Method for manufacturing solar cell

1. A method of manufacturing a solar cell, the method comprising:

forming a first conductive region on a front surface of a semiconductor substrate;

forming a second conductive region on a back surface of the semiconductor substrate, and an electrode connected to the first conductive region to form the solar cell, after forming of the first conductive region; and

post-processing the semiconductor substrate to passivate the semiconductor substrate,

wherein the post-processing of the semiconductor substrate comprises a main processing process for heat-treating the front and back surfaces of the semiconductor substrate while providing light to the semiconductor substrate,

wherein the main processing process is performed after the forming of the electrode, and

wherein a temperature of the main processing process is about 100° C. to about 800° C.

2. The method according to claim 1 , wherein the semiconductor substrate has a thickness of about of 200 μm or less.

3. The method according to claim 1 , further comprising:

performing a preliminary heat treatment process for preliminarily heat-treating the semiconductor substrate, before the main processing process.

4. The method according to claim 3 , wherein the preliminary heat treatment process is performed without providing light to the semiconductor substrate.

5. The method according to claim 3 , wherein a temperature of the preliminary heat treatment process is about 100° C. to about 300° C.

6. The method according to claim 3 , wherein a process time of the preliminary heat treatment process is about 1 minute to 30 minutes.

7. The method according to claim 1 , further comprising:

performing a hydrogen diffusion process for diffusing hydrogen into an inside of the semiconductor substrate, before the main processing process,

wherein a peak temperature of the hydrogen diffusion process is about 700 to 800° C.

8. The method according to claim 7 , wherein a process time of the hydrogen diffusion process is about 5 seconds to about 20 minutes.

9. The method according to claim 7 , wherein the forming of the electrode comprises:

forming an electrode layer; and

firing the electrode layer,

wherein the hydrogen diffusion process is simultaneously performed with the firing of the electrode layer, or is performed between the firing of the electrode layer and the main processing process.

10. The method according to claim 1 , wherein the post-processing of the semiconductor substrate comprises:

performing a hydrogen diffusion process for diffusing hydrogen into an inside of the semiconductor substrate, before the main processing process; and

performing a preliminary heat treatment process performed between the hydrogen diffusion process and the main processing process,

wherein a temperature of the preliminary heat treatment process is lower than a temperature of the hydrogen diffusion process.

11. The method according to claim 1 , wherein the semiconductor substrate comprises a base region of a p-type.

12. The method according to claim 1 , wherein the semiconductor substrate comprises boron as a dopant.

13. The method according to claim 1 , further comprising:

forming a dielectric film including hydrogen on the first conductive region, between the forming of the first conductive region and the forming of the electrode,

wherein, in the post-processing of the semiconductor substrate, the hydrogen included in the dielectric film is diffused into an inside of the semiconductor substrate and a bond including the hydrogen and a semiconductor material of the semiconductor substrate is formed at the inside the semiconductor substrate.

14. The method according to claim 13 , wherein the dielectric film includes the hydrogen in an amount of about 10 20 to 10 22 ea/cm 3 .

15. The method according to claim 13 , wherein the dielectric film is disposed on the front surface of the semiconductor substrate.

16. The method according to claim 1 , wherein the first conductive region is a doped region formed by doping a dopant to the semiconductor substrate and constitutes a part of the semiconductor substrate, or is disposed on the semiconductor substrate to be separated from the semiconductor substrate.

17. The method according to claim 1 , wherein the temperature and light intensity of the main processing process satisfy Equation 1,

1750 −31.8· T +(0.16)· T 2 ≦I   <Equation 1>

where T is the temperate (° C.) of the main processing process, and I is the light intensity (mW/cm 2 ) of the main processing process.

18. The method according to claim 17 , wherein the temperature and the light intensity of the main processing process further satisfy Equation 2,

1750−31.8 ·T +(0.16)· T 2 ≦I≦ 10 5 .  <Equation 2>

19. The method according to claim 17 , wherein the temperature and the light intensity of the main processing process satisfy one of Equations 3 to 6,

1.7×10 2 ≦I< 10 3 , and 13000−(31.7)· I +(0.02)·( I ) 2 ≦P,   <Equation 3>

10 3 ≦I< 10 4 , and 1030−(0.25)· I +(1.5×10 −5 )·( I ) 2 ≦P,   <Equation 4>

10 4 ≦I≦ 5×10 4 , and 35.5−(0.0012)· I +(10 −8 )·( I ) 2 ≦P , and  <Equation 5>

5×10 4 ≦I≦ 10 5 , and 0.5≦ P,   <Equation 6>

where I is the light intensity (mW/cm 2 ) of the main processing process, and P is process time (sec) of the main processing process.

20. The method according to claim 19 , wherein the temperature and the light intensity of the main processing process satisfy one of Equations 7 to 10,

1.7×10 2 ≦I< 10 3 , and 13000−(31.7)· I +(0.02)·( I ) 2 ≦P≦ 10000,  <Equation 7>

10 3 ≦I< 10 4 , and 1030−(0.25)· I +(1.5×10 −5 )·( I ) 2 ≦P≦ 10000,  <Equation 8>

10 4 ≦I≦ 5×10 4 , and 35.5−(0.0012)· I +(10 −8 )·( I ) 2 ≦P≦ 10000, and  <Equation 9>

5×10 4 ≦I≦ 10′, and 0.5≦ P≦ 10000.  <Equation 10>