Variable resistive memory device including vertical channel PMOS transistor and method of manufacturing the same
View Patent ↗A semiconductor device having a vertical channel, a variable resistive memory device including the same, and a method of manufacturing the same are provided. The semiconductor device having a vertical channel includes a vertical pillar formed on a semiconductor substrate and including an inner portion and an outer portion surrounding the inner portion, junction regions formed in the outer portion of the vertical pillar, and a gate formed to surround the vertical pillar. The inner portion of the vertical pillar has a lattice constant smaller than that of the outer portion of the vertical pillar.
1. A method of manufacturing a semiconductor device, the method comprising:
forming a first semiconductor layer on a semiconductor substrate, wherein the first semiconductor layer has a lattice constant smaller than that of the semiconductor substrate;
patterning the first semiconductor layer and a portion of the semiconductor substrate to form a preliminary pillar;
forming a second semiconductor layer having the same material as the semiconductor substrate, on an outer circumference of the preliminary pillar, to form a pillar;
forming a drain in an upper portion of the pillar and a source in a lower portion of the pillar; and
forming a gate to surround an outer circumference of the pillar.
2. The method of claim 1 , further comprising:
forming a third semiconductor layer having the same material as the semiconductor substrate, on the first semiconductor layer, between the forming of the first semiconductor layer and the patterning of the first semiconductor layer and the portion of the semiconductor substrate; and
patterning the third semiconductor layer to form the preliminary pillar during the patterning of the first semiconductor layer and the portion of the semiconductor substrate.
3. The method of claim 2 , wherein at least one of the semiconductor substrate, the second semiconductor layer, and the third semiconductor layer includes a silicon (Si) material.
4. The method of claim 2 , wherein at least one of the semiconductor substrate, the first semiconductor layer, the second semiconductor layer, and the third semiconductor layer is formed through an epitaxial growth method.
5. The method of claim 1 , wherein the first semiconductor layer includes one selected from the group consisting of SiC, AlN, GaN, ZnS, ZnO, ZnSe, CdS, BP, InN, and CdSe.
6. The method of claim 1 , wherein the forming of the first semiconductor layer includes:
forming a C-low concentration-SiC layer that contains a content of C below a stoichiometric content of C in SiC, on the semiconductor substrate; and
forming a C-high concentration-SiC layer that contains a content of C above the stoichiometric content of C in SiC, on the C-low concentration-SiC layer.