Apparatus and techniques for electronic device encapsulation
View Patent ↗Apparatus and techniques for use in manufacturing a light emitting device, such as an organic light emitting diode (OLED) device can include using one or more modules having a controlled environment. The controlled environment can be maintained at a pressure at about atmospheric pressure or above atmospheric pressure. The modules can be arranged to provide various processing regions and to facilitate printing or otherwise depositing one or more patterned organic layers of an OLED device, such as an organic encapsulation layer (OEL) of an OLED device. In an example, uniform support for a substrate can be provided at least in part using a gas cushion, such as during one or more of a printing, holding, or curing operation comprising an OEL fabrication process. In another example, uniform support for the substrate can be provided using a distributed vacuum region, such as provided by a porous medium.
1. A coating system for providing a coating on a substrate, the system comprising:
an enclosed ink jet printing system configured to deposit a patterned organic material in a deposition region over at least a portion of a light-emittino device fabricated upon the substrate:
an enclosed curing module comprising a chuck configured to accommodate the substrate in an ultraviolet treatment region of the enclosed curing module, the ultraviolet treatment region configured to provide an ultraviolet treatment to cure the patterned organic material: and
an enclosed substrate transfer module configured to receive the substrate from an atmospheric environment different from an environment of one or more of the enclosed ink jet printing system or the enclosed curing module;
wherein the chuck is configured to distribute a pressurized gas cushion sufficient to float the substrate above the chuck.
2. The coating system of claim 1 , wherein the deposition region overlaps with the light-emitting device.
3. The coating system of claim 2 , wherein the chuck comprises one or more support mechanisms configured to be placed in physical contact with the substrate, the physical contact being confined to an area corresponding to a region of the substrate outside the deposition region.
4. The coating system of claim 1 , wherein the chuck comprises a porous ceramic material, and wherein the gas cushion is established by forcing gas through the porous ceramic material.
5. The coating system of claim 1 , wherein the gas cushion is established using a combination of a pressurized gas region and at least a partial vacuum region.
6. The coating system of claim 5 , further comprising a system configured to recover and recirculate pressurized gas or evacuated gas of the gas cushion.
7. The coating system of claim 1 , wherein the enclosed curing module is configured (1) to hold the substrate at rest for a duration for dispersal of the patterned organic material to form a layer to cover the light-emitting devices, and (2) to provide the ultraviolet treatment without requiring further movement of the substrate between holding and ultraviolet treatment operations.
8. The coating system of claim 7 , wherein the substrate is a glass substrate.
9. The coating system of claim 7 , wherein the substrate is a polymeric substrate.
10. The coating system of claim 1 , wherein the ultraviolet treatment region of the curing module comprises a gantry-mounted ultraviolet (UV) source, the gantry configured to transport the UV source relative to the substrate during curing.
11. The coating system of claim 10 , wherein the UV light source mounted on the gantry is a linear array of UV light sources.
12. The coating system of claim 11 , wherein the linear array of UV light sources is an array of light emitting diodes.
13. The coating system of claim 11 , wherein the linear array is at least as wide or as long as the substrate.
14. The coating system of claim 1 , wherein the environments of the enclosed ink jet printing system and the enclosed curing module are controlled processing environments at or near atmospheric pressure.
15. The coating system of claim 14 , wherein the controlled processing environments include a non-reactive gas specified for minimal or no reactivity with a species deposited on the substrate.
16. The coating system of claim 15 , wherein the controlled processing environments include nitrogen above atmospheric pressure.
17. The coating system of claim 14 , wherein the controlled processing environments have less than 100 parts-per-million of oxygen and less than 100 parts-per-million of water vapor.
18. The coating system of claim 14 , wherein the controlled processing environments include a particulate contamination level controlled at least in part using multiple fan filter units located along or nearby a path traversed by the substrate.
19. The coating system of claim 14 , wherein the controlled processing environments of the enclosed ink jet printing system and the enclosed curing module are substantially the same.
20. The coating system of claim 1 , wherein the deposition region includes a length dimension and a width dimension; and
wherein the ultraviolet treatment region comprises an ultraviolet (UV) source including an array of UV emitters, the array having a span in at least one dimension that is greater than at least one of the length dimension or the width dimension.
21. The coating system of claim 20 , wherein the array of UV emitters extends in two dimensions.
22. The coating system of claim 20 , wherein the array of UV emitters comprises an array of light emitting diodes.
23. The coating system of claim 1 , further comprising:
an ultraviolet (UV) source configured to treat an area of the deposition region, and
a diffuser, the diffuser configured to normalize an intensity of the UV source across the area of the deposition region treated using the UV source.
24. The coating system of claim 1 , wherein the controlled processing environment of the enclosed curing module is at a controlled temperature.
25. The coating system of claim 24 , wherein the controlled temperature is sufficient to maintain a specified temperature gradient across the deposition region of the substrate during curing.
26. The coating system of claim 1 , wherein the patterned organic material is a curable material configured form a layer of an encapsulation structure sufficient to seal the light-emitting device fabricated upon the substrate from exposure to ambient air.
27. The coating system of claim 2 , wherein the chuck comprises one or more lift pins configured to be placed in physical contact with the substrate.
28. The coating system of claim 3 , wherein the area outside the deposition region is at the periphery of the substrate.
29. The coating system of claim 4 , wherein the gas cushion is established by forcing gas through the pores of the porous ceramic material.