Magnetic field sensor and associated method that can sense a position of a magnet

1. A magnetic field sensor, comprising:

an electronic circuit, comprising:

a substrate having a major surface disposed in an x-y plane;

first, second, third, and fourth magnetic field sensing elements disposed upon the major surface of the substrate and configured to generate first, second, third and fourth respective electronic magnetic field signals, wherein each electronic magnetic field signal is responsive to a respective magnetic field parallel to the major surface of the substrate, wherein the first and third magnetic field sensing elements have respective first and third maximum response axes parallel to each other, directed in opposite directions, and parallel to the major surface of the substrate, and wherein the second and fourth magnetic field sensing elements have respective second and fourth maximum response axes parallel to each other, directed in opposite directions, and parallel the major surface of the substrate, wherein the first and third major response axes are not parallel to the second and fourth major response axes;

a first differential circuit coupled to the first and third magnetic field sensing elements and configured to generate a first difference signal related to a difference between the first and third electronic magnetic field signals;

a second differential circuit coupled to the second and fourth magnetic field sensing elements and configured to generate a second difference signal related to a difference between the second and fourth electronic magnetic field signals, wherein the first difference signal has an amplitude related to a an x-axis projection upon the x-y plane and the second difference signal has an amplitude related to a y-axis projection upon the x-y plane;

a direction angle processor coupled to receive signals representative of the first and second difference signals and configured to generate least one of an x direction angle signal or a y direction angle signal, wherein the x direction angle signal is representative of an angle relative to an x-axis in an x-y plane, and wherein the y direction angle signal is representative of an angle relative to a y-axis in the x-y plane; and

a tilt angle processor coupled to receive signal representative of the first and second difference signals and configured to generate a z tilt angle signal representative of an angle relative to a z-axis in x-y-z Cartesian coordinates having the x-y plane.

2. The magnetic field sensor of claim 1 , wherein a first line between centers of the first and third magnetic field sensing elements is perpendicular to a second line between centers of the second and fourth magnetic field sensing elements, wherein the first and third major response axes are perpendicular to the second and fourth major response axes.

3. The magnetic field sensor of claim 1 , further comprising a magnet disposed proximate to the first, second, third, and fourth magnetic field sensing elements, wherein the magnet has a north pole and a south pole, a line between which is perpendicular to the major surface of the substrate, wherein a magnetic force of the magnet results in a restoring force upon a shaft.

4. The magnetic field sensor of claim 3 , wherein the magnet is disk shaped.

5. The magnetic field sensor of claim 3 , wherein the magnet is disk shaped and has a central void disposed proximate to the electronic circuit.

6. The magnetic field sensor of claim 1 , wherein the first, second, third, and fourth magnetic field sensing elements are magnetoresistance elements.

7. The magnetic field sensor of claim 1 , wherein the first, second, third, and fourth magnetic field sensing elements are vertical Hall elements.

8. A method of sensing a position of a magnet, comprising:

providing, upon a substrate, first, second, third, and fourth magnetic field sensing elements configured to generate first, second, third and fourth respective electronic magnetic field signals, wherein each electronic magnetic field signal is responsive to a respective magnetic field parallel to the major surface of the substrate, wherein the first and third magnetic field sensing elements have respective first and third maximum response axes parallel to each other, directed in opposite directions, and parallel to the major surface of the substrate, and wherein the second and fourth magnetic field sensing elements have respective second and fourth maximum response axes parallel to each other, directed in opposite directions, and parallel the major surface of the substrate, wherein the first and third major response axes are not parallel to the second and fourth major response axes;

generating a first difference signal related to a difference between the first and third electronic magnetic field signals;

generating a second difference signal related to a difference between the second and fourth electronic magnetic field signals;

generating at least one of an x direction angle signal or a y direction angle signal, wherein the x direction angle signal is representative of an angle relative to an x-axis in an x-y plane, and wherein the y direction angle signal is representative of an angle relative to a y-axis in the x-y plane; and

generating a z tilt angle signal representative of an angle relative to a z-axis in x-y-z Cartesian coordinates having the x-y plane.

9. The method of claim 8 , wherein a first line between centers of the first and third magnetic field sensing elements is perpendicular to a second line between centers of the second and fourth magnetic field sensing elements, wherein the first and third major response axes are perpendicular to the second and fourth major response axes.

10. The method of claim 8 , further comprising providing a magnet disposed proximate to the first, second, third, and fourth magnetic field sensing elements, wherein the magnet has a north pole and a south pole, a line between which is perpendicular to the major surface of the substrate, wherein a magnetic force of the magnet results in a restoring force upon a shaft.

11. The method of claim 10 , wherein the magnet is disk shaped.

12. The method of claim 10 , wherein the magnet is disk shaped and has a central void disposed proximate to the electronic circuit.

13. The method of claim 8 , wherein the first, second, third, and fourth magnetic field sensing elements are magnetoresistance elements.

14. The method of claim 8 , wherein the first, second, third, and fourth magnetic field sensing elements are vertical Hall elements.

15. A magnetic field sensor, comprising:

an electronic circuit, comprising:

a substrate having a major surface disposed in an x-y plane;

first, second, third, and fourth magnetic field sensing elements disposed upon the major surface of the substrate and configured to generate first, second, third and fourth respective electronic magnetic field signals, wherein each electronic magnetic field signal is responsive to a respective magnetic field parallel to the major surface of the substrate, wherein the first and third magnetic field sensing elements have respective first and third maximum response axes parallel to each other, directed in opposite directions, and parallel to the major surface of the substrate, and wherein the second and fourth magnetic field sensing elements have respective second and fourth maximum response axes parallel to each other, directed in opposite directions, and parallel the major surface of the substrate, wherein the first and third major response axes are not parallel to the second and fourth major response axes;

a first differential circuit coupled to the first and third magnetic field sensing elements and configured to generate a first difference signal related to a difference between the first and third electronic magnetic field signals;

a second differential circuit coupled to the second and fourth magnetic field sensing elements and configured to generate a second difference signal related to a difference between the second and fourth electronic magnetic field signals, wherein the first difference signal has an amplitude related to a an x-axis projection upon the x-y plane and the second difference signal has an amplitude related to a y-axis projection upon the x-y plane; and

a tilt angle processor coupled to receive signals representative of the first and second difference signals and configured to generate a z tilt angle signal representative of an angle relative to a z-axis in x-y-z Cartesian coordinates.

16. The magnetic field sensor of claim 15 , wherein the electronic circuit further comprises: a direction angle processor coupled to receive signals representative of the first and second difference signals and configured to generate at least one of an x direction angle signal or a y direction angle signal, wherein the x direction angle signal is representative of an angle relative to an x-axis in an x-y plane, and wherein the y direction angle signal is representative of an angle relative to a y-axis in the x-y plane.

17. The magnetic field sensor of claim 15 , wherein a first line between centers of the first and third magnetic field sensing elements is perpendicular to a second line between centers of the second and fourth magnetic field sensing elements, wherein the first and third major response axes are perpendicular to the second and fourth major response axes.

18. The magnetic field sensor of claim 15 , further comprising a magnet disposed proximate to the first, second, third, and fourth magnetic field sensing elements, wherein the magnet has a north pole and a south pole, a line between which is perpendicular to the major surface of the substrate, wherein a magnetic force of the magnet results in a restoring force upon a shaft.

19. The magnetic field sensor of claim 18 , wherein the magnet is disk shaped.

20. The magnetic field sensor of claim 18 , wherein the magnet is disk shaped and has a central void disposed proximate to the electronic circuit.

21. The magnetic field sensor of claim 15 , wherein the first, second, third, and fourth magnetic field sensing elements are magnetoresistance elements.

22. The magnetic field sensor of claim 15 , wherein the first, second, third, and fourth magnetic field sensing elements are vertical Hall elements.

23. A method of sensing a position of a magnet, comprising:

providing, upon a substrate, first, second, third, and fourth magnetic field sensing elements configured to generate first, second, third and fourth respective electronic magnetic field signals, wherein each electronic magnetic field signal is responsive to a respective magnetic field parallel to the major surface of the substrate, wherein the first and third magnetic field sensing elements have respective first and third maximum response axes parallel to each other, directed in opposite directions, and parallel to the major surface of the substrate, and wherein the second and fourth magnetic field sensing elements have respective second and fourth maximum response axes parallel to each other, directed in opposite directions, and parallel the major surface of the substrate, wherein the first and third major response axes are not parallel to the second and fourth major response axes;

generating a first difference signal related to a difference between the first and third electronic magnetic field signals;

generating a second difference signal related to a difference between the second and fourth electronic magnetic field signals; and

generating a z tilt angle signal representative of an angle relative to a z-axis in x-y-z Cartesian coordinates.

24. The method claim 23 , further comprising

generating at least one of an x direction angle signal or a y direction angle signal, wherein the x direction angle signal is representative of an angle relative to an x-axis in an x-y plane, and wherein the y direction angle signal is representative of an angle relative to a y-axis in the x-y plane.

25. The method of claim 23 , wherein a first line between centers of the first and third magnetic field sensing elements is perpendicular to a second line between centers of the second and fourth magnetic field sensing elements, wherein the first and third major response axes are perpendicular to the second and fourth major response axes.

26. The method of claim 23 , further comprising: providing a magnet disposed proximate to the first, second, third, and fourth magnetic field sensing elements, wherein the magnet has a north pole and a south pole, a line between which is perpendicular to the major surface of the substrate, wherein a magnetic force of the magnet results in a restoring force upon a shaft.

27. The method of claim 26 , wherein the magnet is disk shaped.

28. The method of claim 26 , wherein the magnet is disk shaped and has a central void disposed proximate to the electronic circuit.

29. The method of claim 23 , wherein the first, second, third, and fourth magnetic field sensing elements are magnetoresistance elements.

30. The method of claim 23 , wherein the first, second, third, and fourth magnetic field sensing elements are vertical Hall elements.