IP Library Granted Patent US 9,666,736
Granted Patent B2
US 9,666,736 · App. 14/761,382 · Granted May 30, 2017

Photodetector arrangement

Inventors: Xianshu Luo (Singapore, SG); Junfeng Song (Singapore, SG); Guo-Qiang Patrick Lo (Singapore, SG)
Assignee: Agency for Science, Technology and Research
H01L31/02327H01L27/1446H01L31/028H01L31/109H01L31/1808G02B6/12004G02B6/2861Y02E10/50
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Quick Facts
Patent No.
US 9,666,736
App. No.
14/761,382
Granted
May 30, 2017
Kind
B2
Abstract

According to embodiments of the present invention, a photodetector arrangement is provided. The photodetector arrangement includes a plurality of germanium-based photodetectors, each germanium-based photodetector configured to receive an optical signal and to generate an electrical signal in response to the received optical signal, and an electrode arrangement arranged to conduct the electrical signals.

Claims (27)

1. A photodetector arrangement comprising:

a plurality of germanium-based photodetectors, each germanium-based photodetector configured to receive an optical signal and to generate an electrical signal in response to the received optical signal; and

an electrode arrangement arranged to conduct the electrical signals;

wherein the electrode arrangement comprises a traveling-wave electrode arrangement.

2. The photodetector arrangement as claimed in claim 1 , wherein the traveling-wave electrode arrangement comprises a coplanar waveguide.

3. The photodetector arrangement as claimed in claim 2 , wherein the coplanar waveguide comprises:

a signal electrode electrically coupled to the plurality of germanium-based photodetectors to conduct the electrical signals; and

two ground electrodes arranged on opposite sides of the signal electrode and spaced apart from the signal electrode.

4. The photodetector arrangement as claimed in claim 3 , wherein the signal electrode has a width of between about 2 μm and about 20 μm.

5. The photodetector arrangement as claimed in claim 3 , wherein a spacing between the signal electrode and each of the two ground electrodes is between about 1 μm and about 200 μm.

6. The photodetector arrangement as claimed in claim 1 , wherein the electrode arrangement comprises:

a first conductive layer defined into a plurality of contacts, a respective contact being electrically coupled to a respective germanium-based photodetector of the plurality of germanium-based photodetectors and electrically isolated from the other contacts; and

a second conductive layer electrically coupled to the plurality of contacts.

7. The photodetector arrangement as claimed in claim 1 , further comprising:

a plurality of waveguides, wherein a respective waveguide of the plurality of waveguides is arranged to propagate the optical signal towards a respective germanium-based photodetector of the plurality of germanium-based photodetectors.

8. The photodetector arrangement as claimed in claim 7 , wherein each waveguide comprises silicon.

9. The photodetector arrangement as claimed in claim 7 , wherein a difference in lengths of respective waveguides corresponding to adjacent germanium-based photodetectors of the plurality of germanium-based photodetectors introduces an optical time delay between the adjacent germanium-based photodetectors such that the respective electrical signals generated by the adjacent germanium-based photodetectors are at least substantially in phase.

10. The photodetector arrangement as claimed in claim 7 , wherein the electrode arrangement is arranged to conduct the electrical signals in a direction at least substantially perpendicular to a direction of propagation of the optical signal through the respective waveguide.

11. The photodetector arrangement as claimed in claim 1 , wherein an impedance of the electrode arrangement is at least substantially matched to at least one electrical parameter of each germanium-based photodetector.

12. The photodetector arrangement as claimed in claim 1 , wherein the plurality of germanium-based photodetectors are arranged one after another in a direction along the conduction of the electrical signals through the electrode arrangement.

13. The photodetector arrangement as claimed in claim 1 , wherein respective electrical signals generated by respective germanium-based photodetectors of the plurality of germanium-based photodetectors are at least substantially in phase.

14. The photodetector arrangement as claimed in claim 1 , wherein each germanium-based photodetector is arranged to receive the optical signal in parallel relative to the other germanium-based photodetectors.

15. The photodetector arrangement as claimed in claim 1 , wherein the plurality of germanium-based photodetectors are arranged spaced apart from each other.

16. The photodetector arrangement as claimed in claim 15 , wherein a period between adjacent germanium-based photodetectors of the plurality of germanium-based photodetectors is between about 20 μm and about 900 μm.

17. The photodetector arrangement as claimed in claim 1 , wherein each germanium-based photodetector has a length of between about 5 μm and about 500 μm.

18. The photodetector arrangement as claimed in claim 1 , wherein each germanium-based photodetector has a width of between about 2 μm and about 50 μm.

19. The photodetector arrangement as claimed in claim 1 , further comprising a substrate, wherein the plurality of germanium-based photodetectors are formed on the substrate.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 16, 2019
From: THE AGENCY FOR SCIENCE, TECHNOLOGY AND RESEARCH
To: ADVANCED MICRO FOUNDRY PTE. LTD.
Reel/Frame 050071/0933 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 11, 2015
From: LUO, XIANSHU; SONG, JUNFENG; LO, GUO-QIANG PATRICK
To: AGENCY FOR SCIENCE, TECHNOLOGY AND RESEARCH
Reel/Frame 036302/0249 →
Priority Claims (1)
SG 201300749 · Jan 30, 2013 · national
Continuity (1)
Related Publication 20150372164A1 · Dec 24, 2015