Etching techniques for semiconductor devices
View Patent ↗Fabricating a semiconductor device can include forming a metal seed region over a substrate. The method can include forming a mask over a first portion of the metal seed region. The method can also include forming a metal region over the metal seed region and removing the mask. The method can include forming metal contact fingers on the semiconductor device, where the forming includes etching the first portion of the metal seed region with an etchant comprising an acid, an oxidizer and chloride ions.
1. A method of fabricating a semiconductor device, the method comprising:
forming a first metal region over a surface of a substrate;
forming a barrier region over the first metal region;
forming a second metal region over the barrier region, wherein the first metal region, barrier region and second metal region form a metal seed region;
forming a mask over a first portion of the metal seed region;
forming a third metal region over a second portion of the metal seed region;
removing the mask;
forming metal contact fingers on the semiconductor device, wherein the forming includes etching the first portion of the metal seed region with an etchant comprising an acid, an oxidizer and chloride ions, the chloride ions from a source selected from the group consisting of potassium chloride, and sodium chloride, wherein the acid and oxidizer together consist of a combination of all of sulfuric acid, phosphoric acid and hydrogen peroxide.
2. The method of claim 1 , further comprising forming a protective region over the third metal region, wherein the protective region inhibits etching of the third metal region.
3. The method of claim 2 , wherein forming the protective region over the third metal region comprises forming a tin or silver over the third metal region.
4. The method of claim 2 , wherein etching the first portion of the metal seed region with an etchant comprising an acid, an oxidizer and chloride ions to form metal contact fingers over the semiconductor device comprises at least partially etching the protective region over the third metal region.
5. The method of claim 1 , wherein forming the third metal region over the second portion of the metal seed region comprises plating the third metal region to the second portion of the metal seed region.
6. The method of claim 1 , wherein forming the first metal region on the surface of the substrate comprises forming aluminum on the surface of the substrate.
7. The method of claim 1 , wherein etching the first portion of the metal seed region with an etchant comprising an acid, an oxidizer and chloride ions comprises etching the first portion of the metal seed region with an etchant comprising an acid, an oxidizer and chloride ions in a single bath.
8. The method of claim 1 , wherein forming the second metal region over the barrier region comprises forming copper or nickel over the barrier region.
9. The method of claim 1 , wherein etching the first portion of the metal seed region with an etchant comprising an acid, an oxidizer and chloride ions to form metal contact fingers on the semiconductor device comprises etching the first portion of the metal seed region with the etchant comprising sulfuric acid, phosphoric acid, and hydrogen peroxide.
10. The method of claim 1 , wherein etching the first portion of the metal seed region with an etchant comprising an acid, an oxidizer and chloride ions to form metal contact regions on the semiconductor comprises etching away intermetallics with an etchant comprising an acid, an oxidizer and chloride ions.
11. A method of fabricating a semiconductor device, the method comprising:
forming a first metal region over a surface of a substrate;
forming a barrier region over the first metal region;
forming a second metal region over the barrier region, wherein the first metal region, barrier region and second metal region form a metal seed region;
forming a mask over a first portion of the metal seed region; and
etching a second portion of the metal seed region with an etchant comprising an acid, an oxidizer and chloride ions to form a patterned metal seed region on the semiconductor device, the chloride ions from a source selected from the group consisting of potassium chloride, and sodium chloride, wherein the acid and oxidizer together consist of a combination of all of sulfuric acid, phosphoric acid and hydrogen peroxide.
12. The method of claim 11 , further comprising, after etching the second portion of the metal seed region, forming a third metal region over the patterned metal seed region to form metal contact fingers on the semiconductor device.
13. The method of claim 11 , wherein forming a first metal region on the surface of the substrate comprises forming aluminum on the surface of the substrate.
14. The method of claim 11 , wherein etching the second portion of the metal seed region with an etchant comprising an acid, an oxidizer and chloride ions comprises etching the second portion of the metal seed region with an etchant comprising an acid, an oxidizer and chloride ions in a single bath.
15. The method of claim 11 , wherein forming a second metal region over the barrier region comprises forming copper or nickel over the barrier region.
16. The method of claim 11 , wherein etching the second portion of the metal seed region with an etchant comprising an acid, an oxidizer and chloride ions comprises etching the second portion of the metal seed region with the etchant comprising sulfuric acid, phosphoric acid, and hydrogen peroxide.
17. The method of claim 11 , wherein etching the second portion of the metal seed region with an etchant comprising an acid, an oxidizer and chloride ions comprises etching away intermetallics with an etchant comprising an acid, an oxidizer and chloride ions.
18. A method of fabricating a semiconductor device, the method comprising:
forming a metal seed region over a surface of a substrate;
forming a mask over a first portion of the metal seed region;
forming a plated metal to a second portion of the metal seed region;
removing the mask;
forming metal contact fingers on the semiconductor device, wherein the forming includes etching the first portion of the metal seed region with an etchant comprising an acid, an oxidizer and chloride ions, the chloride ions from a source selected from the group consisting of potassium chloride, and sodium chloride, wherein the acid and oxidizer together consist of a combination of all of sulfuric acid, phosphoric acid and hydrogen peroxide.
19. The method of claim 18 , wherein etching the first portion of the metal seed region with an etchant comprising an acid, an oxidizer and chloride ions comprises etching the first portion of the metal seed region with the etchant comprising an acid, an oxidizer and chloride ions in a single bath.
20. The method of claim 18 , wherein etching the metal seed region with an etchant comprising an acid, an oxidizer and chloride ions to form metal contact fingers on the semiconductor device comprises etching the first portion of the metal seed region with the etchant comprising sulfuric acid, phosphoric acid, and hydrogen peroxide in a single bath.