Light emitting die component formed by multilayer structures
View Patent ↗The present invention relates to a light emitting die component formed by multilayer structures. The light emitting die component comprises a semiconductor structure ( 103 ) comprising: an n-type layer ( 104 ), an active region ( 106 ) and a p-type layer ( 108 ); a p-contact layer ( 110 ) arranged to be in electrical contact with said p-type layer ( 108 ); an n-contact layer ( 116 ) arranged to be in electrical contact with said n-type layer ( 104 ); a first dielectric layer ( 114 ) arranged to electrically isolate said p-contact layer ( 110 ) from said n-contact layer ( 116 ); a thermal spreading layer ( 120 ) comprising a first and a second region ( 120 a, 120 b ) being electrically isolated from each other, wherein said first region ( 120 a ) forming an anode electrode of said light emitting die component and said second region ( 120 b ) forming a cathode electrode of said light emitting die component; a second dielectric layer ( 118 ) arranged to electrically isolate said n-contact layer ( 116 ) from said first region ( 120 a ) or to electrically isolate said p-contact layer ( 110 ) from said second region ( 120 b ); a third dielectric layer ( 122 ) arranged to electrically isolate said first and second regions ( 120 a, 120 b ); and an interconnect pad ( 124 ) enabling interconnection with a submount ( 126 ).
1. A light emitting die component formed by multilayer structures, said light emitting die component comprising:
a semiconductor structure comprising an upper semiconductor layer, a lower semiconductor layer of a different conductivity type from said upper semiconductor layer, and an active region between said upper and said lower semiconductor layers;
an upper contact layer arranged to be in electrical contact with said lower semiconductor layer;
a lower contact layer arranged to be in electrical contact with said upper semiconductor layer and substantially overlap said upper contact layer and said upper semiconductor layer;
a first dielectric layer arranged between said upper and said lower contact layers in their overlap to electrically isolate them from each other;
one or more vias passing through via openings in said first dielectric layer, said upper contact layer, said lower semiconductor layer, and said active region to electrically couple said upper semiconductor layer and said lower contact layer;
a thermal spreading layer comprising a first region and a second region being electrically isolated from each other, wherein said first region is arranged to be in electrical contact with said upper contact layer and said second region is arranged directly on said lower contact layer to be in electrical contact with said lower contact layer;
a second dielectric layer arranged between said lower contact layer and said first region to electrically isolate them from each other;
one or more projection areas passing through said second dielectric layer, said lower contact layer, and said first dielectric layer to electrically couple said upper contact layer and said first region;
first and second interconnect pads arranged to be in electrical contact with said first and said second regions, respectively, wherein said first and said second interconnect pads enable interconnection with a submount; and
a third dielectric layer arranged between said thermal spreading layer and said first and said second interconnect pads to electrically isolate said first region from said second interconnect pad and to electrically isolate said second region from said first interconnect pad.
2. A light emitting die component according to claim 1 , wherein said thermal spreading layer has a thickness great than 10 micrometers and less than 30 micrometers.
3. A light emitting die component according to claim 1 , wherein said thermal spreading layer exhibits a thermal conductivity of 380 W/mK or more at room temperature.
4. A light emitting die component according claim 1 , wherein said thermal spreading layer is made of metal.
5. A light emitting die component according to claim 1 , wherein said light emitting die component further comprises a substrate.
6. A light emitting die component according to claim 1 , wherein said light emitting die component has a flip-chip geometry.
7. A light emitting die component according to claim 1 , wherein said light emitting die component has a thin-film flip-chip geometry.
8. A light emitting die component according to claim 1 , wherein said first dielectric layer comprises a material with a thermal conductivity of at least 10 W/mK.
9. A light emitting die component according to claim 1 , wherein said lower contact layer comprises an n-contact layer and said one or more vias comprise at least 20 vias per mm 2 .
10. A light emitting die component according to claim 1 , wherein said lower contact layer comprises a p-contact layer and said one or more vias comprise at least 20 vias per mm 2 .
11. A light emitting die component according to claim 1 , wherein said second dielectric layer comprises benzocyclobutene.
12. A light emitting diode comprising a light emitting die component according to claim 1 .
13. A light emitting die component according to claim 1 , wherein said thermal spreading layer has a thickness great than 15 micrometers and less than 25 micrometers.
14. A light emitting die component according claim 1 , wherein said thermal spreading layer is made of copper.
15. A light emitting die component according to claim 1 , wherein said light emitting die component further comprises a sapphire substrate.
16. A light emitting die component according to claim 1 , wherein said first dielectric layer comprises portions around said one or more vias, and said second dielectric layer comprises portions around said one or more projection areas.