System and method for autofocusing of an imaging system

1. An autofocusing method, comprising:

providing an imaging system and an optical interferometry system for generating one or more images corresponding to a target region in a subject;

determining calibration information that identifies a focal position of the optical interferometry system corresponding to a determined focal position of the imaging system at which the imaging system generates a desired image of the target region at an initial position, wherein determining calibration information comprises:

aligning the optical interferometry system with an objective element of the imaging system;

determining an initial focal position of the imaging system at which the imaging system generates a desired image of the target region in the subject positioned at an initial position;

determining location of the initial position of the target region using at least one image generated by the optical interferometry system;

moving the target region out of focus of the optical interferometry system to reposition the target region at a subsequent position relative to the imaging system;

refocusing the optical interferometry system on the repositioned target region and determine location of the subsequent position of the target region;

computing a difference between the initial position and the subsequent position of the target region;

moving the objective element by the computed difference to focus on the repositioned target region;

determining a subsequent focal position of the objective element to focus on the repositioned target region at which the imaging system generates a desired image of the repositioned target region;

measuring a difference between the subsequent focal position of the objective element and the computed difference to identify a calibration error between the optical interferometry system and the imaging system; and

ascertaining a distance by which the objective element is to be moved to generate the desired image of the repositioned target region based on the computed difference and the calibration error;

determining a subsequent focal position of the imaging system for generating a desired image corresponding to at least one of another target region in the subject and another position of the target region relative to the imaging system based on the calibration information; and

autofocusing the imaging system using the subsequent focal position to generate the desired image corresponding to at least one of the another target region in the subject and another position of the target region relative to the imaging system.

2. The method of claim 1 , wherein the desired image of the target region corresponds to an image that satisfies at least one selected quality metric.

3. An autofocusing system, comprising:

an imaging system configured to image a target region in a subject;

an optical interferometry system operatively coupled to the imaging system, wherein the optical interferometry system is configured to generate one or more axial images of the target region;

a computing device communicatively coupled to the imaging system and the optical interferometry system, wherein the computing device is configured to:

determine calibration information that identifies an initial focal position of the optical interferometry system corresponding to a determined focal position of the imaging system at which the imaging system generates a desired image of the target region, comprising:

align the optical interferometry system with an objective element of the imaging system;

determine an initial focal position of the imaging system at which the imaging system generates a desired image of the target region in the subject positioned at an initial position;

determine location of the initial position of the target region using at least one image generated by the optical interferometry system;

move the target region out of focus of the optical interferometry system to reposition the target region at a subsequent position relative to the imaging system;

refocus the optical interferometry system on the repositioned target region and determine location of the subsequent position of the target region;

compute a difference between the initial position and the subsequent position of the target region;

move the objective element by the computed difference to focus on the repositioned target region;

determine a subsequent focal position of the objective element to focus on the repositioned target region at which the imaging system generates a desired image of the repositioned target region;

measure a difference between the subsequent focal position of the objective element and the computed difference to identify a calibration error between the optical interferometry system and the imaging system; and

ascertain a distance by which the objective element is to be moved to generate the desired image of the repositioned target region based on the computed difference and the calibration error;

determine a subsequent focal position of the imaging system for generating a desired image corresponding to at least one of another target region in the subject and another position of the target region relative to the imaging system based on the calibration information; and

autofocus the imaging system using the subsequent focal position to generate the desired image corresponding to at least one of the another target region in the subject and another position of the target region relative to the imaging system; and

a positioning subsystem configured to move the target region to the another position relative to the imaging system at which the imaging system is configured to generate a desired image of the repositioned target region using the subsequent focal position, wherein the positioning subsystem is operatively coupled to one or more of the imaging system and the optical interferometry system.

4. The autofocusing system of claim 3 , wherein the optical interferometry system comprises an optical coherence tomography system.

5. The autofocusing system of claim 3 , wherein the positioning subsystem comprises one or more actuators, shims, roller bearings, positioning elements, or combinations thereof.

6. The autofocusing system of claim 3 , wherein the imaging system comprises a microscope, wherein the objective element comprises an objective lens of the microscope and further wherein the optical interferometry system is positioned above the objective lens.

7. The autofocusing system of claim 3 , wherein the imaging system comprises a microscope, wherein the objective element comprises an objective lens of the microscope and further wherein the optical interferometry system and the microscope are positioned on opposite sides of a coverslip and a slide interface carrying a sample mounted in between, wherein the sample is imaged by the microscope.

8. The autofocusing system of claim 3 , wherein the imaging system comprises a microscope, wherein the objective element comprises an objective lens of the microscope and further wherein the optical interferometry system and the microscope are positioned on the same side of a coverslip and a slide interface carrying a sample mounted in between, wherein the sample is imaged by the microscope.

9. The autofocusing system of claim 3 , wherein the imaging system comprises a microscope, wherein the objective element comprises an objective lens of the microscope and further wherein the objective lens is positioned between the optical interferometry system and a coverslip and a slide interface carrying a sample mounted in between, wherein the sample is imaged by the microscope.

10. The autofocusing system of claim 3 , wherein the imaging system comprises a microscope, wherein the objective element comprises an objective lens of the microscope and further wherein the optical interferometry system is positioned along the objective lens.

11. The autofocusing system of claim 3 , wherein the optical interferometry system comprises a time domain, a spectral domain, or a swept source optical coherence tomography system.

12. The autofocusing system of claim 3 , wherein the autofocusing system is operatively coupled to a super-resolution imaging system configured to perform inspection of a semiconductor device.