Actuator for motion control in miniature cameras
View Patent ↗A device can comprise an outer frame, a platform, and a motion control mechanism. The motion control mechanism can be adapted to permit movement of the platform in a desired direction with respect to the outer frame and inhibit rotation of the platform with respect to the outer frame. An actuator can be contained at least partially within the motion control mechanism.
1. An actuator device, comprising:
a platform configured to support an optical element;
a plurality of actuators surrounding and supporting the platform, the plurality of actuators and the platform are arranged along a same plane; and
an outer frame arranged along the same plane and surrounding the plurality of actuators,
wherein each of the plurality of actuators comprises:
a fixed frame;
a movable frame configured to cooperate with the fixed frame to move the platform in a direction perpendicular to the same plane; and
a plurality of flexures configured to cooperate to provide a lateral stiffness and a rotational stiffness between the outer frame and the moveable frame, wherein an electrical voltage is supplied from an electrical contact disposed at the outer frame via one or more of the plurality flexures to actuate the movable frame.
2. The actuator device of claim 1 , wherein one or more of the plurality of flexures, through which the electrical voltage is supplied, comprise a serpentine contact flexure disposed between the outer frame and the fixed frame.
3. The actuator device of claim 1 further comprising a damping material extending across a gap between the outer frame and the movable frame and configured to inhibit undesired motion of the movable frame relative to the outer frame due to a shock.
4. The actuator device of claim 3 , wherein the damping material permit a rotational movement of the movable frame relative to the outer frame and inhibit a lateral movement of the movable frame relative to the outer frame during the shock.
5. The actuator device of claim 3 ,
wherein the movable frame is configured to pivot about a pivot axis to selectively pivot in and out of the plane relative to the outer frame, and
wherein the actuator device further comprises a flap damper arranged at the pivot axis and configured to provide damping.
6. The actuator device of claim 5 , wherein the flap damper comprises:
a first flap extending from the movable frame;
a second flap extending from the outer frame with the gap formed between the first flap and the second flap.
7. The actuator device of claim 6 , wherein the damping material is disposed on the first flap and the second flap across the gap.
8. The actuator device of claim 1 , wherein the plurality of flexures comprises at least one torsional flexure configured to provide a lateral stiffness between the movable frame and the outer frame.
9. The actuator device of claim 1 , wherein the plurality of flexures comprises at least one hinge flexure configured to provide a rotational stiffness between the movable frame and the outer frame.
10. A method of using the actuator device of claim 1 , the method comprising:
supplying the electrical voltage from the electrical contact via the one or more flexures to actuate the movable frame; and
adjusting an amount of the electrical voltage to change a position or a movement of the movable frame.
11. A method, comprising:
forming a platform for supporting an optical element;
forming a plurality of actuators surrounding and supporting the platform, the plurality of actuators and the platform arranged along a same plane; and
forming an outer frame arranged along the same plane and surrounding the plurality of actuators,
wherein each of the plurality of actuators comprises:
a fixed frame;
a movable frame configured to cooperate with the fixed frame to pivot away from the plane to move the platform in a direction perpendicular to the same plane; and
a plurality of flexures configured to cooperate to provide a lateral stiffness and a rotational stiffness between the outer frame and the moveable frame, wherein an electrical voltage is supplied from an electrical contact disposed at the outer frame via one or more of the plurality flexures to actuate the movable frame.
12. The method of claim 11 , wherein the outer frame, the movable frame, the platform, and the actuators are formed by a MEMS process.
13. The method of claim 11 , further comprising providing a damping material that extends across a gap between the outer frame and the movable frame and configured to inhibit undesired motion of the movable frame relative to the outer frame due to a shock.
14. The method of claim 13 ,
wherein the movable frame is configured to pivot about a pivot axis to selectively pivot in and out of the plane relative to the outer frame, and
wherein the method further comprising forming a flap damper at the pivot axis and configured to provide damping.
15. The method of claim 14 , wherein forming the flap damper further comprises:
forming a first flap extending from the movable frame; and
forming a second flap extending from the outer frame with the gap formed between the first flap and the second flap.
16. The method of claim 15 , further comprising disposing the damping material on the first flap and the second flap across the gap.
17. The method of claim 11 , further comprising supplying an electrical voltage from the electrical contact to the fixed frame via a serpentine contact flexure disposed between the outer frame and the fixed frame.
18. The method of claim 11 , further comprising: pivoting the movable frame about a pivotal axis to pivot the movable frame relative to the outer frame.
19. The method of claim 11 , further comprising forming a torsional flexure to provide a lateral stiffness between the movable frame and the outer frame.
20. The method of claim 11 , further comprising forming a hinge flexure to provide a rotational stiffness between the movable frame and the outer frame.