Feedback for buffer layer deposition
View Patent ↗Improved methods and apparatus for forming thin film layers of chalcogenide on a substrate web. According to the present teachings, a feedback control system may be employed to measure one or more properties of the web and/or the chalcogenide layer, and to adjust one or more parameters of the system or buffer layer deposition method in response to the measurement.
1. A method of depositing a thin film chalcogenide buffer layer onto a flexible substrate, comprising:
transporting a web of thin film substrate material through a deposition region by passing the web over a transport mechanism disposed within the deposition region;
dispensing onto a top surface of the web a metal-containing solution containing a metal chosen from the group consisting of copper, silver, gold, zinc, cadmium, mercury, lead, boron, aluminum, gallium, indium and thallium, and a chalcogen-containing solution containing a chalcogen chosen from the group consisting of oxygen, sulfur, selenium and tellurium;
lifting transverse edge portions of the web relative to a central portion of the web to contain at least a portion of the metal-containing solution and at least a portion of the chalcogen-containing solution substantially upon the top surface of the web; and
holding the central portion of the web substantially flat;
wherein holding the central portion of the web substantially flat includes holding the web in contact with the transport mechanism at discrete positions within the deposition region by passing the web underneath a plurality of wheels, each wheel disposed directly above a portion of the transport mechanism and between the central portion and one of the lifted transverse edge portions of the web, and configured to hold the web in contact with that portion of the transport mechanism; and
wherein the wheels are disposed above the transport mechanism in an alternating arrangement, with successive wheels disposed near alternating edges of the transport mechanism.
2. The method of claim 1 , wherein the transport mechanism is configured to transport the web out of physical contact with a web heating mechanism.
3. The method of claim 1 , wherein the transport mechanism has concave edge portions, and wherein lifting the transverse edge portions of the web includes passing the web over the concave edge portions of the transport mechanism.
4. The method of claim 1 , wherein the wheels are configured to supply an adjustable force to the web.
5. The method of claim 1 , wherein the wheels are configured to supply a force having both downward and outward components to the web.
6. The method of claim 1 , wherein lifting the transverse edge portions includes contacting each edge portion with a lifting structure shaped to conform to the lifted edge portion.
7. The method of claim 6 , wherein each lifting structure includes a concave lifting portion.
8. The method of claim 6 , wherein each lifting structure includes a substantially planar lifting portion angled away from the central portion of the web.
9. The method of claim 6 , wherein each lifting structure includes a substantially planar lifting portion angled away from the central portion of the web.
10. The method of claim 1 , wherein lifting the transverse edge portions is adjustable within a range of lift amounts.
11. A method of depositing a thin film cadmium sulfide semiconductor layer onto a flexible substrate, comprising:
transporting a web of thin film substrate material through a deposition region by passing the web over a transport mechanism disposed within the deposition region;
dispensing onto a top surface of the web a cadmium-containing solution and a sulfur-containing solution;
lifting transverse edge portions of the web relative to a central portion of the web to contain at least a portion of the cadmium-containing solution and at least a portion of the sulfur-containing solution substantially upon the top surface of the web; and
holding the central portion of the web substantially flat by passing the web underneath a plurality of wheels, each wheel disposed directly above a portion of the transport mechanism and between the central portion and one of the lifted transverse edge portions of the web, and configured to hold the web in contact with that portion of the transport mechanism;
wherein the wheels are disposed above the transport mechanism in an alternating arrangement, with successive wheels disposed near alternating edges of the transport mechanism.
12. The method of claim 11 , wherein the transport mechanism is configured to transport the web out of physical contact with a web heating mechanism.
13. The method of claim 11 , wherein the transport mechanism has concave edge portions, and wherein lifting the transverse edge portions of the web includes passing the web over the concave edge portions of the transport mechanism.
14. The method of claim 11 , wherein the wheels are configured to supply an adjustable force to the web.
15. The method of claim 11 , wherein the wheels are configured to supply a force having both downward and outward components to the web.
16. The method of claim 11 , wherein lifting the transverse edge portions includes contacting each edge portion with a lifting structure shaped to conform to the lifted edge portion.
17. The method of claim 16 , wherein each lifting structure includes a concave lifting portion.
18. A method of depositing a thin film semiconductor layer onto a flexible substrate, comprising:
transporting a web of thin film substrate material through a deposition region by passing the web over a transport mechanism disposed within the deposition region;
dispensing onto a top surface of the web a cadmium-containing solution and a sulfur-containing solution;
providing heat sufficient to cause the cadmium-containing solution and the sulfur-containing solution to react to form a chalcogenide;
lifting transverse edge portions of the web relative to a central portion of the web to contain at least a portion of the cadmium-containing solution and at least a portion of the sulfur-containing solution substantially upon the top surface of the web; and
holding the central portion of the web substantially flat by passing the web underneath a plurality of wheels, each wheel disposed directly above a portion of the transport mechanism between the central portion and one of the lifted transverse edge portions of the web, and configured to hold the web in contact with that portion of the transport mechanism;
wherein the wheels are disposed above the transport mechanism in an alternating arrangement, with successive wheels disposed near alternating edges of the transport mechanism.