguide circuitry and method of manufacture thereof
View Patent ↗A method of manufacture of an integrated circuit coupling system includes: forming a waveguide assembly, having a top clad over an open end of an optical core; forming a first photoresist having a base photoresist pattern shape with sloped photoresist sidewalls tapered down to expose a portion of the top clad; forming a recess having clad sidewalls from the portion of the top clad exposed by the base photoresist pattern shape, the clad sidewalls having a shape replicating a shape of the base photo resist pattern shape; and forming an optical vertical insertion area, from the clad sidewalls forming the recess, having a pocket trench, a horizontal step, and a mirror with a reflective material selectively applied to a section of the clad sidewalls and exposing the open end opposite to the mirror, the horizontal step between the mirror and the pocket trench.
1. An integrated circuit coupling system comprising:
a substrate;
a top clad having clad sidewalls over the substrate;
an optical core having an open end between the substrate and the top clad; and
an optical vertical insertion area having a mirror, a horizontal step, and a pocket trench formed, through the top clad, below and between the open end and the mirror opposite the open end exposed in the optical vertical insertion area, the horizontal step between the mirror and the pocket trench;
an interface structure mounted over the optical vertical insertion area; and
wherein:
the substrate is below the optical core.
2. The system as claimed in claim 1 wherein the optical vertical insertion area includes the horizontal step between the open end and the pocket trench.
3. The system as claimed in claim 1 further comprising a transparent backfill covering the optical vertical insertion area.
4. The system as claimed in claim 1 further comprising a semiconductor component mounted over the optical vertical insertion area.
5. The system as claimed in claim 1 further comprising a multicore optical fiber optically coupled through the optical vertical insertion area.
6. The system as claimed in claim 1 further comprising a lid over and hermetically sealing the optical vertical insertion area.
7. The system as claimed in claim 1 further comprising a prism mounted over the optical vertical insertion area.
8. The system as claimed in claim 1 further comprising a back-illuminated photodiode mounted over the optical vertical insertion area.