X-ray radiation source and X-ray tube
In an X-ray radiation source, a counter wall made of alkali-containing glass, out of walls of a housing of an X-ray tube, is sandwiched between a filament and an electric field control electrode to each of which a negative high voltage is applied. This configuration prevents an electric field from being generated in the counter wall and thus suppresses precipitation of alkali ions from the glass. Therefore, it prevents change in potential relationship between electrodes at different potentials such as the filament, grid, and target and enables stable operation to be maintained, without occurrence of a trouble of failure in maintaining a desired X-ray amount.
1. An X-ray radiation source comprising:
an X-ray tube comprising:
a cathode to which a negative high voltage is applied and extending along an inner surface of a counter wall,
a target that generates X-rays with incidence of electrons from the cathode, and
a housing that houses the cathode and the target, the housing comprising:
a window wall with an output window which outputs the X-rays generated from the target to the outside;
a back electrode; and
a main body portion, comprising a counter wall arranged opposite to the window wall, the main body portion joined to the window wall to form a housing space for the cathode and the target, the counter wall comprising alkali-containing glass, the cathode extending along an inner surface of the counter wall;
a power supply unit that generates the negative high voltage applied to the cathode,
an electric field control electrode that is a planar member that has conductivity, controls the electric field occurring at the counter wall, and to which a negative high voltage substantially equal to the negative high voltage supplied to the cathode is applied from the power supply unit, the electric field control electrode being arranged apart from the cathode on an outer surface side of the housing space on an outer surface side of the counter wall to face the cathode and being disposed in a range that includes the entire cathode and back electrode, the counter wall being disposed between the cathode and the electric field control electrode, the outer surface side of the counter wall being a side opposite to an electron emission direction from the cathode toward the target, the electric field control electrode being in close contact with the outer surface of the counter wall, and
a circuit substrate on which the power supply unit is mounted, wherein the electric field control electrode is formed on the circuit substrate and the housing is mounted on the circuit substrate through the electric field control electrode.
2. The X-ray radiation source according to claim 1 ,
wherein an electron emission portion of the cathode is separated from the counter wall,
wherein between the electron emission portion and the counter wall, the back electrode to which a negative high voltage substantially equal to the negative high voltage supplied to the cathode is applied from the power supply unit is arranged so as to face the cathode, and
wherein the electric field control electrode extends along the outer surface of the counter wall so as to face the back electrode.
3. The X-ray radiation source according to claim 1 ,
wherein the electric field control electrode is arranged so as to cover an entire area of the outer surface of the counter wall.
4. The X-ray radiation source according to claim 1 ,
wherein the housing is mounted on the circuit substrate through an insulating member arranged between the electric field control electrode and the circuit substrate.
5. The X-ray radiation source according to claim 1 ,
wherein a through hole in which the housing can be fitted is formed in the circuit substrate, and
wherein the housing is held on the circuit substrate in a state in which the housing is fitted in the through hole, by an insulating cover provided so as to cover the counter wall and the electric field control electrode.
6. The X-ray radiation source according to claim 1 , wherein the main body portion of the housing internally comprises a hollow housing space.
7. An X-ray tube having:
a cathode to which a negative high voltage is applied and extending along an inner surface of a counter wall;
a target that generates X-rays with incidence of electrons from the cathode; and
a housing that houses the cathode and the target, the housing comprising:
a window wall with an output window which outputs the X-rays generated from the target to the outside;
a main body portion, comprising a counter wall arranged opposite to the window wall, the main body portion joined to the window wall to form a housing space for the cathode and the target, the counter wall comprising alkali-containing glass, the cathode extending along an inner surface of the counter wall;
an electric field control electrode that is a planar member that has conductivity, controls the electric field occurring at the counter wall, and to which a negative high voltage substantially equal to the voltage supplied to the cathode is applied from a power supply unit, the electric field control electrode being arranged apart from the cathode on an outer surface side of the housing space on an outer surface side of the counter wall to face the cathode and being disposed in a range that includes the entire cathode and back electrode, the counter wall being disposed between the cathode and the electric field control electrode, the outer surface side of the counter wall being a side opposite to an electron emission direction from the cathode toward the target, the electric field control electrode being in close contact with the outer surface of the counter wall, and
wherein a circuit substrate on which the power supply unit is mounted, wherein the electric field control electrode is formed on the circuit substrate and the housing is mounted on the circuit substrate through the electric field control electrode.
8. The X-ray tube according to claim 7 ,
wherein an electron emission portion of the cathode is separated from the counter wall,
wherein between the electron emission portion and the counter wall, the back electrode to which a negative high voltage substantially equal to the negative high voltage supplied to the cathode is applied is arranged so as to face the cathode, and
wherein the electric field control electrode extends along the outer surface of the counter wall so as to face the back electrode.
9. The X-ray tube according to claim 7 ,
wherein the electric field control electrode is arranged so as to cover an entire area of the outer surface of the counter wall.
10. The X-ray tube according to claim 7 ,
wherein an insulating member is further provided so as to cover the electric field control electrode.
11. The X-ray tube according to claim 7 , wherein the main body portion of the housing internally comprises a hollow housing space.
12. The X-ray tube according to claim 10 ,
wherein the insulating member is a sheet-like member comprised of an insulating material, and
wherein the electric field control electrode is arranged on the sheet-like member.