Pattern forming process and shrink agent

1. A pattern forming process comprising the steps of:

applying a resist composition comprising a polymer comprising recurring units having an acid labile group-substituted carboxyl group, an acid generator and an organic solvent onto a substrate,

prebaking to form a resist film,

exposing the resist film to high-energy radiation,

baking the film,

developing the exposed resist film in an organic solvent-based developer to form a negative pattern,

applying a shrink agent onto the negative pattern, the shrink agent being a solution of a polymer comprising recurring units having a tertiary amino group in a solvent selected from the group consisting of ether solvents of 6 to 12 carbon atoms, alcohol solvents of 4 to 10 carbon atoms, hydrocarbon solvents of 6 to 12 carbon atoms, ester solvents of 6 to 16 carbon atoms, and ketone solvents of 7 to 16 carbon atoms,

baking, and

removing the excessive shrink agent for thereby shrinking the size of spaces in the pattern.

2. The pattern forming process of claim 1 wherein the polymer comprising recurring units having a tertiary amino group has the general formula (1):

wherein R 1 is hydrogen or methyl, X is a single bond, phenylene or —C(═O)—O—, m is 1 or 2, in case of m=1, R 2 is a single bond, a straight, branched or cyclic C 1 -C 10 alkylene group which may contain an ether moiety, ester moiety, —N═ or —S—, a phenylene or naphthylene group, in case of m=2, R 2 is a trivalent group obtained by eliminating one hydrogen from the above alkylene, phenylene or naphthylene group of R 2 for m=1, R 3 and R 4 are each independently a straight or branched C 1 -C 4 alkyl group, or R 3 and R 4 may bond together to form a ring with the nitrogen atom to which they are attached, the ring optionally containing an ether bond, or either one of R 3 and R 4 may bond with R 2 to form a ring with the nitrogen atom to which they are attached, and 0<a≦1.0.

3. The pattern forming process of claim 1 wherein the solvent of the shrink agent is selected from the group consisting of ether solvents of 6 to 12 carbon atoms, alcohol solvents of 4 to 10 carbon atoms, hydrocarbon solvents of 6 to 12 carbon atoms, ester solvents of 6 to 16 carbon atoms, and ketone solvents of 7 to 16 carbon atoms, such that the patterned resist film after development may experience a thickness loss of up to 10 nm when the film is kept in contact with the solvent for 30 seconds.

4. The pattern forming process of claim 1 wherein the solvent of the shrink agent is selected from the group consisting of di-n-butyl ether, diisobutyl ether, di-sec-butyl ether, di-n-pentyl ether, diisopentyl ether, di-sec-pentyl ether, di-tert-amyl ether, di-n-hexyl ether, methyl cyclopentyl ether, methyl cyclohexyl ether, methyl phenyl ether, methyl benzyl ether, ethyl cyclopentyl ether, ethyl cyclohexyl ether, ethyl phenyl ether, ethyl benzyl ether, 1-butyl alcohol, 2-butyl alcohol, isobutyl alcohol, tert-butyl alcohol, 1-pentanol, 2-pentanol, 3-pentanol, tert-amyl alcohol, neopentyl alcohol, 2-methyl-1-butanol, 3-methyl-1-butanol, 3-methyl-3-pentanol, cyclopentanol, 1-hexanol, 2-hexanol, 3-hexanol, 2,3-dimethyl-2-butanol, 3,3-dimethyl-1-butanol, 3,3-dimethyl-2-butanol, 2-ethyl-1-butanol, 2-methyl-1-pentanol, 2-methyl-2-pentanol, 2-methyl-3-pentanol, 3-methyl-1-pentanol, 3-methyl-2-pentanol, 3-methyl-3-pentanol, 4-methyl-1-pentanol, 4-methyl-2-pentanol, 4-methyl-3-pentanol, cyclohexanol, 1-octanol, benzene, toluene, xylene, mesitylene, ethylbezene, n-propylbenzene, cumene, n-butylbenzene, cymene, amylbenzene, diethylbenzene, octane, nonane, decane, turpentine oil, pinene, 2-octanone, 2-nonanone, 2-heptanone, 3-heptanone, 4-heptanone, 2-hexanone, 3-hexanone, diisobutyl ketone, methylcyclohexanone, acetophenone, methylacetophenone, ethyl n-butyl ketone, di-n-butyl ketone, butyl acetate, amyl phoronate, amyl acetate, isoamyl acetate, 2-ethylhexyl acetate, cyclohexyl acetate, methylcyclohexyl acetate, hexyl formate, ethyl valerate, propyl valerate, isopropyl valerate, butyl valerate, isobutyl valerate, tert-butyl valerate, amyl valerate, isoamyl valerate, ethyl isovalerate, propyl isovalerate, isopropyl isovalerate, butyl isovalerate, isobutyl isovalerate, tert-butyl isovalerate, isoamyl isovalerate, ethyl pivalate, propyl pivalate, isopropyl pivalate, butyl pivalate, tert-butyl pivalate, ethyl pentenoate, propyl pentenoate, isopropyl pentenoate, butyl pentenoate, tert-butyl pentenoate, propyl crotonate, isopropyl crotonate, butyl crotonate, tert-butyl crotonate, butyl propionate, isobutyl propionate, tert-butyl propionate, benzyl propionate, propyl butyrate, butyl butyrate, isobutyl butyrate, tert-butyl butyrate, methyl benzoate, ethyl benzoate, propyl benzoate, butyl benzoate, phenyl acetate, benzyl acetate, methyl phenylacetate, benzyl formate, phenylethyl formate, methyl 3-phenylpropionate, ethyl phenylacetate, 2-phenylethyl acetate, and a mixture thereof.

5. The pattern forming process of claim 1 wherein the removing step uses a solvent selected from the group consisting of ether solvents of 6 to 12 carbon atoms, alcohol solvents of 4 to 10 carbon atoms, hydrocarbon solvents of 6 to 12 carbon atoms, ester solvents of 6 to 16 carbon atoms, and ketone solvents of 7 to 16 carbon atoms.

6. The pattern forming process of claim 1 wherein the polymer in the resist composition comprises recurring units (b) having the general formula (2):

wherein R 5 is hydrogen or methyl, R 6 is an acid labile group, Y is a single bond or —C(═O)—O—R 7 —, R 7 is a straight, branched or cyclic C 1 -C 10 alkylene group which may contain an ether or ester moiety, or naphthylene group, and 0<b<1.0.

7. The pattern forming process of claim 1 wherein the developer comprises at least one organic solvent selected from the group consisting of 2-octanone, 2-nonanone, 2-heptanone, 3-heptanone, 4-heptanone, 2-hexanone, 3-hexanone, diisobutyl ketone, methylcyclohexanone, acetophenone, methylacetophenone, propyl acetate, butyl acetate, isobutyl acetate, amyl acetate, isoamyl acetate, butenyl acetate, propyl formate, butyl formate, isobutyl formate, amyl formate, isoamyl formate, methyl valerate, methyl pentenoate, methyl crotonate, ethyl crotonate, methyl propionate, ethyl propionate, ethyl 3-ethoxypropionate, methyl lactate, ethyl lactate, propyl lactate, butyl lactate, isobutyl lactate, amyl lactate, isoamyl lactate, methyl 2-hydroxyisobutyrate, ethyl 2-hydroxyisobutyrate, methyl benzoate, ethyl benzoate, phenyl acetate, benzyl acetate, methyl phenylacetate, benzyl formate, phenylethyl formate, methyl 3-phenylpropionate, benzyl propionate, ethyl phenylacetate, and 2-phenylethyl acetate.

8. A shrink agent for use with a resist pattern for shrinking the size of spaces in the resist pattern, comprising a polymer comprising recurring units having a tertiary amino group and a solvent, wherein

the polymer comprising recurring units having a tertiary amino group is represented by the general formula (1):

wherein R 1 is hydrogen or methyl, X is a single bond, phenylene or —C(═O)—O—, m is 1 or 2, in case of m=1, R 2 is a single bond, a straight, branched or cyclic C 1 -C 10 alkylene group which may contain an ether moiety, ester moiety, —N═ or —S—, a phenylene or naphthylene group, in case of m=2, R 2 is a trivalent group obtained by eliminating one hydrogen from the above group of R 2 for m=1, R 3 and R 4 are each independently a straight or branched C 1 -C 4 alkyl group, or R 3 and R 4 may bond together to form a ring with the nitrogen atom to which they are attached, the ring optionally containing an ether bond, or either one of R 3 and R 4 may bond with R 2 to form a ring with the nitrogen atom to which they are attached, and 0<a≦1.0, and

the solvent is selected from the group consisting of ether solvents of 6 to 12 carbon atoms, alcohol solvents of 4 to 10 carbon atoms, hydrocarbon solvents of 6 to 12 carbon atoms, ester solvents of 6 to 16 carbon atoms, and ketone solvents of 7 to 16 carbon atoms.

9. The pattern forming process of claim 2 wherein the polymer further comprises:

recurring units (c) derived from monomers selected from the group consisting of styrenes, vinylnaphthalenes, vinylanthracenes, acenaphthylenes, (meth)acrylates having an aromatic ester, and (meth)acrylates having a C 6 -C 20 cyclic alkyl ester,

recurring units (d) derived from (meth)acrylates or styrenes having an acid labile group-substituted carboxyl group or acid labile group-substituted hydroxyl group, or (meth)acrylates or styrenes having a carboxyl, hydroxyl, cyano, amide, imide, sulfonamide, ester, ether, lactone ring, carbonate or carbamate, and/or

recurring units (b′) having an acid labile group.

10. The shrink agent of claim 8 wherein the polymer further comprises:

recurring units (c) derived from monomers selected from the group consisting of styrenes, vinylnaphthalenes, vinylanthracenes, acenaphthylenes, (meth)acrylates having an aromatic ester, and (meth)acrylates having a C 6 -C 20 cyclic alkyl ester,

recurring units (d) derived from (meth)acrylates or styrenes having an acid labile group-substituted carboxyl group or acid labile group-substituted hydroxyl group, or (meth)acrylates or styrenes having a carboxyl, hydroxyl, cyano, amide, imide, sulfonamide, ester, ether, lactone ring, carbonate or carbamate, and/or

recurring units (b′) having an acid labile group.